Patents by Inventor Hibert Cyrille

Hibert Cyrille has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for manufacturing mems
    Publication number: 20050227428
    Abstract: The invention concerns a process for manufacturing a Micro-Electro-Mechanical-System (MEMS) comprising the use of a sacrificial layer, the process being characterized by the fact that the sacrificial layer is made of silicon. The invention also concerns MEMS devices such as SG-MOSEFT, MEMS switches or MEMS tunable capacitors which may be obtained according to the previous cited process.
    Type: Application
    Filed: September 6, 2002
    Publication date: October 13, 2005
    Inventors: Ionescu Mihai, Fluckiger Philippe, Hibert Cyrille, Fritschi Raphael, Pott Vincent