Abstract: A main etching process of forming a recess portion in a multilayer film having a laminated film where a first film and a second film having different relative permitivities are alternately formed on a base silicon film to a preset depth and an over etching process of forming the recess portion until the base silicon film is exposed are performed by introducing a processing gas including a CF-based gas and an oxygen gas and by performing a plasma etching process. In the over etching process, a first over etching process where a flow rate ratio of the oxygen gas to the CF-based gas is increased as compared to the main etching process and a second over etching process where the flow rate ratio of the oxygen gas to the CF-based gas is reduced as compared to the first over etching process are repeatedly performed two or more times.

Abstract: A main etching process of forming a recess portion in a multilayer film having a laminated film where a first film and a second film having different relative permitivities are alternately formed on a base silicon film to a preset depth and an over etching process of forming the recess portion until the base silicon film is exposed are performed by introducing a processing gas including a CF-based gas and an oxygen gas and by performing a plasma etching process. In the over etching process, a first over etching process where a flow rate ratio of the oxygen gas to the CF-based gas is increased as compared to the main etching process and a second over etching process where the flow rate ratio of the oxygen gas to the CF-based gas is reduced as compared to the first over etching process are repeatedly performed two or more times.

Abstract: Disclosed is a coloring coating agent comprising at least a binder, a pigment, and a dispersing agent, the binder being sol obtained by a partial reaction of an organic silicon compound, the pigment being a mixture comprised of a red rouge pigment and a yellow organic pigment in a ratio ranging from 1:10 to 2:1 by weight, the red rouge pigment having a spherical particle shape and a particle size of 0.1 to 0.3 &mgr;m, the yellow organic pigment having a particle size smaller than or equal to 0.3 &mgr;m, and the binder (solid portion) and the pigment being mixed in a ratio ranging from 2:1 to 2:5 by weight. The coating agent is useful in coloring a bulb for lightning equipments of vehicles yellow.

Abstract: A circular dichroism detector includes a light source having a large emission intensity in the ultraviolet region such as an HgXe lamp or Hg lamp, a diffraction grating for wavelength dispersing the light emitted from the light source, a polarizer for linearly polarizing the light emitted from the light source, a PEM for modulating wavelength dispersed linearly polarized light to alternately produce left-handed circularly polarized light and right-handed circularly polarized light, a flow cell through which the circularly polarized light will be passed, and a photodiode for detecting the circularly polarized light passing through the flow cell.

Abstract: The present invention relates to a split stream flow cell which is used for a UV detector of liquid chromatography and in which a UV light for detecting absorption of the light is transmitted through a sample solution flowing in the cell. It is an object of the present invention to reduce the influences of both the flow effect and the liquid lens effect without cell volume being made too large. To this end, a split stream flow cell of the present invention comprises a split flow channel (12) which passes through a cell block (10) and which has a central portion communicating with an inlet channel (18), both ends communicating with an outlet channel (38), and both sides symmetrical with respect to the central portion, the diameter thereof being increased from a given position in the central portion toward both ends.

Abstract: An apparatus for taking up and discharging liquid has at least one piston cylinder which responds to a command by taking up or discharging liquid, the arrangement being such that the number of liquid uptake operations is preset, with the piston cylinder being instructed to perform the discharge operation when the number of uptake operations actually performed is detected to exceed said preset number. A plurality of different liquid specimens can be mixed, and the mixture diluted when so desired, through a simple operation which assures great accuracy.

Abstract: A sample introducing device, placed in the midway of an analyzing apparatus having a sample flowing route and a carrier fluid flowing route, in which device a valve disc rotatably disposed under urging force between a pair of supporting members, provided with a sample flowing passage and a carrier fluid flowing passage, in a sandwiched manner, is manually rotated with a handle so as to switch a sample flowing hole made in the valve disc for containing a predetermined amount of a sample to a position alignable with the carrier fluid flowing passage. By this simple operation of rotating the valve disc the desired amount of the sample can be transferred to the carrier fluid flowing passage, through the switching over of the sample flowing hole, for being flowed to an apparatus for analysis.

Abstract: An altitude compensation ignition system for compensating ignition timing of an internal combustion engine depending upon variations in altitude or atmospheric pressure comprises pressure sensitive compensation means consisting of a bellows whose ends are fixed to a distributor and a vacuum advance device and adapted to be elongated and shortened in response to variations in atmospheric pressure. When the atmospheric pressure is lowered, the bellows is elongated to move a contact point relative to a rotor of the distributor, thereby advancing the ignition timing.

Abstract: A mobile phase supplying method in a liquid chromatography which is characterized in a disposition of a second plunger pump unit, in addition to the conventional way of employing one plunger pump unit (a first pump). The second plunger pump unit is disposed in series with the first plunger pump unit, being connected to the suction side of the first pump with the discharge side of the second pump, in order to synchronously supply the same amount of mobile phase discharged from the first pump to the suction side thereof by the second pump for the purpose of preventing the suction side of the first pump from being exposed to an occurrence of negative pressure. The apparatus for realizing the method is provided, in its double-pumped structure, with a connecting rod having on either end thereof a first and second plungers, between both pump units, which are synchronously and coaxially driven by a common driving system.

Abstract: A method of accurate sample introduction, while holding a good reproductivity, into a chromatographic system by means of employing a pulse-motor as a driving source of a syringe for holding the mobile phase, inversely rotating the same pulse-motor by imparting a certain predetermined number of pulses during the sample collecting or picking-up period in order to cause the syringe to make a sucking action, and making the syringe suck certain predetermined amount of the sample from an open end of a mobile phase supplying line which has been disconnected from the column, and an apparatus for actualizing the method.

Abstract: A diaphragm assembly operates to open an exhaust gas recirculation control valve when the suction in the intake manifold decreases at a predetermined rate with respect to time as during acceleration.