Patents by Inventor Hidemoto HAYASHIHARA

Hidemoto HAYASHIHARA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240014055
    Abstract: There is provided a technique, which includes: at least one substrate processing apparatus including a controller configured to be capable of controlling processing of a substrate according to a recipe including at least one step and a first memory configured to be capable of storing data of the at least one substrate processing apparatus that is reported during the processing of the substrate; and a data manager connected to the at least one substrate processing apparatus, configured to acquire the data, and configured to be capable of specifying the number of the at least one step that is included in the data to be acquired such that the data falls within a predefined data acquirable range.
    Type: Application
    Filed: June 22, 2023
    Publication date: January 11, 2024
    Applicant: Kokusai Electric Corporation
    Inventors: Kazuyoshi YAMAMOTO, Hidemoto Hayashihara, Kayoko Yashiki, Kyohei Kita, Kazuhide Asai
  • Patent number: 11782425
    Abstract: There is provided a configuration that includes: a main controller configured to, when executing a process recipe including a specific step of executing a sub-recipe, control a process controller to execute the sub-recipe a predetermined number of times to perform a predetermined process to a substrate: and a device management controller configured to collect device data during an execution of the process, recipe and store the device data in a storage part. The device management controller is further configured to: search the storage part; acquire the device data in a designated step among respective steps constituting the sub-recipe for a number of times of execution of the sub-recipe; calculate a first standard deviation of the device data acquired for the number of times of execution; and compare the first standard deviation with a threshold value and generate an alarm when the first standard deviation exceeds the threshold value.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: October 10, 2023
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuyoshi Yamamoto, Kazuhide Asai, Hidemoto Hayashihara, Mitsuru Fukuda, Kayoko Yashiki, Takayuki Kawagishi, Hiroyuki Iwakura
  • Publication number: 20230027653
    Abstract: According to one aspect of the technique, there is provided a technique, including: a process chamber in which a substrate is processed; a memory that stores recipe information describing a procedure that executes the processing of the substrate, process data accumulated during the processing of a plurality of substrates, variation quality data calculated from the process data, and comparison data to be compared with the variation quality data; a monitor configured to monitor the process data; an analyzer configured to compare the variation quality data with the comparison data to obtain a reproduction index indicating a reproducibility of the comparison data, and calculate a correction value of setting information included in the recipe information when the reproduction index is smaller than a predetermined value; and a controller configured to be capable of correcting the setting information included in the recipe information with the correction value.
    Type: Application
    Filed: June 9, 2022
    Publication date: January 26, 2023
    Applicant: Kokusai Electric Corporation
    Inventors: Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Kayoko YASHIKI, Kazuhide ASAI
  • Patent number: 11387152
    Abstract: According to one aspect of the technique, there is provided a technique, including: a process chamber in which a substrate is processed; a memory that stores recipe information describing a procedure that executes the processing of the substrate, process data accumulated during the processing of a plurality of substrates, variation quality data calculated from the process data, and comparison data to be compared with the variation quality data; a monitor configured to monitor the process data; an analyzer configured to compare the variation quality data with the comparison data to obtain a reproduction index indicating a reproducibility of the comparison data, and calculate a correction value of setting information included in the recipe information when the reproduction index is smaller than a predetermined value; and a controller configured to be capable of correcting the setting information included in the recipe information with the correction value.
    Type: Grant
    Filed: September 24, 2021
    Date of Patent: July 12, 2022
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuyoshi Yamamoto, Hidemoto Hayashihara, Kayoko Yashiki, Kazuhide Asai
  • Patent number: 11237538
    Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.
    Type: Grant
    Filed: March 24, 2017
    Date of Patent: February 1, 2022
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki Kawagishi, Kayoko Yashiki, Yukio Miyata, Hiroyuki Iwakura, Masanori Okuno, Kenichi Fujimoto, Ryuichi Kaji
  • Publication number: 20220019191
    Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.
    Type: Application
    Filed: September 29, 2021
    Publication date: January 20, 2022
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
  • Patent number: 11086304
    Abstract: A substrate processing apparatus includes an operating unit for transmitting apparatus data to a memory, the apparatus data being required while a recipe for processing a substrate is executed; and a data matching unit for comparing the apparatus data stored in the memory. When an error occurs in the substrate processing apparatus, the operating unit transmits data representing the error to the data matching unit. The data matching unit includes: a selection unit for selecting first apparatus data which was acquired when the recipe was executed without an occurrence of the error, and stored in the memory; an acquisition unit for acquiring first and second apparatus data from the memory, the first apparatus data being acquired when an error did not occur and the second apparatus data being acquired when an error occurred; and a calculation unit for comparing the first and second apparatus data and calculating a difference therebetween.
    Type: Grant
    Filed: March 29, 2017
    Date of Patent: August 10, 2021
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuhide Asai, Kazuyoshi Yamamoto, Takayuki Kawagishi, Hidemoto Hayashihara, Kayoko Yashiki, Hiroyuki Iwakura
  • Patent number: 10937676
    Abstract: There is provided a configuration that includes a device-status-monitoring controller that stores, in a storage section, device data generated by the apparatus; an analysis-support controller that acquires the device data related to abnormality analysis information from the storage section based on basic information that includes: information that defines an abnormal event, at least one of the device data corresponding to the abnormal event, and step information indicating a step where the at least one of the device data is generated; and recipe-specific information that includes at least a recipe name; and a display device that displays the device data related to the abnormality analysis information in a manner that goes back to a past time from a time when a latest recipe specified by the recipe name is executed.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: March 2, 2021
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuhide Asai, Hidemoto Hayashihara, Kazuyoshi Yamamoto, Takayuki Kawagishi, Kayoko Yashiki, Hiroyuki Iwakura
  • Patent number: 10860005
    Abstract: There is provided a technique for detecting a fault of a device from an error in device data. According to the technique described herein, there is provided a substrate processing apparatus including: a pipe heater configured to heat a gas pipe; a temperature detecting unit provided at the pipe heater and configured to detect a temperature of the gas pipe; a control unit configured to control the pipe heater based on device data representing the temperature of the gas pipe measured by the temperature detecting unit by executing a process control program to adjust an electrical power applied to the pipe heater; a memory unit configured to store a monitored item table; and a device status monitoring unit configured to execute a device status monitoring program.
    Type: Grant
    Filed: September 19, 2017
    Date of Patent: December 8, 2020
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuhide Asai, Hiroyuki Iwakura, Hidemoto Hayashihara, Mitsuru Fukuda, Kazuyoshi Yamamoto, Kayoko Yashiki, Takayuki Kawagishi
  • Publication number: 20200201305
    Abstract: There is provided a configuration that includes: a main controller configured to, when executing a process recipe including a specific step of executing a sub-recipe, control a process controller to execute the sub-recipe a predetermined number of times to perform a predetermined process to a substrate: and a device management controller configured to collect device data during an execution of the process, recipe and store the device data in a storage part. The device management controller is further configured to: search the storage part; acquire the device data in a designated step among respective steps constituting the sub-recipe for a number of times of execution of the sub-recipe; calculate a first standard deviation of the device data acquired for the number of times of execution; and compare he first standard deviation with a threshold value and generate an alarm when the first standard deviation exceeds the threshold value.
    Type: Application
    Filed: March 3, 2020
    Publication date: June 25, 2020
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuyoshi YAMAMOTO, Kazuhide ASAI, Hidemoto HAYASHIHARA, Mitsuru FUKUDA, Kayoko YASHIKI, Takayuki KAWAGISHI, Hiroyuki IWAKURA
  • Publication number: 20200192324
    Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.
    Type: Application
    Filed: February 25, 2020
    Publication date: June 18, 2020
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI
  • Publication number: 20190035657
    Abstract: There is provided a configuration that includes a device-status-monitoring controller that stores, in a storage section, device data generated by the apparatus; an analysis-support controller that acquires the device data related to abnormality analysis information from the storage section based on basic information that includes: information that defines an abnormal event, at least one of the device data corresponding to the abnormal event, and step information indicating a step where the at least one of the device data is generated; and recipe-specific information that includes at least a recipe name; and a display device that displays the device data related to the abnormality analysis information in a manner that goes back to a past time from a time when a latest recipe specified by the recipe name is executed.
    Type: Application
    Filed: September 28, 2018
    Publication date: January 31, 2019
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Kazuhide ASAI, Hidemoto HAYASHIHARA, Kazuyoshi YAMAMOTO, Takayuki KAWAGISHI, Kayoko YASHIKI, Hiroyuki IWAKURA
  • Publication number: 20180120822
    Abstract: There is provided a technique for detecting a fault of a device from an error in device data. According to the technique described herein, there is provided a substrate processing apparatus including: a pipe heater configured to heat a gas pipe; a temperature detecting unit provided at the pipe heater and configured to detect a temperature of the gas pipe; a control unit configured to control the pipe heater based on device data representing the temperature of the gas pipe measured by the temperature detecting unit by executing a process control program to adjust an electrical power applied to the pipe heater; a memory unit configured to store a monitored item table; and a device status monitoring unit configured to execute a device status monitoring program.
    Type: Application
    Filed: September 19, 2017
    Publication date: May 3, 2018
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Kazuhide ASAI, Hiroyuki IWAKURA, Hidemoto HAYASHIHARA, Mitsuru FUKUDA, Kazuyoshi YAMAMOTO, Kayoko YASHIKI, Takayuki KAWAGISHI
  • Publication number: 20170300044
    Abstract: A substrate processing apparatus includes an operating unit for transmitting apparatus data to a memory, the apparatus data being required while a recipe for processing a substrate is executed; and a data matching unit for comparing the apparatus data stored in the memory. When an error occurs in the substrate processing apparatus, the operating unit transmits data representing the error to the data matching unit. The data matching unit includes: a selection unit for selecting first apparatus data which was acquired when the recipe was executed without an occurrence of the error, and stored in the memory; an acquisition unit for acquiring first and second apparatus data from the memory, the first apparatus data being acquired when an error did not occur and the second apparatus data being acquired when an error occurred; and a calculation unit for comparing the first and second apparatus data and calculating a difference therebetween.
    Type: Application
    Filed: March 29, 2017
    Publication date: October 19, 2017
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Takayuki KAWAGISHI, Hidemoto HAYASHIHARA, Kayoko YASHIKI, Hiroyuki IWAKURA
  • Publication number: 20170285613
    Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.
    Type: Application
    Filed: March 24, 2017
    Publication date: October 5, 2017
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Kazuhide ASAI, Kazuyoshi YAMAMOTO, Hidemoto HAYASHIHARA, Takayuki KAWAGISHI, Kayoko YASHIKI, Yukio MIYATA, Hiroyuki IWAKURA, Masanori OKUNO, Kenichi FUJIMOTO, Ryuichi KAJI