Patents by Inventor Hideki TSUKADA

Hideki TSUKADA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CHAMBER SYSTEM AND HEAT-INSULATING PANEL
    Publication number: 20150047806
    Abstract: A chamber system includes: a housing section that is surrounded by a bottom part, a side wall part, and a ceiling part and houses a processing apparatus; and a heat-insulating section that is provided in each of the bottom part, the side wall part, and the ceiling part, and regulates transfer of heat between the housing section and the outside of the housing section.
    Type: Application
    Filed: July 3, 2014
    Publication date: February 19, 2015
    Inventors: Takaharu MIURA, Hideki TSUKADA, Atsushi ENDO, Ryosuke INOUE