Abstract: A flat limiting-current sensor 10 includes a solid electrolyte substrate 22, a negative electrode 34a and a positive electrode 32a. The negative and positive electrodes 34a and 32a, respectively, are disposed on the same side of the solid electrolyte substrate 22. A voltage of 0.8 V is applied between the negative electrode 34a and the positive electrode 32a in order to determine oxygen concentration. The ratio between the area of the negative electrode 34a and the area of the positive electrode 32a is set to 1:2, thereby reducing element resistance to 74% that of the case where the negative electrode and the positive electrode assume the same area. Thus, the measurement accuracy of the flat limiting-current sensor 10 is improved.

Abstract: An oxygen concentrating apparatus including an output variable type compressor. Oxygen-concentrated gas may be supplied either continuously or synchronized with inhalation or timing of inhalations. In one aspect, when synchronous operation is selected, the compressor is operated at a lower output in comparison with continuous supply operation. In a second aspect, when synchronous operation is selected, the supply quantity of oxygen-concentration gas is set to zero during the exhalation period.

Abstract: A small oxygen enriching apparatus which can supply oxygen-enriched gas at high flow rate without imparting unnatural sensation to a user, as well as a controller and recording medium therefore. In step 100, a judgment is made as to whether a flow rate set by use of a flow-rate setting unit 45 is equal to or less than a continuous base flow rate (3 liters/min). When the set flow rate is a low flow rate of not greater than 3 liters/min, breath-synchronized operation is not performed (continuous supply is to be performed), and therefore, in step 110, oxygen-enriched gas is supplied continuously at the set flow rate. When the set flow rate is a high flow rate of greater than 3 liters/min, breath-synchronized operation is to be performed, and therefore, in step 120, the orifice is set to an opening that enables supply at 5 liters/min. In step 140, in order to perform breath-synchronized operation, control for opening and closing an electromagnetic valve 47 is performed.

Abstract: An oxygen enriching apparatus which can supply oxygen or oxygen-enriched gas to a user at proper timings, as well as a controller and recording medium therefore. In step 100, a signal from a pressure sensor 53 is input. In subsequent step 110, on the basis of the signal output from the pressure sensor 53, a judgment is made as to whether the state of inhalation can be detected. When the result of judgment is “Yes,” this means that an anomalous state exists. In this case, the processing proceeds to step 120. When the result of judgment is “No,” this means that the patient and the apparatus are normal. In this case, the present processing is suspended. When start of inhalation cannot be detected over, for example, a period of 10 seconds or more, an anomalous state is judged to have arisen. In step 120, because of the anomalous state having arisen, the electromagnetic valve 47 is driven to open the supply passage 29 so as to supply oxygen-enriched gas over a period of about 4 seconds.

Abstract: An oxygen concentrating apparatus including an output variable type compressor. Oxygen-concentrated gas may be supplied either continuously or synchronized with inhalation or timing of inhalations. In one aspect, when synchronous operation is selected, the compressor is operated at a lower output in comparison with continuous supply operation. In a second aspect, when synchronous operation is selected, the supply quantity of oxygen-concentration gas is set to zero during the exhalation period.

Abstract: A small oxygen enriching apparatus which can supply oxygen-enriched gas at high flow rate without imparting unnatural sensation to a user, as well as a controller and recording medium therefore. In step 100, a judgment is made as to whether a flow rate set by use of a flow-rate setting unit 47 is equal to or less than a continuous base flow rate (2 liters/min). When the set flow rate is a low flow rate of not greater than 2 liters/min, breath-synchronized operation is not performed (continuous supply is to be performed), and therefore, in step 110, oxygen-enriched gas is supplied continuously at the set flow rate. When the set flow rate is a high flow rate of greater than 2 liters/min, breath-synchronized operation is to be performed (supply during the inhalation period only of each breathing cycle), and therefore, in step 120, oxygen-enriched gas is continuously supplied at the continuous base flow rate.

Abstract: A gas sensor includes a sensor element formed of a solid electrolyte having an oxygen ion conductivity; a cathode and an anode, each formed of a porous metal material and each formed on the sensor element, to produce a pumping current reflecting a concentration of a detection component in a measurement gas when a predetermined voltage is applied between the cathode and the anode. The detection component contains oxygen. The measurement gas contacts the cathode. The gas sensor also includes a gas diffusion control to vary the oxygen pumping current in accordance with a pressure of the measurement gas by controlling a diffusion of the measurement gas. The measurement gas moves from a measurement atmosphere toward the cathode by way of the gas diffusion control. Thereby, information on the pressure of the measurement gas is obtained based on the oxygen pumping current.

Abstract: A flat limiting-current sensor 10 includes a solid electrolyte substrate 22, a negative electrode 34a and a positive electrode 32a. The negative and positive electrodes 34a and 32a, respectively, are disposed on the same side of the solid electrolyte substrate 22. A voltage of 0.8 V is applied between the negative electrode 34a and the positive electrode 32a in order to determine oxygen concentration. The ratio between the area of the negative electrode 34a and the area of the positive electrode 32a is set to 1:2, thereby reducing element resistance to 74% that of the case where the negative electrode and the positive electrode assume the same area. Thus, the measurement accuracy of the flat limiting-current sensor 10 is improved.

Abstract: A gas sensor device including a housing provided with an inlet for introducing a gas to be measured, a sensor element capable of detecting oxygen gas or the like contained in the gas and a base element supporting the sensor element within the interior of the housing. The base element is integrally assembled to the housing by means of a seal.

Abstract: A small oxygen enriching apparatus which can supply oxygen-enriched gas at high flow rate without imparting unnatural sensation to a user, as well as a controller and recording medium therefore. In step 100, a judgment is made as to whether a flow rate set by use of a flow-rate setting unit 45 is equal to or less than a continuous base flow rate (3 liters/min). When the set flow rate is a low flow rate of not greater than 3 liters/min, breath-synchronized operation is not performed (continuous supply is to be performed), and therefore, in step 110, oxygen-enriched gas is supplied continuously at the set flow rate. When the set flow rate is a high flow rate of greater than 3 liters/min, breath-synchronized operation is to be performed, and therefore, in step 120, the orifice is set to an opening that enables supply at 5 liters/min. In step 140, in order to perform breath-synchronized operation, control for opening and closing an electromagnetic valve 47 is performed.

Abstract: An oxygen enriching apparatus which can supply oxygen or oxygen-enriched gas to a user at proper timings, as well as a controller and recording medium therefore. In step 100, a signal from a pressure sensor 53 is input. In subsequent step 110, on the basis of the signal output from the pressure sensor 53, a judgment is made as to whether the state of inhalation can be detected. When the result of judgment is “Yes,” this means that an anomalous state exists. In this case, the processing proceeds to step 120. When the result of judgment is “No,” this means that the patient and the apparatus are normal. In this case, the present processing is suspended. When start of inhalation cannot be detected over, for example, a period of 10 seconds or more, an anomalous state is judged to have arisen. In step 120, because of the anomalous state having arisen, the electromagnetic valve 47 is driven to open the supply passage 29 so as to supply oxygen-enriched gas over a period of about 4 seconds.

Abstract: A small oxygen enriching apparatus which can supply oxygen-enriched gas at high flow rate without imparting unnatural sensation to a user, as well as a controller and recording medium therefore. In step 100, a judgment is made as to whether a flow rate set by use of a flow-rate setting unit 47 is equal to or less than a continuous base flow rate (2 liters/min). When the set flow rate is a low flow rate of not greater than 2 liters/min, breath-synchronized operation is not performed (continuous supply is to be performed), and therefore, in step 110, oxygen-enriched gas is supplied continuously at the set flow rate. When the set flow rate is a high flow rate of greater than 2 liters/min, breath-synchronized operation is to be performed (supply during the inhalation period only of each breathing cycle), and therefore, in step 120, oxygen-enriched gas is continuously supplied at the continuous base flow rate.

Abstract: A gas sensor includes a sensor element formed of a solid electrolyte having an oxygen ion conductivity; a cathode and an anode, each formed of a porous metal material and each formed on the sensor element, to produce a pumping current reflecting a concentration of a detection component in a measurement gas when a predetermined voltage is applied between the cathode and the anode. The detection component contains oxygen. The measurement gas contacts the cathode. The gas sensor also includes a gas diffusion control to vary the oxygen pumping current in accordance with a pressure of the measurement gas by controlling a diffusion of the measurement gas. The measurement gas moves from a measurement atmosphere toward the cathode by way of the gas diffusion control. Thereby, information on the pressure of the measurement gas is obtained based on the oxygen pumping current.

Abstract: The present invention provides a process for producing a semiconductor device, which comprises: a step of forming a metal wiring pattern on a semiconductor wafer, a step of arranging a plurality of the wiring pattern-formed semiconductor wafers and cleaning them with a cleaning solution (a cleaning step), a step of rotating the cleaned semiconductor wafers at a high speed to swing off the cleaning solution adhering to the semiconductor wafers (a swinging-off step), and a step of rinsing the cleaning solution-removed semiconductor wafers with pure water (a rinsing step). According to the present process for production of semiconductor device, the foreign matter and residue appearing in the step of formation of metal wiring pattern can be removed without incurring corrosion of the metal wiring and a semiconductor device of high quality can be produced at a low cost.

Abstract: A sensor cleaning method and a detection apparatus enabling easy and correct measurement for an uninterrupted prolonged time duration of the gas concentration.The method is based on the value of a limiting current generated on applying a dc voltage across a pair of positive and negative electrodes of a sensor in which the electrodes are formed of a porous material and arranged in intimate contact with the surface of a solid electrolyte substrate exhibiting oxygen ion conductivity and in which pores of the negative electrode are used simultaneously as gas diffusion limiting holes for limiting the amount of diffusion of the gas for measurement. If the limiting current characteristics of sensor versus applied voltage are deteriorated, a voltage opposite to that used during measurement is applied for restoring the characteristics to a normal value.

Abstract: In a method of measuring humidity by using an electrochemical cell, the method comprises applying a voltage across the pair of electrodes to obtain a characteristic curve between the voltage applied and electrical current. The characteristic curve starts with a first flat portion in which a first diffusion limit current remains generally constant within a predetermined voltage range and passes through a point of inflection in which a second differential derivative of the characteristic curve falls on zero at certain voltage, and ends up with a second flat portion in which a second diffusion limit current remains generally constant within a predetermined voltage range. The point of the inflection is uniquely determined regardless of a humidity level of the gas at a constant temperature and oxygen concentration.

Abstract: In a method of measuring humidity of an oxygen-containing gas by using an electrochemical cell, firstly an voltage is applied across the pair of the electrodes to obtain a characteristic curve between an intensity of the voltage and that of electrical current, the characteristic curve continuously originating from a first flat portion in which a first diffusion limit current generally remains constant within a predetermined voltage range, and ending up in a second flat portion in which a second diffusion limit current generally remains constant within a predetermined voltage range. Secondly each value of the first diffusion limit current and the second diffusion limit current is read out, and an arithmetic ratio of the first diffusion limit current to the second diffusion limit current is calculated to obtain the humidity of the gas.

Abstract: A humidity detector using a ceramic sensor and a heater to periodically clean the sensor. The output of the sensor is sampled and held while the heater is on. When the detector is turned on, the heater is not started until the sensor has been sampled and held. The timer controlling this operation can be externally reset. When the ceramic sensor is temperature corrected, the humidity output indicates a dew point at a fixed temperature. By adjusting this fixed temperature dew point output according to a sensed temperature, the dew point can be detected.

Abstract: A humidity sensing portion (7) and an electrode (9) of a heating regeneration type humidity sensor provided with a heater (8) are covered by a casing (12) and a holding portion (11). An opening (6) for communication between placing the interior and exterior of the sensor in communication is formed in the casing (12) or the holding portion (11) so that a solid angle, of a vertex at the central portion of the humidity sensing portion (7) or the casing (12) of a polyhedron having a base bounded by the opening is within the range of 1/1000-1/10 radian, and thus, adhesion of harmful substances, especially inorganic harmful substances, onto the humidity sensing portion (7) or the electrode (9) is prevented.

Abstract: Electroluminescent elements comprising a ferroelectric sintered ceramic body as a substrate, a luminescent layer applied on the body, a transparent electrode layer applied on the luminescent layer and an electrode layer applied on other side of the body and having improved withstand voltage properties. The electroluminescent elements are suitable for the indication of location of switch members or the like at the switching-off condition.