Abstract: When the efficiency of heating with steam is enhanced by adding a condensed water film formation-suppressing amine in a heating step of heating a material to be heated with the steam via a metallic material, the amount of the condensed water film formation-suppressing amine to be added is controlled based on any of the concentration of the condensed water film formation-suppressing amine in a drain, the pH of the drain, the electroconductivity of the drain, the amount of the drain, the amount of the steam, the temperature of the drain, the temperature of the metallic material, and the amount of the metallic material eluted in the drain.

Abstract: When the efficiency of heating with steam is enhanced by adding a condensed water film formation-suppressing amine in a heating step of heating a material to be heated with the steam via a metallic material, the amount of the condensed water film formation-suppressing amine to be added is controlled based on any of the concentration of the condensed water film formation-suppressing amine in a drain, the pH of the drain, the electroconductivity of the drain, the amount of the drain, the amount of the steam, the temperature of the drain, the temperature of the metallic material, and the amount of the metallic material eluted in the drain.

Abstract: A micro-pattern element has a heat discharge pattern formed on a fine line portion of a conductor pattern. Breakage caused by temperature elevation of the conductor pattern in response to the application of an electric current and resulting electromigration can be effectively prevented by the heat-discharge pattern formed on the fine line portion of the conductor pattern; thus, the reliability of the micro-pattern element can be remarkably improved.

Abstract: A magnetic bubble memory device and a method of fabricating the device are disclosed in which a conductor pattern lies at least between a film for maintaining magnetic bubbles therein, and a soft magnetic material pattern. Further, the magnetic bubble memory device can be formed precisely without suffering from errors due to mask alignment, by employing a mask provided with a plurality of patterns which are different in transmittance.

Abstract: A method of forming a microscopic pattern wherein the object to be etched is overlaid with a film made of a material which is highly immune to etching and further provided with a reflection reducing film. Thus, the reflection of the irradiating ultraviolet rays by the underlying layer is effectively prevented.

Abstract: A magnetic bubble memory device is disclosed in which a hardened film made of a heat-resisting highly-polymerized organic resin and having a predetermined thickness is employed for an insulating film interposed between a conductor pattern and a soft magnetic material pattern. In a conventional magnetic bubble memory device in which the above-mentioned insulating film is made of SiO.sub.2, an abrupt step is produced in the soft magnetic material pattern due to the existence of the conductor pattern beneath a portion of the soft magnetic material pattern, and the margin of bias magnetic field is thereby lowered. According to the present invention, the step is reduced and smoothed, and thus the lowering of the margin can be prevented.

Abstract: A polycrystalline film made of a ferromagnetic substance is deposited on a magnetic film to form a composite magnetic film. The composite magnetic film, unlike a conventional single-layered magnetic film made only of a Garnet film, is free from development of hard bubbles and has very excellent characteristics as magnetic film for use in a magnetic bubble device.