Abstract: A substrate holding apparatus includes a base plate with a two-pronged portion, a holding plate arranged above the base plate, a driving portion provided therebetween, a holding portion formed by a tip end of the two-pronged portion and a tip end of the holding plate, and a guide portion provided at the tip end of the two-pronged portion for guiding a part of the substrate. The driving portion includes an urging means for always urging a basal end side of the holding plate upward, an electric magnetic portion for drawing the holding plate toward the base plate, and a bearing portion arranged at on the tip end side of the base plate. The guide portion has a guide groove which comes into contact with a part of a periphery of the substrate.

Abstract: A substrate holding apparatus includes a base plate with a two-pronged portion, a holding plate arranged above the base plate, a driving portion provided therebetween, a holding portion formed by a tip end of the two-pronged portion and a tip end of the holding plate, and a guide portion provided at the tip end of the two-pronged portion for guiding a part of the substrate. The driving portion includes an urging means for always urging a basal end side of the holding plate upward, an electric magnetic portion for drawing the holding plate toward the base plate, and a bearing portion arranged at on the tip end side of the base plate. The guide portion has a guide groove which comes into contact with a part of a periphery of the substrate.

Abstract: A wafer transferring robot capable of restraining the vibration of wafers during the transfer. The robot comprises a rotating base (2) rotatable on a base (1), two horizontally extensible robot arms (3A, 3B) arranged laterally symmetrically to each other on the rotating base (2) and comprising first arms (32A, 32B), second arms (33A, 33B), and third arms (34A, 34B), respectively, and chucks (4A, 4B), fixed to the third arms (34A, 34B), respectively; wherein the lower surface of the second arm (33B) of one robot arm (3B) is higher than the upper surface of the wafer (WA) held over the third arm (34A) of the other robot arm (3A) via the chuck. Accordingly, the rigidity of transferring parts can be so enhanced that the vibration of wafers (WA, WB) can be prevented.

Abstract: The present invention discloses a cable support which can assure smooth operation of an industrial robot. The cable support is substantially characterized by having a movable support on one end of an operating arm and an auxiliary support on the wrist-side end of the arm respectively, wherein the movable support consists of a first rotary shaft rotatably mounted on the operating arm, a slanted resilient support arm having the proximal end thereof rotatably mounted on the first rotary shaft, and a cable holder tiltably mounted on a second rotary shaft mounted on the slanted resilient support arm and the auxiliary support consists of a third rotary shaft mounted on the operating arm and a cable clamp rotatably mounted on the second rotary shaft.

Abstract: The present invention discloses a cable support which can assure smooth operation of an industrial robot. The cable support is substantially characterized by having a movable support on one end of an operating arm and an auxiliary support on the wrist-side end of the arm respectively, wherein the movable support consists of a first rotary shaft rotatably mounted on the operating arm and a cable holder tiltably mounted on the first rotary shaft and the auxiliary support consists of a second rotary shaft mounted on the operating arm and a cable clamp rotatably mounted on the second rotary shaft.

Abstract: In an arm operating device of an industrial robot, two chains are laid over the driving wheel provided in the supporting arm and the driven wheel provided in the bending arm, respectively, and are coupled through rigid transmission rods and a tension device to each other, and one of the transmission rods is rectangular in section, and is slightly pushed inwardly by a guide provided on the supporting arm, whereby the device operates positively and smoothly with being free from vibrations, and chain elongation and twist.