Abstract: A distance in a scanning direction between a first set of edges which face each other and exhibit an opposite change between light and dark is measured by an image measuring machine, and a bias correction value is calculated based on a difference between a measured value and a true value. Using the bias correction value, detection point correction values, which are correction values in various directions of edge detection points detected by a scan of a measured object using the image measuring machine, are calculated; a correction amount used in correction of the edge detection points is specified based on the detection point correction value in each direction; and the edge detection points are corrected using the correction amount.

Abstract: A surface texture measuring apparatus includes an X axis displacement mechanism and a Y axis displacement mechanism displacing a measurable object having an interior wall along an XY plane; a measurement sensor measuring a surface texture of the interior wall without contact; a Z axis displacement mechanism displacing the measurement sensor in a Z axis direction orthogonal to the XY plane and bringing the measurement sensor to face the interior wall; a W axis displacement mechanism displacing the measurement sensor facing the interior wall in a normal direction of the interior wall; and a ? axis displacement mechanism displacing the measurement sensor facing the interior wall along the interior wall.

Abstract: A 3D printer includes: an object-forming unit for forming an object by laminating an object material at an object-forming point based on a design data; an image capturing unit for capturing an image of the object formed by the object-forming unit; and a shape measurement unit for measuring a cross section of the object based on the image captured by the image capturing unit while the object is under formation by the object-forming unit.

Abstract: An XY shift mechanism can shift a rotary table in a two-dimensional direction (XY direction) orthogonal to a rotation axis of the rotary table. By collaborative control of the shift position of the rotary table in the two-dimensional direction in synchronization with the rotation of the rotary table, rotation is made possible about a virtual rotation center that is set at an arbitrary position on the rotary table. The collaborative control of the shift position of the rotary table in the two-dimensional direction also corrects rotation eccentricity owing to the eccentricity of the rotary table. Thus, the virtual rotation center can be set at an arbitrary position on the rotary table, thus enabling obtainment of high resolution tomographic images of a plurality of regions of interest of an object, without the need for repositioning of the object.

Abstract: A distance in a scanning direction between a first set of edges which face each other and exhibit an opposite change between light and dark is measured by an image measuring machine, and a bias correction value is calculated based on a difference between a measured value and a true value. Using the bias correction value, detection point correction values, which are correction values in various directions of edge detection points detected by a scan of a measured object using the image measuring machine, are calculated; a correction amount used in correction of the edge detection points is specified based on the detection point correction value in each direction; and the edge detection points are corrected using the correction amount.

Abstract: A light-interference measuring apparatus including: a light source of a broad band light; an objective lens section to branch an optical path of the broad band light into a reference optical path including a reference mirror and a measuring optical path including a measuring object and to output a superposed wave of two branched lights; and an optical path length changing section to change an optical path length of either the reference optical path or the measuring optical path; wherein the objective lens section includes a phase difference control member to control a phase difference between the reference light and the object light to generate destructive interference fringes, and a minimum luminance position detecting section to detect minimum luminance position of the destructive interference fringes.

Abstract: Disclosed is a slit width adjusting device comprising: a pair of slit members parallel to each other, which is moved to approach each other or to be separated from each other to adjust a slit width; a driving section to move the pair of slit members; an absolute position original point detection section to detect an arbitrary absolute position of the slit members as an original point; and an adjustment section to adjust the slit width, wherein the adjustment section comprises: a storage unit to store a slit width table in which a displacement amount of the slit width from the original point, and a drive instruction value corresponding to the displacement amount, are corresponding to each other; and a drive control unit to extract the drive instruction value corresponding to a specified slit width, to drive the driving section according to the extracted drive instruction value.

Abstract: A shape measuring method includes guiding light emitted from a light source to an object to be measured and a reference surface, combining light reflected from the object to be measured with light reflected from the reference surface, and taking a distribution image of an interference light intensity corresponding to each measurement position of the object to be measured, while changing an optical path length difference between a first optical path length and a second optical path length over a whole scanning zone, sequentially storing distribution images of the interference light intensity in the whole scanning zone, and obtaining an interference light intensity string at each measurement position based on the stored distribution images of the interference light intensity, and obtaining a position in an optical axis direction at each measurement position of the object to be measured from a peak position of the interference light intensity string.

Abstract: A coordinate measuring machine has a coordinate measuring machine body and a controller. The coordinate measuring machine body has a probe having a measurement piece and a drive mechanism for driving the probe. The probe has a drive unit for driving the measurement piece. The controller includes a first measuring unit and a second measuring unit. The first measuring unit measures a displacement of the measurement piece driven by the drive unit. The second measuring unit measures a displacement of the probe. The measurement accuracy of the second measuring unit is lower than the measurement accuracy of the first measuring unit.

Abstract: A shape measuring method includes guiding light emitted from a light source to an object to be measured and a reference surface, combining light reflected from the object to be measured with light reflected from the reference surface, and taking a distribution image of an interference light intensity corresponding to each measurement position of the object to be measured, while changing an optical path length difference between a first optical path length and a second optical path length over a whole scanning zone, sequentially storing distribution images of the interference light intensity in the whole scanning zone, and obtaining an interference light intensity string at each measurement position based on the stored distribution images of the interference light intensity, and obtaining a position in an optical axis direction at each measurement position of the object to be measured from a peak position of the interference light intensity string.

Abstract: A light-interference measuring apparatus including: a light source of a broad band light; an objective lens section to branch an optical path of the broad band light into a reference optical path including a reference mirror and a measuring optical path including a measuring object and to output a superposed wave of two branched lights; and an optical path length changing section to change an optical path length of either the reference optical path or the measuring optical path; wherein the objective lens section includes a phase difference control member to control a phase difference between the reference light and the object light to generate destructive interference fringes, and a minimum luminance position detecting section to detect minimum luminance position of the destructive interference fringes.

Abstract: An image measuring instrument includes a camera that images a plurality of measured points based on a preset measuring procedure, and an illumination unit that irradiates the measured points. The image measuring instrument measures a dimension and a shape of a to-be-measured object while the illumination unit irradiates light having illumination light quantity corresponding to an illumination preset value with reference to the illumination preset value that is preliminarily set for every measured point. An illumination light quantity setting method includes a command signal output step that outputs a command signal for irradiating light having the illumination light quantity corresponding to the illumination preset value for every measured point, an offset value assigning step that assigns an offset value to the command signal to be sent to the illumination unit, and a setting step that sets the offset value to be variable.

Abstract: A coordinate measuring machine has a coordinate measuring machine body and a controller. The coordinate measuring machine body has a probe having a measurement piece and a drive mechanism for driving the probe. The probe has a drive unit for driving the measurement piece. The controller includes a first measuring unit and a second measuring unit. The first measuring unit measures a displacement of the measurement piece driven by the drive unit. The second measuring unit measures a displacement of the probe. The measurement accuracy of the second measuring unit is lower than the measurement accuracy of the first measuring unit.

Abstract: Disclosed is a slit width adjusting device comprising: a pair of slit members parallel to each other, which is moved to approach each other or to be separated from each other to adjust a slit width; a driving section to move the pair of slit members; an absolute position original point detection section to detect an arbitrary absolute position of the slit members as an original point; and an adjustment section to adjust the slit width, wherein the adjustment section comprises: a storage unit to store a slit width table in which a displacement amount of the slit width from the original point, and a drive instruction value corresponding to the displacement amount, are corresponding to each other; and a drive control unit to extract the drive instruction value corresponding to a specified slit width, to drive the driving section according to the extracted drive instruction value.

Abstract: An image measuring instrument includes a camera that images a plurality of measured points based on a preset measuring procedure, and an illumination unit that irradiates the measured points. The image measuring instrument measures a dimension and a shape of a to-be-measured object while the illumination unit irradiates light having illumination light quantity corresponding to an illumination preset value with reference to the illumination preset value that is preliminarily set for every measured point. An illumination light quantity setting method includes a command signal output step that outputs a command signal for irradiating light having the illumination light quantity corresponding to the illumination preset value for every measured point, an offset value assigning step that assigns an offset value to the command signal to be sent to the illumination unit, and a setting step that sets the offset value to be variable.

Abstract: There are provided a measuring method and a measuring system which enable creation of a measurement route with ease to thereby enable three-dimensional measurement to be quickly performed even if an object to be measured has a complicated shape or configuration. An object to be measured is shot. A plurality of images obtained by the shooting are combined together to generate a combined image of the object. A measuring region of the generated combined image is designated. A measurement path measuring program is created by inputting parameters for creating a measurement path. The designated measuring region is measured along the measurement path according to the created measurement path measuring program.

Abstract: There are provided a measuring method and a measuring system which enable creation of a measurement route with ease to thereby enable three-dimensional measurement to be quickly performed even if an object to be measured has a complicated shape or configuration. An object to be measured is shot. A plurality of images obtained by the shooting are combined together to generate a combined image of the object. A measuring region of the generated combined image is designated. A measurement path measuring program is created by inputting parameters for creating a measurement path. The designated measuring region is measured along the measurement path according to the created measurement path measuring program.