Abstract: A compound sensor includes a first unit including first and second oscillators symmetrically disposed to each other and being able to be displaced in a driving direction and a detecting direction; a second unit including third and fourth oscillators symmetrically disposed to each other and being able to be displaced in the driving direction and the detecting direction; a drive unit to drive the first through fourth oscillators so as to oscillate the first and second oscillators in opposite phase, and the third and fourth oscillators in opposite phase, and so as to oscillate the first and second unit in opposite phase; and a detection unit configured to detect displacements of the first through fourth oscillators in the detecting direction, wherein an acceleration, angular rate, angular acceleration and centrifugal force are independently detected by canceling unnecessary inertial force components from the displacements of the first through fourth oscillators.

Abstract: An angular velocity detecting apparatus includes a sensor chip having an angular velocity sensor installed therein, wherein the angular velocity sensor includes two mass elements which are driven in a drive direction in opposite phase with each other, and detects an angular velocity based on an oscillation of the mass elements in a direction perpendicular to the drive direction, the angular velocity detecting apparatus comprising: two acceleration sensors provided on the sensor chip, each of the acceleration sensors having a mass element which can oscillate in a single axis direction in a plane parallel to a substrate surface of the sensor chip, wherein the acceleration sensors are arranged in such a positional relationship that the mass elements of the acceleration sensors are oscillated in opposite phase with each other at the time of a rotational vibration of the sensor chip while the mass elements of the acceleration sensors are oscillated in phase with each other at the time of a translational vibration

Abstract: A compound sensor includes a first unit including first and second oscillators symmetrically disposed to each other and being able to be displaced in a driving direction and a detecting direction; a second unit including third and fourth oscillators symmetrically disposed to each other and being able to be displaced in the driving direction and the detecting direction; a drive unit to drive the first through fourth oscillators so as to oscillate the first and second oscillators in opposite phase, and the third and fourth oscillators in opposite phase, and so as to oscillate the first and second unit in opposite phase; and a detection unit configured to detect displacements of the first through fourth oscillators in the detecting direction, wherein an acceleration, angular rate, angular acceleration and centrifugal force are independently detected by canceling unnecessary inertial force components from the displacements of the first through fourth oscillators.