Patents by Inventor Herman Van Der Schoot

Herman Van Der Schoot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20070178704
    Abstract: The invention provides a lithographic apparatus including an illumination system configured to condition a radiation beam, a patterning device support constructed to support a transmissive patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, and a projection system configured to project the patterned radiation beam onto a target portion of the substrate, wherein the patterning device support is configured to hold a patterning device and wherein the lithographic apparatus includes a clamping device, the clamping device being configured to clamp the patterning device at the top side.
    Type: Application
    Filed: January 31, 2006
    Publication date: August 2, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Erik Loopstra, Bernardus Luttikhuis, Herman Van Der Schoot, Fransicus Jacobs