Abstract: A technique appropriately controls transfer order of a pallet. A pallet transfer system includes a transfer device, a pallet storage, a work station, a machine tool, and a control device. The control device transfers a second pallet from the work station to the pallet storage when the machining of the workpiece attached to a first pallet is completed in a state where the first pallet is in the machine tool and the second pallet is in the work station, and the control device transfers the first pallet from the machine tool to the work station after completion of the transfer of the second pallet from the work station to the pallet storage, or in parallel with the transfer of the second pallet from the work station to the pallet storage.

Abstract: A technique for detecting the completion of work of attaching a workpiece to a pallet is provided. A pallet transport system includes: a transport device for transporting a pallet to which a workpiece can be attached; a pallet housing unit for housing the pallet, a workstation in which a worker is to conduct work of attaching the workpiece to the pallet transported from the pallet housing unit; a machine tool for machining the workpiece attached to the pallet in the workstation; and a control device for controlling the transport device. The control device acquires an indicator indicating progress of the attachment work in the workstation, determines whether or not the attachment work has been completed based on the indicator, and when it is determined that the attachment work has been completed, transports the pallet located in the workstation to the pallet housing unit or the machine tool.

Abstract: A technology that can prevent leakage of confidential workpiece information in a course of workpiece transfer is provided. A pallet transfer system includes a transfer device, a pallet storage, a work station, a machine tool , and a control device . The control device determines whether or not the workpiece is a confidential target based on information indicating whether or not the workpiece to be machined is a confidential target, the control device transfers the pallet to which the workpiece is attached by a first transfer method when determining that the workpiece is not the confidential target, and the control device transfers the pallet to which the workpiece is attached by a second transfer method different from the first transfer method when determining that the workpiece is the confidential target.

Abstract: To provide a plasma device that all functions required for a plasma etching process are incorporated into a narrow space of a minimal fabrication manufacturing device. A plasma processing chamber for performing the plasma etching process on a semiconductor wafer is provided, and a micro-plasma supply section and a lower electrode that superimposes RF on supplied micro-plasma are provided in the plasma processing chamber. A wafer support device that supports the semiconductor wafer supports the semiconductor wafer in the plasma processing chamber during the etching process. The wafer support device is coupled to and supported by a drive section that is arranged outside the plasma processing chamber. The drive section makes the wafer support device repetitively move scanningly in the plasma processing chamber in parallel with a wafer processing surface during the etching process.

Abstract: Amorphous alloy comprising 30 to 75 atomic % Cr, the remainder being substantially at least one element selected from the group consisting of Ti and Zr and alloys represented by the general formula: X.sub.a Cr.sub.b M.sub.c wherein X is at least one element selected from the group consisting of Ti and Zr; M is at least one element selected from the group consisting of Mg, Al, Fe, Co, Ni, Cu, Mo and W; and a, b, and c are, in atomic percentage, a>20, 20 .ltoreq.b.ltoreq.75, 0<c .ltoreq.20 and a+b+c=100. The alloys are excellent in corrosion resistance and wear resistance, form a stable protective film and are spontaneously passive, even in corrosive environment such as a poorly oxidizing, highly corrosive HCl solution containing chlorine ions.

Abstract: Amorphous alloys having an extremely high corrosion resistance comprise Cr and at least one element selected from Ta and Nb, as essential components, and are spontaneously passive owing to the formation of stable protective films, even in very corrosive environments such as poorly oxidizing concentrated hydrochloric acid. The amorphous alloy may further include one or more elements appropriately selected from other alloying elements of Al, Ti, Zr, Fe, Co, Ni, Cu, Mo and W. The amorphous alloys have advantageous properties, such as very high corrosion resistance, high corrosion resistance at elevated temperatures and high wear resistance, and, therefore are useful in chemical plants or other industrial and domestic applications.

Abstract: The present invention provides a process for coloring titanium, or its alloys which comprises the steps of anodizing titanium metal, or its alloy in an electrolytic solution until the voltage reaches a predetermined voltage at a constant current temporarily cutting off the current supply to interrupt the anodizing; and then supplying a direct current again at a predetermined current density to continue anodizing, wherein the color tone of the anodic oxide film formed on the titanium or its alloy is adjusted by controlling the supplied amount of current, without causing an increase in voltage. By the coloring process of the present invention, the color of titanium metal or its alloys can be changed to various color tones at low voltages.

Abstract: An amorphous aluminum-valve metal alloy with special characteristics such as high corrosion resistance, high wear resistance and considerable toughness, consisting of Al and at least one element selected from valve metals of Ti and Zr, a portion of the set forth refractory metals being allowed to be substituted with at least one element selected from Mo, W, Ta and Nb.

Abstract: An amorphous aluminum-valve metal alloy with special characteristics such as high corrosion resistance, high wear resistance and coinsiderable toughness, consisting of Al and at least one element selected from valve metals of Ti and Zr, a portion of the set forth refractory metals being allowed to be substituted with at least one element selected from Mo, W, Ta and Nb.

Abstract: An amorphous aluminum-refractory metal alloy with special characteristics such as high corrosion resistance, high wear resistance and considerable toughness, consisting of Al and at least one element selected from refractory metals of Ta, Nb, Mo and W, a portion of the set forth refractory metals being allowed to be substituted with at least one element selected from Ti and Zr.

Abstract: An amorphous aluminum-refractory metal alloy with special characteristics such as high corrosion resistance, high wear resistance and considerable toughness, consisting of Al and at least one element selected from refractory metals of Ta, Nb, Mo and W, a portion of the set forth refractory metals being allowed to be substituted with at least one element selected from Ti and Zr.

Abstract: A method for preparation of amorphous superlattice alloys consisting of lamellae based on periodic change in the composition by continuous conventional sputtering with a periodic change in the positions of substrates relative to a target or targets by rotating the substrate on a first axis and orbiting the substrate and first axis around a second axis parallel to the first axis.

Abstract: A corrosion-resistant amorphous surface alloy is disclosed which is 150 .mu.m or less thick and bonded onto a substrate crystalline metal or alloy and processed by irradiation of high energy density beam, such alloy being composed of 8-19 at % Cr, 17-22 at % in the sum of P and 2-7 at % B, and the remainder being Ni, Ni--Co containing Co in an atomoic ratio of Co/Ni of 2/3 or less, or Ni--Fe or Ni--Co--Fe containing Fe in an atomic ratio of Fe/Ni or Fe/Ni+Co of 1/5 or less. Also disclosed is a process for producing such alloy.

Abstract: A system for alerting a worker who is falling into a doze records a parameter pattern or range derived from a plurality of eyeblink pulses in a waveform generated during an awake-state period, and then determines excessive deviation of parameters of each succeeding eyeblink pulse from the recorded pattern to generate an alarm signal.

Abstract: An oil hydraulic motor is provided with a casing in which a rotor is disposed in an eccentric position. An oil having a preselected pressure is sealed in the chambers defined between the rotor and the inner wall surfaces of the chambers and a high pressure is intermittently propagated into said chambers from a high pressure generating device with which it is in communication thereby rotating said rotor to develop an output.