Patents by Inventor Herman Mader

Herman Mader has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for imaging laserinterferometry and a laserinterferometer for carrying out said process
    Patent number: 4838694
    Abstract: The present invention relates to a laserinterferometric process, in particular, for use in etching thin layers, whereby a layer to be examined is radiated with a laser passing over a surface of the layer and the intensity of the reflected laser beam, which is composed of a beam reflected from the surface of the layer to be examined and one reflected from its lower interface is ascertained and evaluated by a data processing system from which the information concerning the layer to be examined is read out. The present invention also relates to an imaging laserinterferometer comprising a modulator, which deflects the laser beam, a detector for the reflected laser beam and a data processing systen, which analyzes the detector signals.
    Type: Grant
    Filed: September 9, 1987
    Date of Patent: June 13, 1989
    Assignee: Fraunhofer Gesellschaft zur Forderung
    Inventors: Hans Betz, Herman Mader, Joachim Pelka