Patents by Inventor Herman Coenraad Willem Beijerinck

Herman Coenraad Willem Beijerinck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS pressure sensor
    Patent number: 8256298
    Abstract: A MEMS pressure sensor for sensing the pressure in a sealed cavity of a MEMS device, comprises a resonant MEMS device having a pressure sensor resonator element which comprises an array of openings. The resonant frequency of the resonant MEMS device is a function of the pressure in the cavity, with resonant frequency increasing with pressure. Over the pressure range 0 to 0.1 kPa, the average change in frequency is at least 10?6/Pa. The invention is based on the recognition that for fast oscillation, the elastic force causes the resonance frequency to shift. Therefore, it is possible to sense the pressure by a device with resonance frequency that is sensitive to the pressure.
    Type: Grant
    Filed: October 7, 2010
    Date of Patent: September 4, 2012
    Assignee: NXP B.V.
    Inventors: Matthijs Suijlen, Jan Jacob Koning, Herman Coenraad Willem Beijerinck
  • MEMS PRESSURE SENSOR
    Publication number: 20110107838
    Abstract: A MEMS pressure sensor for sensing the pressure in a sealed cavity of a MEMS device, comprises a resonant MEMS device having a pressure sensor resonator element which comprises an array of openings. The resonant frequency of the resonant MEMS device is a function of the pressure in the cavity, with resonant frequency increasing with pressure. Over the pressure range 0 to 0.1 kPa, the average change in frequency is at least 10?6/Pa. The invention is based on the recognition that for fast oscillation, the elastic force causes the resonance frequency to shift. Therefore, it is possible to sense the pressure by a device with resonance frequency that is sensitive to the pressure.
    Type: Application
    Filed: October 7, 2010
    Publication date: May 12, 2011
    Applicant: NXP B.V.
    Inventors: Matthijs SUIJLEN, Jan Jacob KONING, Herman Coenraad Willem BEIJERINCK