Patents by Inventor Hideki Nukada

Hideki Nukada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10127648
    Abstract: A pattern inspection apparatus includes a stage to mount thereon a substrate with patterns formed thereon and be able to move two-dimensionally, plural detectors of a two-dimensional scale, whose height positions are mutually different and arranged at positions on the stage different from the substrate position, to perform measurement, the body of the two-dimensional scale arranged fixed to a position facing the plural detectors, a sensor to acquire an optical image of the pattern on the substrate, in a state where the stage with the substrate is moving in one direction on a surface for the two-dimensional movement, a calculation circuitry to calculate an image acquiring position of the optical image by using position information measured by the two-dimensional scale, and a comparison circuitry to compare, using a reference image corresponding to the image acquiring position of the optical image, the optical image with the reference image for each pixel.
    Type: Grant
    Filed: December 12, 2016
    Date of Patent: November 13, 2018
    Assignee: NuFlare Technology, Inc.
    Inventors: Hideki Nukada, Nobutaka Kikuiri
  • Patent number: 10055834
    Abstract: A pattern inspection apparatus includes a first stage to mount an inspection target object, located at the position displaced from the gravity center of the first stage, first and second two-dimensional scales on the first stage and opposite each other with respect to the gravity center, a second stage under a region overlapping with the gravity center of the first stage and not overlapping with the target object, to support and move the first stage, a calculation processing circuitry to calculate the position of the inspection target object, using position information measured by the first and second two-dimensional scales, a sensor to capture an optical image of a pattern on the inspection target object in the state where the first stage on which the inspection target object is mounted is moving, and a comparison unit to compare, for each pixel, the optical image with a corresponding reference image.
    Type: Grant
    Filed: August 1, 2016
    Date of Patent: August 21, 2018
    Assignee: NuFlare Technology, Inc.
    Inventor: Hideki Nukada
  • Publication number: 20170178314
    Abstract: A pattern inspection apparatus includes a stage to mount thereon a substrate with patterns formed thereon and be able to move two-dimensionally, plural detectors of a two-dimensional scale, whose height positions are mutually different and arranged at positions on the stage different from the substrate position, to perform measurement, the body of the two-dimensional scale arranged fixed to a position facing the plural detectors, a sensor to acquire an optical image of the pattern on the substrate, in a state where the stage with the substrate is moving in one direction on a surface for the two-dimensional movement, a calculation circuitry to calculate an image acquiring position of the optical image by using position information measured by the two-dimensional scale, and a comparison circuitry to compare, using a reference image corresponding to the image acquiring position of the optical image, the optical image with the reference image for each pixel.
    Type: Application
    Filed: December 12, 2016
    Publication date: June 22, 2017
    Applicant: NuFlare Technology, Inc.
    Inventors: Hideki NUKADA, Nobutaka KIKUIRI
  • Patent number: 9646374
    Abstract: Optical image data is acquired by irradiating a pattern with light emitted from a light source. A threshold value is specified by internally dividing a minimum value and a maximum value of a signal amount of reference image data by a division ratio. A position corresponding to a signal amount of a threshold value is determined as an edge of a pattern of the reference image data. A position of a signal amount equal to the threshold value is determined as an edge of the pattern of the optical image data. A line width error is obtained as a difference between a first line width of the optical image data and a second line width of the reference image data. A new threshold value is specified in the case of fluctuation of a light quantity of the light source or decrease of a contrast value of the optical image data.
    Type: Grant
    Filed: February 24, 2016
    Date of Patent: May 9, 2017
    Assignee: NuFlare Technology, Inc.
    Inventors: Hideaki Hashimoto, Hideki Nukada, Kazuhiko Inoue
  • Patent number: 9572537
    Abstract: A support apparatus in which a distribution of a load for a user can be designated. The load occurs at body parts of the user by a stand-up motion. A processor calculates a projection position of a center of gravity of the user onto a floor, calculates a region of the floor where the projection position is to be included at the stand-up motion, calculates a target position in the region based on the distribution, and calculates a direction from the projection position to the target position. The target position is nearer to one body part of the user to which a larger load distribution is designated than on other body parts to which a smaller load distribution is designated. A designation direction for the user to bend the body in advance of the stand-up motion is output based on the direction.
    Type: Grant
    Filed: January 15, 2014
    Date of Patent: February 21, 2017
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Takamitsu Sunaoshi, Hideki Nukada
  • Publication number: 20170039699
    Abstract: A pattern inspection apparatus includes a first stage to mount an inspection target object, located at the position displaced from the gravity center of the first stage, first and second two-dimensional scales on the first stage and opposite each other with respect to the gravity center, a second stage under a region overlapping with the gravity center of the first stage and not overlapping with the target object, to support and move the first stage, a calculation processing circuitry to calculate the position of the inspection target object, using position information measured by the first and second two-dimensional scales, a sensor to capture an optical image of a pattern on the inspection target object in the state where the first stage on which the inspection target object is mounted is moving, and a comparison unit to compare, for each pixel, the optical image with a corresponding reference image.
    Type: Application
    Filed: August 1, 2016
    Publication date: February 9, 2017
    Applicant: NuFlare Technology, Inc.
    Inventor: Hideki NUKADA
  • Publication number: 20160247267
    Abstract: Optical image data is acquired by irradiating a pattern with light emitted from a light source. A threshold value is specified by internally dividing a minimum value and a maximum value of a signal amount of reference image data by a division ratio. A position corresponding to a signal amount of a threshold value is determined as an edge of a pattern of the reference image data. A position of a signal amount equal to the threshold value is determined as an edge of the pattern of the optical image data. A line width error is obtained as a difference between a first line width of the optical image data and a second line width of the reference image data. A new threshold value is specified in the case of fluctuation of a light quantity of the light source or decrease of a contrast value of the optical image data.
    Type: Application
    Filed: February 24, 2016
    Publication date: August 25, 2016
    Applicant: NuFlare Technology, Inc.
    Inventors: Hideaki HASHIMOTO, Hideki NUKADA, Kazuhiko INOUE
  • Publication number: 20150138541
    Abstract: An objective lens switching mechanism holds a plurality of objective lenses respectively disposed on each of the plurality of lens mounts, moves the plurality of objective lenses between a first position on the lens mounts and a second position above the lens mounts by a rotating mechanism and moves the plurality of objective lenses from the second position above the lens mounts to another second position above the lens mounts.
    Type: Application
    Filed: November 14, 2014
    Publication date: May 21, 2015
    Inventors: Hideki NUKADA, Makoto TAYA, Masaki SHIMIZU, Takamasa FUKUDA, Riki OGAWA
  • Publication number: 20150088038
    Abstract: According to one embodiment, a standup assistance apparatus includes a measurement unit, a detection unit and a determination unit. The measurement unit is configured to measure a center-of-gravity acceleration at which a position of a center-of-gravity of a subject moves. The detection unit is configured to detect whether or not buttocks of the subject contact a surface. The determination unit is configured to determine a standup ability of the subject in accordance with whether or not the buttocks contact the surface when the center-of-gravity acceleration reaches a first extreme value or a second extreme value which is a next extreme value of the first extreme value.
    Type: Application
    Filed: September 18, 2014
    Publication date: March 26, 2015
    Inventors: Izumi Fukunaga, Takamitsu Sunaoshi, Hideki Nukada
  • Publication number: 20140200733
    Abstract: A distribution of a load between right and left of a user is designated. The load is occurred at body parts of the user by a stand-up motion of the user. A projection position of a center of gravity of the user onto a floor is calculated. A region of the floor where the projection position is to be included at the stand-up motion is calculated. A target position in the region is calculated based on the distribution. The target position is nearer to a first body part of the user to which larger distribution is designated than a second body part of the user to which smaller distribution is designated. A direction from the projection position to the target position is calculated. A designation direction for the user to bend an upper body of the user in advance of the stand-up motion is outputted based on the direction.
    Type: Application
    Filed: January 15, 2014
    Publication date: July 17, 2014
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Takamitsu SUNAOSHI, Hideki Nukada
  • Patent number: 8558498
    Abstract: According to one embodiment, a drive device comprises a first generating unit which moves in straightly movable manner or rotatable manner and generates precharge pressure, a sliding guide unit which has a sliding guide surface that comes into contact with a sliding surface of the first generating unit and to which the precharge pressure is given, a vibration unit which gives vibration to the first generating unit, and a second generating unit. When the vibration is given to the first generating unit, the second generating unit generates driving force for driving the first generating unit in a predetermined direction so that the driving force is more than frictional force between the sliding surface and the sliding guide surface. When the vibration is not given to the first generating unit, the second generating unit generates the driving force so that the driving force is less than the frictional force.
    Type: Grant
    Filed: April 27, 2012
    Date of Patent: October 15, 2013
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hiroshi Takahashi, Hideki Nukada
  • Publication number: 20130188253
    Abstract: According to one embodiment, a substrate with an interference filter layer includes a plate-like first substrate and a filter layer. The filter layer includes optically semi-transparent first and second reflective layers and a light-transmitting layer, the light-transmitting layer being formed of first, second, and third spacer layers, the first, second, and third spacer layers being optically transparent, the light-transmitting layer including first, second, and third areas which include the first spacer layer in common, the first, second, and third areas having different optical film thicknesses due to the second and the third spacer layers, the first, second, and the third areas transmitting light with different wavelengths.
    Type: Application
    Filed: July 20, 2012
    Publication date: July 25, 2013
    Inventors: Yutaka NAKAI, Tomio Ono, Yoshinori Honguh, Hideki Nukada, Yuzo Hirayama, Hitoshi Nagato, Takashi Miyazaki
  • Publication number: 20120268055
    Abstract: According to one embodiment, a drive device comprises a first generating unit which moves in straightly movable manner or rotatable manner and generates precharge pressure, a sliding guide unit which has a sliding guide surface that comes into contact with a sliding surface of the first generating unit and to which the precharge pressure is given, a vibration unit which gives vibration to the first generating unit, and a second generating unit. When the vibration is given to the first generating unit, the second generating unit generates driving force for driving the first generating unit in a predetermined direction so that the driving force is more than frictional force between the sliding surface and the sliding guide surface. When the vibration is not given to the first generating unit, the second generating unit generates the driving force so that the driving force is less than the frictional force.
    Type: Application
    Filed: April 27, 2012
    Publication date: October 25, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Hiroshi Takahashi, Hideki Nukada
  • Publication number: 20120176423
    Abstract: According to one embodiment, a display device includes an optical switch panel, and a light source device. The optical switch panel includes pixels and a drive part controlling transmissivity of the pixels. The light source device is stacked with the panel and includes a light source to emit a source light, a light guiding unit, interference filters, and light controlling parts. The light guiding unit includes a light guide region guiding the source light, a reflecting part provided around the region to reflect the source light, and apertures provided around the region and causing semi-collimated light to be emitted. The interference filters cause lights in certain wavelength dands of the light emitted from the aperture to pass. The light controlling parts cause the lights through the filters to enter the pixels to form an image.
    Type: Application
    Filed: March 19, 2012
    Publication date: July 12, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Hitoshi NAGATO, Takashi MIYAZAKI, Yutaka NAKAI, Tomio ONO, Yoshinori HONGUH, Hideki NUKADA, Yuzo HIRAYAMA, Hajime YAMAGUCHI
  • Publication number: 20120143655
    Abstract: According to one embodiment, a checkout apparatus includes a counter, a scanner, a register terminal, and a recognition unit. The counter is embedded at least one weight meter and to be put at least one of target objects. The scanner reads codes attached to the target objects. The register terminal settles payment for the target objects. The recognition unit identifies the target objects by referring to working property category information pieces indicating a category in scan work for the target objects, based on the codes read by the scanner, and obtains signals that represent states each including one of steady work and unsteady work for an operator, based on a time history of a weight of the target objects.
    Type: Application
    Filed: December 30, 2011
    Publication date: June 7, 2012
    Inventors: Takamitsu Sunaoshi, Kiminori Toya, Hideki Nukada, Hideichi Nakamoto
  • Publication number: 20120073937
    Abstract: According to one embodiment, a medium convey apparatus is provided with an oscillation unit, a cooling unit, a convey unit, a temperature detector and a controller. The oscillation unit applies oscillation to a thin medium as a to-be-conveyed target. The cooling unit cools the air around the thin medium. The convey unit conveys the thin medium. The temperature detector detects the temperature around the medium. The controller controls the cooling unit based on the temperature detected by the temperature detector.
    Type: Application
    Filed: March 4, 2011
    Publication date: March 29, 2012
    Inventors: Kiminori Toya, Hideki Nukada, Yuko Kobayashi
  • Patent number: 7802785
    Abstract: In an apparatus, a pile of sheets is mounted on a support base, and is brought into contact with a guide. A high-frequency vibration is applied to the sheets from a vibrating part which is pressed to the pile. A sheet on the uppermost surface of the pile is transferred by a feed roller. The guide has a guide end defining a guide entrance between the guide end and the feed roller, through which the sheets is passed. The guide end is arranged substantially in a virtual plane including a contact position at which the vibrating part is in contact with the uppermost surface of the pile, and substantially parallel with the sheets. A separation section for separating sheets from each other is arranged behind the entrance, and an air blow-off section for blowing air into the side of the pile is provided in the vicinity of the entrance.
    Type: Grant
    Filed: February 26, 2009
    Date of Patent: September 28, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yuko Kobayashi, Kiminori Toya, Hideki Nukada, Masaki Takahashi
  • Patent number: 7708268
    Abstract: A pile of sheets is held by a separator/feeder and a vibrator is brought into contact with a first region of the pile with a first contact pressure. High frequency vibrations are applied from the vibrator to the sheet. A takeout mechanism is brought into contact with and pressed against the pile with a second contact pressure and sheets are taken out one by one from the top surface of the pile by the takeout mechanism. A first sensor detects the position of the vibrator and outputs a first detection signal, while a second sensor detects the uppermost surface of the pile and outputs a second detection signal. A control section selects first and second contact pressures according to the first and second detection signals and maintains the first and second contact pressures.
    Type: Grant
    Filed: May 22, 2007
    Date of Patent: May 4, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kiminori Toya, Hideki Nukada, Yuko Kobayashi
  • Patent number: 7694957
    Abstract: In a device that separates a sheet and extracts the sheet from a stack of the sheets, the stack of sheets is placed on a sheet feeding unit. A vibrator is in contact with the top surface of the stack at a spot to vibrate the sheets at a high frequency. The high-frequency vibration reduces the adhesion and frictional force among the sheets. A sheet extraction mechanism conveys each sheet.
    Type: Grant
    Filed: September 27, 2006
    Date of Patent: April 13, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hideki Nukada, Yuko Kobayashi, Kiminori Toya
  • Publication number: 20090218752
    Abstract: In an apparatus, a pile of sheets is mounted on a support base, and is brought into contact with a guide. A high-frequency vibration is applied to the sheets from a vibrating part which is pressed to the pile. A sheet on the uppermost surface of the pile is transferred by a feed roller. The guide has a guide end defining a guide entrance between the guide end and the feed roller, through which the sheets is passed. The guide end is arranged substantially in a virtual plane including a contact position at which the vibrating part is in contact with the uppermost surface of the pile, and substantially parallel with the sheets. A separation section for separating sheets from each other is arranged behind the entrance, and an air blow-off section for blowing air into the side of the pile is provided in the vicinity of the entrance.
    Type: Application
    Filed: February 26, 2009
    Publication date: September 3, 2009
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Yuko Kobayashi, Kiminori Toya, Hideki Nukada, Masaki Takahashi