Abstract: Cultured muscle tissue used as actuators in microelectromechanical systems (MEMS) for mechanical and electrical power generation can either be dissected or cultured from myoblasts and grown in situ. The MEMS is fabricated using conventional techniques (surface or bulk micromachining) and incorporating surface modification techniques and/or anchor structures to favor muscle attachment followed by post-processing to assemble dissected muscle tissue or grow the self-assembling muscle tissue at the desired sites. Initial post processing is done to incorporate PZT devices for energy conversion. Additional post-processing is then done for muscle tissue self-assembling; that includes coating the MEMS with polymers that will either repel or favor the muscle growth, and the culturing on the muscle tissue starting from myoblasts. The system is fueled by adding glucose to the medium in which it is contained.

Abstract: Suspended single crystal silicon (SCS) beams coated with metal form transmission lines that are used in MEMs type microactuated phase shifters and switches. The characteristic impedance of any section of the transmission lines is a function of the beam spacing in that section. Microactuators, such as comb-drive actuators, are connected to the beams to vary this spacing in a controllable manner. A continuos phase shifter is formed that consists of two tunable capacitance sections connected by a matching section that reduces reflections and improves compliance of the beams to reduce the energy required to move the beams.

Abstract: Suspended single crystal silicon (SCS) beams coated with metal form transmission lines that are used in MEMs type microactuated phase shifters and switches. The characteristic impedance of any section of the transmission lines is a function of the beam spacing in that section. Microactuators, such as comb-drive actuators, are connected to the beams to vary this spacing in a controllable manner. A continuos phase shifter is formed that consists of two tunable capacitance sections connected by a matching section that reduces reflections and improves compliance of the beams to reduce the energy required to move the beams.