Patents by Inventor Hidehiro Chida

Hidehiro Chida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Actuator to correct for off center-of-gravity line of force
    Patent number: 6841956
    Abstract: Methods and apparatus for adjusting a push point of an actuator such that the push point more closely corresponds to a center-of-gravity of a stage being driven by the actuator are disclosed. According to one aspect of the present invention, a method for scanning a stage device which includes a stage, as well as an actuator which has a first coil and a second coil, includes driving the stage using the actuator and determining when driving the stage using the actuator includes driving the stage through a first location associated with the stage. The actuator is arranged to drive the stage through a push point associated with the first coil and the second coil. The method also includes altering the push point when it is determined that driving the stage using the actuator does not result in the stage being driven through the first location associated with the stage.
    Type: Grant
    Filed: September 17, 2002
    Date of Patent: January 11, 2005
    Assignee: Nikon Corporation
    Inventors: Andrew J. Hazelton, Shigeki Kageyama, Hidehiro Chida
  • Actuator to correct for off center-of-gravity line of force
    Publication number: 20040051402
    Abstract: Methods and apparatus for adjusting a push point of an actuator such that the push point more closely corresponds to a center-of-gravity of a stage being driven by the actuator are disclosed. According to one aspect of the present invention, a method for scanning a stage device which includes a stage, as well as an actuator which has a first coil and a second coil, includes driving the stage using the actuator and determining when driving the stage using the actuator includes driving the stage through a first location associated with the stage. The actuator is arranged to drive the stage through a push point associated with the first coil and the second coil. The method also includes altering the push point when it is determined that driving the stage using the actuator does not result in the stage being driven through the first location associated with the stage.
    Type: Application
    Filed: September 17, 2002
    Publication date: March 18, 2004
    Inventors: Andrew J. Hazelton, Shigeki Kageyama, Hidehiro Chida