Abstract: The present invention provides a susceptor with improved responsiveness of temperature control, and an object thereof is to obtain a high-quality wafer product without impairing productivity. Provided is a susceptor that generates heat by induction heating, the susceptor including a graphite base material and a ceramic coating layer. The graphite base material exhibits a variation (?max/?min) of an in-plane electrical resistivity distribution of the graphite base material at room temperature of 1.00 to 1.05 and a rate of high-temperature change (?1600/?800) of electrical resistivity at 1600° C. to that at 800° C. of 1.14 to 1.30.

Abstract: The present invention provides a susceptor with improved responsiveness of temperature control, and an object thereof is to obtain a high-quality wafer product without impairing productivity. Provided is a susceptor that generates heat by induction heating, the susceptor including a graphite base material and a ceramic coating layer. The graphite base material exhibits a variation (?max/?min) of an in-plane electrical resistivity distribution of the graphite base material at room temperature of 1.00 to 1.05 and a rate of high-temperature change (?1600/?800) of electrical resistivity at 1600° C. to that at 800° C. of 1.14 to 1.30.

Abstract: Provided is a metallic impurity-free graphite material utilizing Joule heat generation with well-balanced resistances at room temperature and at high temperatures. The graphite material has a specific resistance at 25° C. (?25) of 10.0 ??·m or more and 12.0 ??·m or less; a specific resistance at 1600° C. (?1600) of 9.5 ??·m or more and 11.0 ??·m or less; a ratio (?1600/?25) of specific resistance at 1600° C. to that at 25° C. of 0.85 or more and 1.00 or less; a temperature at which the minimum specific resistance (?min) appears of 500° C. or higher and 800° C. or lower; a ratio (?min/?25) of the minimum specific resistance to the specific resistance at 25° C. of 0.70 or more and 0.80 or less; and a bulk density of 1.69 g/cm3 or more and 1.80 g/cm3 or less.

Abstract: Provided is a metallic impurity-free graphite material utilizing Joule heat generation with well-balanced resistances at room temperature and at high temperatures. The graphite material has a specific resistance at 25° C. (?25) of 10.0 ??·m or more and 12.0 ??·m or less; a specific resistance at 1600° C. (?1600) of 9.5 ??·m or more and 11.0 ??·m or less; a ratio (?1600/?25) of specific resistance at 1600° C. to that at 25° C. of 0.85 or more and 1.00 or less; a temperature at which the minimum specific resistance (?min) appears of 500° C. or higher and 800° C. or lower; a ratio (?min/?25) of the minimum specific resistance to the specific resistance at 25° C. of 0.70 or more and 0.80 or less; and a bulk density of 1.69 g/cm3 or more and 1.80 g/cm3 or less.