Patents by Inventor HESHIG BAYAN

HESHIG BAYAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250068123
    Abstract: A method and a device for compensating a surface error of a holographic grating substrate based on scanning and exposure technology relates to a technical field of grating development. The method and the device adopt surface error compensation technology based on phase modulation of interference fringes of a scanning beam interference lithography system. The method and the device solve a poor grating diffraction wavefront quality caused by a surface processing error in a field of holographic grating research and improves full-aperture diffraction wavefront quality of a grating.
    Type: Application
    Filed: August 22, 2024
    Publication date: February 27, 2025
    Inventors: HESHIG BAYAN, SHAN JIANG, YUBO LI, ZHAOWU LIU, WEI WANG, WENHAO LI, SHUO LI, YANXIU JIANG