Patents by Inventor Hideki Mataga

Hideki Mataga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus
    Patent number: 12112929
    Abstract: A cathode unit for a magnetron sputtering apparatus includes a backing plate joined to an upper side opposed to a sputtering surface of a target set in a posture facing an inside of a vacuum chamber and a magnet unit disposed above the backing plate at an interval, a refrigerant passage through which a refrigerant can flow being formed in the backing plate, in which a surface pressure applying unit is provided, the surface pressure applying unit applying, toward an upper outer surface of the backing plate from above the backing plate, a surface pressure equivalent to pressure applied to an upper inner surface of the backing plate when the refrigerant is circulated.
    Type: Grant
    Filed: August 19, 2022
    Date of Patent: October 8, 2024
    Assignee: ULVAC, INC.
    Inventors: Koji Suzuki, Hideto Nagashima, Katsuya Hara, Hideki Mataga
  • CATHODE UNIT FOR MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING APPARATUS
    Publication number: 20230138552
    Abstract: A cathode unit for a magnetron sputtering apparatus includes a backing plate joined to an upper side opposed to a sputtering surface of a target set in a posture facing an inside of a vacuum chamber and a magnet unit disposed above the backing plate at an interval, a refrigerant passage through which a refrigerant can flow being formed in the backing plate, in which a surface pressure applying unit is provided, the surface pressure applying unit applying, toward an upper outer surface of the backing plate from above the backing plate, a surface pressure equivalent to pressure applied to an upper inner surface of the backing plate when the refrigerant is circulated.
    Type: Application
    Filed: August 19, 2022
    Publication date: May 4, 2023
    Applicant: ULVAC, INC.
    Inventors: Koji Suzuki, Hideto Nagashima, Katsuya Hara, Hideki Mataga