Abstract: There are provided a reflective photomask and a reflective photomask blank having a high contrast of a minute pattern to an inspection light and capable of minimizing the shadowing effect in EUV exposure. A reflective photomask blank (100) of this embodiment includes: a substrate (11); a reflective part (17); and a low reflective part (18), in which the low reflective part (18) is a multi-layer structural body having at least two or more layers including an absorption layer (14) and an outermost layer (15), an extinction coefficient k to a wavelength of 13.5 nm of the absorption layer (14) is k>0.041, and the film thickness of the low reflective part (18) is a film thickness satisfying 0.5×da+dc?21.5 nm or a film thickness satisfying 0.5×da+dc?27.5 nm, wherein the film thickness of the absorption layer (14) is da and the film thickness of the outermost layer (15) is dc.

Abstract: There is provided a reflective photomask blank capable of suppressing or reducing the shadowing effect of a reflective photomask for patterning transfer using a light having a wavelength in the extreme ultraviolet region as a light source and sufficiently having heat resistance in exposure. The reflective photomask blank is configured to have a substrate 1, a reflective layer 2 including a multi-layer film formed on the substrate 1, and an absorption layer 4 formed on the reflective layer 2. The absorption layer 4 contains a total of 50 at % or more of indium (In) and nitrogen (N). The atomic number ratio (N/In) of nitrogen (N) to indium (In) in the absorption layer 4 is set to 0.5 or more and 1.5 or less. The layer thickness of the absorption layer 4 is set to 17 nm or more and 45 nm or less.

Abstract: This invention provides a reflective photomask blank and a reflective photomask suppressing or reducing the shadowing effect of a reflective photomask for patterning transfer using a light having a wavelength in the extreme ultraviolet region as a light source and having high interlayer adhesion between a capping layer and a low reflective part.

Abstract: The present invention provides a reflective mask capable of reducing the shadowing effect and having sufficient hydrogen radical resistance and a method for producing the reflective mask.

Abstract: The liner of a combustor (100) for a gas turbine engine is provided with a projection region (111) provided with a plurality of projections (110) each projecting toward the compressed air chamber (56) from the liner outer surface and having a vertical wall portion (114) extending substantially orthogonally to a flow direction of compressed air flowing in the compressed air chamber, and a plurality of cooling holes (118) passed through the liner from the liner outer surface to the liner inner surface such that an end of each cooling hole on a side of the compressed air chamber is more downstream than an end of the cooling hole on a side of the combustion chamber (52) with respect to the flow direction of the compressed air in the compressed air chamber, at least a part of the cooling holes being formed in the projection region.

Abstract: A fuel nozzle device (100) for injecting liquid fuel into a combustion chamber (52) of a gas turbine engine (10) includes an outer tube (101), a rear end wall (102) closing a base end of the outer tube, a tapered conical tube (104) defining a first air passage (112) therein, and a second air passage (114) having an annular cross section jointly with the outer tube, a fuel passage (108) axially passed through the rear end wall, and leading to a fuel ejection port (109) directed toward an inner circumferential surface of a base end of the conical tube, a first air introduction passage (111) passed through the outer tube to communicate with the first air passage, and a second air introduction passage (113) passed through the outer tube to communicate with the second air passage.

Abstract: There are provided a reflective mask blank in which a fine absorption film pattern is formed even when a high-absorbent material is used as an absorption film of an EUV mask, whereby the shadowing effect can be reduced and electron beam repair etching can be performed and a reflective mask blank for producing the same. A reflective mask blank (10) according to this embodiment includes: a substrate (1); a multi-layer reflective film (2) reflecting an EUV light having a multi-layer structure formed on the substrate (1); a capping layer (3) protecting the multi-layer reflective film (2) formed on the multi-layer reflective film (2); and an absorption film (4) absorbing the EUV light formed on the capping layer (3), in which the absorption film (4) contains 50% by atom or more of elements constituting at least one of tin oxide (SnO) and indium oxide (InO) and contains a material easy to be etched by a fluorine-based gas or a chlorine-based gas.

Abstract: The present invention is intended to provide a reflective photomask blank and a reflective photomask that suppress or reduce a shadowing effect of a reflective photomask for pattern transfer using light with a wavelength in an extreme ultraviolet region as a light source and that have hydrogen radical resistance. A reflective photomask blank (10) according to an embodiment of the present invention is a reflective photomask blank for producing a reflective photomask for pattern transfer using extreme ultraviolet light as a light source, and includes a substrate (1), a reflective layer (2) including a multi-layer film formed on the substrate (1), and an absorption layer (4) formed on the reflective layer (2). The absorption layer (4) is formed of a material containing a total of 50 atomic % or more of indium (In) and oxygen (O). An atomic number ratio (O/In) of oxygen (O) to indium (In) in the absorption layer (4) exceeds 1.

Abstract: The present invention is intended to provide a reflective photomask blank and a reflective photomask that have high hydrogen radical resistance and minimize a shadowing effect to improve transferability. A reflective photomask blank (10) according to the present embodiment includes a substrate (1), a reflective portion (7), and a low reflective portion (8). The low reflective portion (8) includes an absorption layer (4) and an outermost layer (5). The absorption layer (4) includes a total of 50 atomic% or more of one or more selected from a first material group. The outermost layer (5) includes a total of 80 atomic% or more of at least one or more selected from a second material group. The first material group includes indium, tin, tellurium, cobalt, nickel, platinum, silver, copper, zinc, bismuth, and oxides, nitrides, and oxynitrides thereof.

Abstract: There are provided a reflective mask having a coating film uniformly formed along the outermost surface and the side surfaces of a transfer pattern, having high EUV transmittance, and having high cleaning resistance and a production method therefor. To achieve the object, for example, a reflective mask (100) includes: a substrate (1); a multilayer reflective film (2) formed on the substrate (1) and reflecting an incident EUV light; an absorption layer (4) formed on at least a part of the multilayer reflective film (2) and absorbing the incident EUV light; and a coating film (5) formed on the multilayer reflective film (2) and on the absorption layer (4) and transmitting the incident EUV light, in which the coating film (5) has an extinction coefficient k of 0.04 or less to the EUV light, is resistant to cleaning with a cleaning chemical solution, and is formed with a uniform film thickness on the surface and the side surfaces of the absorption layer (4).

Abstract: To provide a reflective photomask blank and a reflective photomask that suppress or reduce a shadowing effect of a reflective photomask for patterning transfer using a light having a wavelength in the extreme ultraviolet region as a light source and have resistance to hydrogen radicals. A reflective photomask blank (10) according to this embodiment is a reflective photomask blank used for manufacturing a reflective photomask for pattern transfer using an extreme ultraviolet light as a light source, and the reflective photomask blank has: a substrate (1); a reflective layer (2) containing a multi-layer film formed on the substrate (1); and an absorption layer (4) formed on the reflective layer (2), in which the absorption layer (4) is formed of a material containing tin (Sn) and oxygen (O) in the proportion of 50 at % or more in total, the atomic number ratio (O/Sn) of oxygen (O) to tin (Sn) in the absorption layer (4) exceeds 2.

Abstract: A fuel nozzle device (100) for injecting liquid fuel into a combustion chamber (52) of a gas turbine engine (10) includes an outer tube (101), a rear end wall (102) closing a base end of the outer tube, a tapered conical tube (104) defining a first air passage (112) therein, and a second air passage (114) having an annular cross section jointly with the outer tube, a fuel passage (108) axially passed through the rear end wall, and leading to a fuel ejection port (109) directed toward an inner circumferential surface of a base end of the conical tube, a first air introduction passage (111) passed through the outer tube to communicate with the first air passage, and a second air introduction passage (113) passed through the outer tube to communicate with the second air passage.

Abstract: The liner of a combustor (100) for a gas turbine engine is provided with a projection region (111) provided with a plurality of projections (110) each projecting toward the compressed air chamber (56) from the liner outer surface and having a vertical wall portion (114) extending substantially orthogonally to a flow direction of compressed air flowing in the compressed air chamber, and a plurality of cooling holes (118) passed through the liner from the liner outer surface to the liner inner surface such that an end of each cooling hole on a side of the compressed air chamber is more downstream than an end of the cooling hole on a side of the combustion chamber (52) with respect to the flow direction of the compressed air in the compressed air chamber, at least a part of the cooling holes being formed in the projection region.

Abstract: A manufacturing apparatus of a core material of a highly reliable vacuum heat insulating material having excellent workability, usability, and heat insulating performance is provided. The manufacturing apparatus of a core material of a vacuum heat insulating material related to the present invention includes: a reel for winding up a fiber assembly which has a predetermined width and is wound on a substantially cylindrical original fabric roll which has been cut to have a predetermined width, at a predetermined number of times; cutting means for cutting the fiber assembly which has been wound on the reel; and a forming member for forming the fiber assembly into a flat-plate-shaped core material after removing from the reel the fiber assembly which has been wound up on the reel at the predetermined number of times and been cut.

Abstract: A highly reliable vacuum heat insulating material having excellent workability, usability, and heat insulating performance, and a heat insulation box using the vacuum heat insulating material are provided. A vacuum heat insulating material includes: a first fiber assembly made by aligning a plurality of sheet-shaped fiber assemblies, which are continuous in a length direction, so as to be next to each other in a width direction; a second fiber assembly provided so as to overlap the first fiber assembly and made by aligning a plurality of sheet-shaped fiber assemblies, which are continuous in the length direction, so as to be next to each other in the width direction; and a core material formed in a flat plate shape by winding up the first fiber assembly and the second fiber assembly continuously from inside toward outside while being displaced by a predetermined amount Xb in the width direction.

Abstract: A highly reliable vacuum heat insulating material having excellent workability, usability, and heat insulating performance, and a heat insulation box using the vacuum heat insulating material are provided. A vacuum heat insulating material includes: a first fiber assembly made by aligning a plurality of sheet-shaped fiber assemblies, which are continuous in a length direction, so as to be next to each other in a width direction; a second fiber assembly provided so as to overlap the first fiber assembly and made by aligning a plurality of sheet-shaped fiber assemblies, which are continuous in the length direction, so as to be next to each other in the width direction; and a core material formed in a flat plate shape by winding up the first fiber assembly and the second fiber assembly continuously from inside toward outside while being displaced by a predetermined amount Xb in the width direction.

Abstract: There are provided a vacuum thermal insulating material that is excellent in terms of a handling property, a thermal insulating property, creep resistance, and productivity; and a thermal insulating box including the vacuum thermal insulating material. A core material was enclosed and sealed in a wrapping material with a gas barrier property. The core material of the vacuum thermal insulating material in which the interior of the wrapping material is in a decompression state, is constituted by one organic fibrous assembly having continuous organic fibers formed sheet-shaped or a stack of the organic fibrous assemblies.

Abstract: A manufacturing apparatus of a core material of a highly reliable vacuum heat insulating material having excellent workability, usability, and heat insulating performance is provided. The manufacturing apparatus of a core material of a vacuum heat insulating material related to the present invention includes: a reel for winding up a fiber assembly which has a predetermined width and is wound on a substantially cylindrical original fabric roll which has been cut to have a predetermined width, at a predetermined number of times; cutting means for cutting the fiber assembly which has been wound on the reel; and a forming member for forming the fiber assembly into a flat-plate-shaped core material after removing from the reel the fiber assembly which has been wound up on the reel at the predetermined number of times and been cut.

Abstract: A highly reliable vacuum heat insulating material having excellent workability, usability, and heat insulating performance, and a heat insulation box using the vacuum heat insulating material are provided. A vacuum heat insulating material includes: a first fiber assembly made by aligning a plurality of sheet-shaped fiber assemblies, which are continuous in a length direction, so as to be next to each other in a width direction; a second fiber assembly provided so as to overlap the first fiber assembly and made by aligning a plurality of sheet-shaped fiber assemblies, which are continuous in the length direction, so as to be next to each other in the width direction; and a core material formed in a flat plate shape by winding up the first fiber assembly and the second fiber assembly continuously from inside toward outside while being displaced by a predetermined amount Xb in the width direction.

Abstract: In a vacuum thermal insulating material having a core material enclosed in a gas barrier container whose inside is made to be a decompressed state, the core material has a lamination structure in which a plurality of sheet-shaped long fiber organic fibrous assemblies are continuously wound up from an inner periphery to an outer periphery. Then, a plurality of sheet-shaped organic fibrous assemblies are arranged in parallel and sheet-shaped multiple organic fibrous assemblies having joint sections are formed. The joint sections are made not to overlap with the upper and lower of joint sections.