Patents by Inventor Hidefumi Shibano

Hidefumi Shibano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical apparatus, exposure apparatus, and exposure method
    Patent number: 6750951
    Abstract: An optical apparatus having a suppressor that suppresses the wavelength dependence, in a predetermined wavelength band, of a thin film formed on an optical surface of the optical apparatus.
    Type: Grant
    Filed: April 18, 2001
    Date of Patent: June 15, 2004
    Assignee: Nikon Corporation
    Inventors: Motoo Koyama, Masaki Kato, Hidefumi Shibano
  • Optical apparatus, exposure apparatus, and exposure method
    Publication number: 20010033490
    Abstract: The present invention provides optical apparatus 17 wherein a thin film 22 with an optical characteristic having wavelength dependence is formed on an optical surface, which comprises a suppressor 20 for suppressing the wavelength dependence in a predetermined wavelength band.
    Type: Application
    Filed: April 18, 2001
    Publication date: October 25, 2001
    Inventors: Motoo Koyama, Masaki Kato, Hidefumi Shibano