Abstract: A dynamic mode AFM apparatus for allowing high-speed identification of atoms of a sample surface, which comprises a scanner for performing three-dimensional scanning; an AC signal of a resonance frequency in a mode with flexural vibration of a cantilever; an AC signal of a second frequency which is lower than the frequency of the flexural vibration; a probe-sample distance modulated with the second frequency; a detector for detecting fluctuation of the resonance frequency; a detector for detecting vibration of the cantilever; and a detector for detecting a fluctuation component which is contained in a detected signal by detecting the resonance frequency fluctuation and synchronized with a modulation signal of the probe-sample distance, wherein an inclination of the resonance frequency against the probe-sample distance is obtained from the strength and polarity of the fluctuation component.

Abstract: There is provided a scanning probe microscope apparatus which has a high sensitivity for the interaction between the cantilever and the sample and comprises a cantilever that can oscillate stably in dynamic mode even when a mechanical Q value is low. A driving signal having a frequency close to the resonant frequency of the cantilever (4) is supplied from the signal generator (9) to the oscillation exciting means (10) to separately (forcibly) oscillate the cantilever (4). And the frequency of the driving signal or the resonant frequency of the cantilever is controlled (by adjusting the distance between the cantilever (4) and the sample (1)), such that the phase difference between the oscillation of the cantilever (4) detected by the oscillation detecting means (5) and the driving signal becomes zero, i.e. the frequency of the driving signal and the resonant frequency of the cantilever (4) match.

Abstract: There is provided a dynamic mode AFM apparatus that configures an automatic control system which can automatically obtain a probe-sample distance, and allows high-speed identification of atoms of the sample surface.

Abstract: A resonator includes a vibrator that performs mechanical vibration, an exciting unit that applies an exciting force to the vibrator, and a modulating unit that modulates a spring property of the vibrator. The vibrator vibrates when the exciting force is applied to the vibrator from the exciting unit. The modulating unit modulates the vibrator according to the exciting force.

Abstract: A low-cost homodyne laser interferometer probe of simple structure is provided which allows predetermined performance to be easily obtained by a simple adjustment, and a displacement measurement system using the same is also disclosed. The homodyne laser interferometer probe includes an optical fiber (1) for guiding light, a collimator lens (2) that receives the light from the optical fiber (1), a ¼ wavelength plate (3) that receives light from the collimator lens (2) and that converts the light from linearly polarized light into circularly polarized light, a beam splitter (4) for dividing light from the ¼ wavelength plate (3) into reference light and measurement light, a first focal lens (5) that receives the reference light from the beam splitter (4), a reflection mirror (6) for reflecting the reference light from the first focal lens (5), and a second focal lens (7) that receives the measurement light from the beam splitter (4).

Abstract: A precise and high load resistance moving method to perform fine movement positioning of the moving body, by fixing a piezoelectric element which generates a shear deformation, to a bottom surface of a wedge-shaped moving element placed on a base, and deforming the piezoelectric element by driving the piezoelectric element with drive pulses to move the wedge-shaped moving element along a first axis in which the wedge-shaped moving element drives into or away from a moving body to move the moving body along a second axis in upward and downward direction relative to the base. Also, a precise and high load resistance moving device including a wedge-shaped moving element, a pulse source, and a moving body vertically movable in upward or downward direction relative to the base.

Abstract: A torsional resonator for suppressing unnecessary flexural vibration and providing excellent resonance characteristic is provided. A vibrator is a beam structure or a paddle-like projection structure added onto a beam structure and an electrostatic force produced due to the potential difference between an electrode and the vibrator adds a moment with the axis of the beam of the vibrator as the center axis, but does not add a force for producing flexure to the beam. As one method, the same AC signal and DC bias voltages different in polarity are applied to an electrode pair of the electrode brought away from the vibrator and the electrode brought close to the vibrator with torsional vibration of the vibrator, so that only torsional vibration can be excited.

Abstract: A heterodyne laser having a first optical path for guiding excitation light and a second optical path for guiding measurement light. The heterodyne laser includes an optical probe body for optically coupling and structurally combining the first optical path and the second optical path, and includes a reflection mirror, a beam splitter, a focal lens and a ¼ wavelength plate. The excitation light from the first optical path is introduced through the reflection mirror, the beam splitter and the focal lens into a measurement object.

Abstract: A measuring device with a daisy type cantilever wheel enabling easier setting of a measuring head and modification head by rotating the daisy type cantilever wheel, enabling modification, adhesion of a sample, and application of a force to a sample specimen by using centrifugal force, and also enabling an easier measurement of a variation of characteristic vibration frequency and vibration amplitude of a cantilever array is provided.

Abstract: A precise and high load resistance moving method to perform fine movement positioning of the moving body, by fixing a piezoelectric element which generates a shear deformation, to a bottom surface of a wedge-shaped moving element placed on a base, and deforming the piezoelectric element by driving the piezoelectric element with drive pulses to move the wedge-shaped moving element along a first axis in which the wedge-shaped moving element drives into or away from a moving body to move the moving body along a second axis in upward and downward direction relative to the base. Also, a precise and high load resistance moving device including a wedge-shaped moving element, a pulse source, and a moving body vertically movable in upward or downward direction relative to the base.

Abstract: A mechanical oscillator which defines a starting point of a cantilever at a front edge of a base and can determine the length of the cantilever without depending on an alignment accuracy and an etching amount, and a fabrication method of the mechanical oscillator. The mechanical oscillator, produced by processing a wafer, comprises a base (101) formed from a substrate supporting an SOI wafer and a structure to be a cantilever (102) which is formed from a silicon thin film of the SOI wafer and is horizontally protruding from the base (101), wherein a part of a buried oxide film (103) between the base (101) and the structure to be a cantilever (102) is removed, and a cantilever (104) starting from the front edge (105) of the base (101) is formed by directly jointing the structure to be a cantilever (102) to a part including at least the front edge (105) of the base (101) where the buried oxide film was removed.

Abstract: A precise and high load resistance moving method to perform fine movement positioning of the moving body, by fixing a piezoelectric element which generates a shear deformation, to a bottom surface of a wedge-shaped moving element placed on a base, and deforming the piezoelectric element by driving the piezoelectric element with drive pulses to move the wedge-shaped moving element along a first axis in which the wedge-shaped moving element drives into or away from a moving body to move the moving body along a second axis in upward and downward direction relative to the base. Also, a precise and high load resistance moving device including a wedge-shaped moving element, a pulse source, and a moving body vertically movable in upward or downward direction relative to the base.

Abstract: There is provided a scanning probe microscope apparatus which has a high sensitivity for the interaction between the cantilever and the sample and comprises a cantilever that can oscillate stably in dynamic mode even when a mechanical Q value is low. A driving signal having a frequency close to the resonant frequency of the cantilever (4) is supplied from the signal generator (9) to the oscillation exciting means (10) to separately (forcibly) oscillate the cantilever (4). And the frequency of the driving signal or the resonant frequency of the cantilever is controlled (by adjusting the distance between the cantilever (4) and the sample (1)), such that the phase difference between the oscillation of the cantilever (4) detected by the oscillation detecting means (5) and the driving signal becomes zero, i.e. the frequency of the driving signal and the resonant frequency of the cantilever (4) match.

Abstract: A torsional resonator for suppressing unnecessary flexural vibration and providing excellent resonance characteristic is provided. A vibrator is a beam structure or a paddle-like projection structure added onto a beam structure and an electrostatic force produced due to the potential difference between an electrode and the vibrator adds a moment with the axis of the beam of the vibrator as the center axis, but does not add a force for producing flexure to the beam. As one method, the same AC signal and DC bias voltages different in polarity are applied to an electrode pair of the electrode brought away from the vibrator and the electrode brought close to the vibrator with torsional vibration of the vibrator, so that only torsional vibration can be excited.

Abstract: There is provided a heterodyne laser Doppler probe capable of realizing the compatibility between its photoexcitation efficiency and speed measurement efficiency, and a measurement system using the same is also disclosed. The heterodyne laser Doppler probe introduces excitation light for photoexcitation from a first optical path (2) to an optical probe (1) and measurement light for heterodyne laser Doppler measurement from a second optical path (4) to the optical probe (1). After emission from the first optical path (2), the excitation light is introduced through a reflection mirror (3) and a beam splitter (6) into a focal lens (7), and then into a measurement object (excitation object) (8). On the other hand, the measurement light for heterodyne laser Doppler measurement is emitted from the second optical path (4) and passes through a ¼ wavelength plate (5).

Abstract: A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.

Abstract: A measuring device with a daisy type cantilever wheel enabling easier setting of a measuring head and modification head by rotating the daisy type cantilever wheel, enabling modification, adhesion of a sample, and application of a force to a sample specimen by using centrifugal force, and also enabling an easier measurement of a variation of characteristic vibration frequency and vibration amplitude of a cantilever array is provided.

Abstract: A low-cost homodyne laser interferometer probe of simple structure is provided which allows predetermined performance to be easily obtained by a simple adjustment, and a displacement measurement system using the same is also disclosed. The homodyne laser interferometer probe includes an optical fiber (1) for guiding light, a collimator lens (2) that receives the light from the optical fiber (1), a ¼ wavelength plate (3) that receives light from the collimator lens (2) and that converts the light from linearly polarized light into circularly polarized light, a beam splitter (4) for dividing light from the ¼ wavelength plate (3) into reference light and measurement light, a first focal lens (5) that receives the reference light from the beam splitter (4), a reflection mirror (6) for reflecting the reference light from the first focal lens (5), and a second focal lens (7) that receives the measurement light from the beam splitter (4).

Abstract: There are provided a highly sensitive force/mass detection method and device using a phase-locked loop, in which a phase noise of the mechanical element can be reduced using the phase-locked loop, by synchronizing a vibration signal of a mechanical element to an oscillation signal from a local oscillator which has a low phase noise and a high purity property. In the highly sensitive force/mass detection device using the phase-locked loop, an oscillation circuit of a mechanical vibrator 1 including a phase adjuster 10, a binarization circuit 5 for detecting a phase of an oscillation signal of the oscillation circuit, a local oscillator 7 having a low phase noise and a high purity property, a phase comparator 6 for comparing the phase of the oscillation signal of the mechanical vibrator 1 with a phase of an oscillation signal from the local oscillator 7, and a loop filter 8 connected to the phase comparator 7, are provided.

Abstract: A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.