Abstract: A terminal table unit includes: a terminal table (10) having a metal terminal (12) at its lower surface for connecting a lead wire (60); an insulation plate (20) adhered to the lower surface of the terminal table and having a hole (20-1) at a portion corresponding to the portion containing a metal terminal and its surrounding region; and a metal plate (30) having an upper surface adhered to the lower surface of the insulation plate and having a through hole (30-2) reaching from the upper surface to the lower surface. Through the through hole (30-2), the lead wire is brought out to the lower surface of the metal plate. The terminal unit has a contact surface between the insulation plate containing the hole (20-1) and the terminal table, a contact surface between the insulation plate and the metal plate, and the through hole (30-2) which are filled with adhesive and unified by a bolt (40).

Abstract: A terminal table unit includes: a terminal table (10) having a metal terminal (12) at its lower surface for connecting a lead wire (60); an insulation plate (20) adhered to the lower surface of the terminal table and having a hole (20-1) at a portion corresponding to the portion containing a metal terminal and its surrounding region; and a metal plate (30) having an upper surface adhered to the lower surface of the insulation plate and having a through hole (30-2) reaching from the upper surface to the lower surface. Through the through hole (30-2), the lead wire is brought out to the lower surface of the metal plate. The terminal unit has a contact surface between the insulation plate containing the hole (20-1) and the terminal table, a contact surface between the insulation plate and the metal plate, and the through hole (30-2) which are filled with adhesive and unified by a bolt (40).

Abstract: The present invention provides a vacuum stage device that moves a substrate to be processed in a vacuum environment. In a substrate transfer device in accordance with the present invention, a wafer mounted to a wafer platen is moved in a vacuum processing chamber. This substrate transfer device includes a first driving mechanism for moving the wafer platen in a Y1 direction, and a second driving mechanism that is provided in the vacuum processing chamber and linearly reciprocates the wafer platen in X1 and X2 directions at a high speed.

Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.

Abstract: The present invention provides a vacuum stage device that moves a substrate to be processed in a vacuum environment. In a substrate transfer device in accordance with the present invention, a wafer mounted to a wafer platen is moved in a vacuum processing chamber. This substrate transfer device includes a first driving mechanism for moving the wafer platen in a Y1 direction, and a second driving mechanism that is provided in the vacuum processing chamber and linearly reciprocates the wafer platen in X1 and X2 directions at a high speed.

Abstract: The present invention provides a vacuum stage device that moves a substrate to be processed in a vacuum environment. In a substrate transfer device in accordance with the present invention, a wafer mounted to a wafer platen is moved in a vacuum processing chamber. This substrate transfer device includes a first driving mechanism for moving the wafer platen in a Y1 direction, and a second driving mechanism that is provided in the vacuum processing chamber and linearly reciprocates the wafer platen in X1 and X2 directions at a high speed.

Abstract: A coil in a coil unit for a linear motor is evenly cooled in the lengthwise direction to reduce an influence of heat on the outside from the coil unit. The coil unit includes the plate-shape coil extending in a traveling direction of the linear motor, a shell for internally storing the coil while maintaining a predetermined gap to the coil, and leading a refrigerant through the gap to cool the coil, a main flow passage formed inside the shell while extending in a lengthwise direction X of the coil, and leading the refrigerant supplied from the outside into itself, and a plurality of branch flow passages formed at a predetermined interval in the lengthwise direction X on the main flow passage for leading out the refrigerant led into the main flow passage in a widthwise direction Y of the coil. The refrigerant led out from the branch flow passages after having flown through the main flow passage flows into the gap between the shell and the coil, and cools the coil along the widthwise direction Y.

Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.

Abstract: A two-phase excitation linear motor is provided, having a compact size and a large thrust force simultaneously. Each of two single coils is formed to have an almost rectangular ring-like shape where two sides opposing to each other function as a pair of effective conductors, and the other opposing two sides function as a pair of connecting conductors for connecting between the effective conductors. The connecting conductors are offset at an almost right angle. The two single coils are integrated such that the one effective conductor of the pair of effective conductors of the one single coil is interposed between the pair of effective conductors of the other single coil while the single coils are being combined such that the offset directions of the connecting conductors of the individual single coils are opposite to each other in a direction perpendicular to a traveling direction.

Abstract: A single coil for constituting a compact coil unit for a linear motor is provided. A single coil of a coil unit for a linear motor includes a pair of effective conductors for contributing to generating a thrust force for a moving body of a linear motor, and connecting conductors for connecting between the effective conductors. The connecting conductors are offset from a coil plane which includes the pair of effective conductors, and extend in parallel with the coil plane, and simultaneously a transverse section of the connecting conductors has an approximately trapezoidal shape including parallel sides which are approximately perpendicular to the coil plane, and a tilted side which is opposed to the coil plane, and is tilted toward a direction opposite to the direction of the offset in the extending state.

Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.

Abstract: A single coil for constituting a compact coil unit for a linear motor is provided. A single coil of a coil unit for a linear motor includes a pair of effective conductors for contributing to generating a thrust force for a moving body of a linear motor, and connecting conductors for connecting between the effective conductors. The connecting conductors are offset from a coil plane which includes the pair of effective conductors, and extend in parallel with the coil plane, and simultaneously a transverse section of the connecting conductors has an approximately trapezoidal shape including parallel sides which are approximately perpendicular to the coil plane, and a tilted side which is opposed to the coil plane, and is tilted toward a direction opposite to the direction of the offset in the extending state.

Abstract: A rectangular single coil of a coil unit for a linear motor is fabracated by winding a single conductive wire. A winding former having locks for a conductive wire at positions corresponding to vertices of the rectangular single coil is rotated by 180 degrees about an X-axis, by 180 degrees about a Y-axis, alternately by first and second rotating mechanisms. Thereby, a single conductive wire fed out in the direction of a Z-axis from a conductive wire feeding out machine is wound while locked to the locks of the winding former in succession.

Abstract: A coil in a coil unit for a linear motor is evenly cooled in the lengthwise direction to reduce an influence of heat on the outside from the coil unit. The coil unit includes the plate-shape coil extending in a traveling direction of the linear motor, a shell for internally storing the coil while maintaining a predetermined gap to the coil, and leading a refrigerant through the gap to cool the coil, a main flow passage formed inside the shell while extending in a lengthwise direction X of the coil, and leading the refrigerant supplied from the outside into itself, and a plurality of branch flow passages formed at a predetermined interval in the lengthwise direction X on the main flow passage for leading out the refrigerant led into the main flow passage in a widthwise direction Y of the coil. The refrigerant led out from the branch flow passages after having flown through the main flow passage flows into the gap between the shell and the coil, and cools the coil along the widthwise direction Y.

Abstract: A two-phase excitation linear motor is provided, having a compact size and a large thrust force simultaneously. Each of two single coils is formed to have an almost rectangular ring-like shape where two sides opposing to each other function as a pair of effective conductors, and the other opposing two sides function as a pair of connecting conductors for connecting between the effective conductors. The connecting conductors are offset at an almost right angle. The two single coils are integrated such that the one effective conductor of the pair of effective conductors of the one single coil is interposed between the pair of effective conductors of the other single coil while the single coils are being combined such that the offset directions of the connecting conductors of the individual single coils are opposite to each other in a direction perpendicular to a traveling direction.

Abstract: A Y stage is capable of translational driving in the Y-axial direction, by independently controllable Y1 linear motor and Y2 linear motor. The amount of movement of the Y stage is detected by a Y1 linear encoder and Y2 linear encoder, and fed back to a Y control system and &thgr; control system. The Y control system outputs a translational thrust command value, by receiving the average value of each positional detecting value measured by the Y1 linear encoder and Y2 linear encoder as the stage translational direction position feedback value. The &thgr; control system receives the difference between each position detecting value as a stage yawing direction position feedback value, and outputs a yawing direction thrust command value. A non-interference block outputs Y1 linear motor thrust command value and Y2 linear motor thrust command value, by the use of the translational thrust command value and the thrust command value.

Abstract: A discrete Kalman filter 12 and a disturbance estimating unit 13 are added to a feedback loop for feeding back a detected value of position from a position detector 6. The Kalman filter estimates position and velocity of an object to be controlled, thereafter outputting an estimated value of position and an estimated value of velocity. The disturbance estimating unit estimates from a command value of current and the estimated value of velocity the disturbance that is added to a load 5. The estimated value of position is fed back to a position controller 1, and the estimated value of velocity is fed back to a velocity controller 2. Further, a difference between a target value of current outputted from the velocity controller and the estimated value of disturbance is output as the command value of current.

Abstract: The present invention provides a vacuum stage device that moves a substrate to be processed in a vacuum environment. In a substrate transfer device in accordance with the present invention, a wafer mounted to a wafer platen is moved in a vacuum processing chamber. This substrate transfer device includes a first driving mechanism for moving the wafer platen in a Y1 direction, and a second driving mechanism that is provided in the vacuum processing chamber and linearly reciprocates the wafer platen in X1 and X2 directions at a high speed.