Patents by Inventor Hideka Bamba

Hideka Bamba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanning electron microscope having magnification switching control
    Patent number: 6476388
    Abstract: The invention is a scanning electron microscope including a switching control unit for controlling to switch at least scanning unit to switch a digital image signal of a low magnification based on a wide image taking field of view to and from a digital image signal of a high magnification based on a narrow image taking field of view from an A/D conversion unit and a beam spot diameter control unit for controlling to switch a spot diameter of electron beam on a surface of an object substrate in controlling to switch the signals by the switching control unit and a defect portion analyzing method using the scanning electron microscope.
    Type: Grant
    Filed: October 19, 1999
    Date of Patent: November 5, 2002
    Assignee: Hitachi, Ltd.
    Inventors: Ryo Nakagaki, Yuji Takagi, Atsushi Shimoda, Kenji Obara, Yasuhiko Ozawa, Hideka Bamba, Seiji Isogai, Kenji Watanabe, Chie Shishido, Toshiei Kurosaki