Patents by Inventor Hermann Zwirglmaier

Hermann Zwirglmaier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6055842
    Abstract: A method for monitoring the calibration of and calibrating rotating tools ich are liable to deviate, wherein at least one known deviation is recorded at a first predetermined rotational speed. The method can be used with annular saws that divide workpieces into semiconductor wafers.
    Type: Grant
    Filed: July 24, 1998
    Date of Patent: May 2, 2000
    Assignee: Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
    Inventors: Karl Kobler, Hanifi Malcok, Hermann Zwirglmaier
  • Patent number: 4991475
    Abstract: The invention is a method and apparatus for sawing bar-shaped workpieces o slices by means of an annular saw. The saw blade deviation, from its nominal position in the axial direction during the sawing operation, is compensated for. According to the invention, the deviation can be compensated for by the workpiece and the clamping system of the saw blade performing an appropriate relative translatory axial movement in accordance with the measured deviation. This movement is conveniently controlled by a computer, which compares the actual and nominal position of the saw blade with one another. The method can be used especially in the sawing of semiconductor bars.
    Type: Grant
    Filed: February 13, 1990
    Date of Patent: February 12, 1991
    Assignee: Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH
    Inventors: Hanifi Malcok, Hermann Zwirglmaier