Patents by Inventor Heyang Li

Heyang Li has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11428828
    Abstract: A method of investigating a specimen using a tomographic imaging apparatus comprising: A specimen holder, for holding the specimen; A source, for producing a beam of radiation that can be directed at the specimen; A detector, for detecting a flux of radiation transmitted through the specimen from the source; A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes; A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen, which method comprises the following steps: Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon; Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes; Choosing discrete viewing axes in sa
    Type: Grant
    Filed: February 25, 2019
    Date of Patent: August 30, 2022
    Assignee: FEI Company
    Inventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Benoit Recur, Heyang Li, Trond Karsten Varslot
  • Publication number: 20190187306
    Abstract: A method of investigating a specimen using a tomographic imaging apparatus comprising: A specimen holder, for holding the specimen; A source, for producing a beam of radiation that can be directed at the specimen; A detector, for detecting a flux of radiation transmitted through the specimen from the source; A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes; A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen, which method comprises the following steps: Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon; Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes; Choosing discrete viewing axes in sa
    Type: Application
    Filed: February 25, 2019
    Publication date: June 20, 2019
    Applicant: FEI Company
    Inventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Benoit Recur, Heyang Li, Trond Karsten Varslot
  • Patent number: 10254419
    Abstract: A method of investigating a specimen using a tomographic imaging apparatus using a stage for producing relative motion of a source with respect to a specimen, so as to allow the source and a detector to image the specimen along a series of different viewing axes and a processing apparatus for assembling a tomographic image of at least part of the specimen. The investigation is carried out by considering a virtual reference surface that surrounds the specimen and is substantially centered thereon, considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to the series of viewing axes, choosing discrete viewing axes in the series so as to cause the set to comprise a two-dimensional lattice of points located areally on the reference surface in a substantially uniform distribution.
    Type: Grant
    Filed: August 15, 2016
    Date of Patent: April 9, 2019
    Assignee: FEI Company
    Inventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Benoit Recur, Heyang Li, Trond Karsten Varslot
  • Patent number: 10078057
    Abstract: A method of investigating a specimen using a tomographic imaging apparatus, by performing, in multiple iterations, the following steps: (i) Using a Back Projection technique to produce an initial tomogram from a set of initial images; (ii) Subjecting said initial tomogram to a mathematical filtering operation, thereby producing an adjusted tomogram; (iii) Using a Forward Projection technique on said adjusted tomogram to dissociate it into a set of calculated images; (iv) Repeating steps (i)-(iii) until said calculated images satisfy an acceptance criterion.
    Type: Grant
    Filed: July 20, 2016
    Date of Patent: September 18, 2018
    Assignee: FEI Company
    Inventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Benoit Recur, Heyang Li
  • Publication number: 20170059493
    Abstract: A method of investigating a specimen using a tomographic imaging apparatus comprising: A specimen holder, for holding the specimen; A source, for producing a beam of radiation that can be directed at the specimen; A detector, for detecting a flux of radiation transmitted through the specimen from the source; A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes; A processing apparatus, for performing a mathematical reconstruction step whereby output from the detector is compiled into a tomographic image of at least part of the specimen, wherein said reconstruction step is performed in multiple iterations, which comprise the following steps: (i) Using a Back Projection technique to produce an initial tomogram from a set of initial images; (ii) Subjecting said initial tomogram to a mathematical filtering operation, thereby producing an adjusted tomogram; (iii) Using a
    Type: Application
    Filed: July 20, 2016
    Publication date: March 2, 2017
    Applicant: FEI Company
    Inventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Benoit Recur, Heyang Li
  • Publication number: 20170052264
    Abstract: A method of investigating a specimen using a tomographic imaging apparatus using a stage for producing relative motion of a source with respect to a specimen, so as to allow the source and a detector to image the specimen along a series of different viewing axes and a processing apparatus for assembling a tomographic image of at least part of the specimen. The investigation is carried out by considering a virtual reference surface that surrounds the specimen and is substantially centered thereon, considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to the series of viewing axes, choosing discrete viewing axes in the series so as to cause the set to comprise a two-dimensional lattice of points located areally on the reference surface in a substantially uniform distribution.
    Type: Application
    Filed: August 15, 2016
    Publication date: February 23, 2017
    Applicant: FEI Company
    Inventors: Andrew Kingston, Shane Latham, Adrian Sheppard, Glenn Myers, Benoit Recur, Heyang Li, Trond Karsten Varslot