Patents by Inventor Hidenori TOSU

Hidenori TOSU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Developing treatment apparatus and developing treatment method
    Patent number: 11567444
    Abstract: A developing treatment apparatus for performing a developing treatment on a treatment object substrate. The developing treatment apparatus includes: a rotating and holding part that holds and rotates the treatment object substrate; a discharger that discharges a predetermined solution relating to the developing treatment to the treatment object substrate held on the rotating and holding part; and a destaticizer that supplies ions ionized by an X-ray to the predetermined solution discharged to the treatment object substrate held on the rotating and holding part, to destaticize the predetermined solution.
    Type: Grant
    Filed: July 8, 2019
    Date of Patent: January 31, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Ryouichirou Naitou, Hidenori Tosu, Takahiro Yamaguchi, Seiichi Kure
  • DEVELOPING TREATMENT APPARATUS AND DEVELOPING TREATMENT METHOD
    Publication number: 20210124303
    Abstract: A developing treatment apparatus for performing a developing treatment on a treatment object substrate, the developing treatment apparatus includes: a rotating and holding part configured to hold and rotate the treatment object substrate; a discharger configured to discharge a predetermined solution relating to the developing treatment to the treatment object substrate held on the rotating and holding part; and a destaticizer configured to supply ions ionized by an X-ray to the predetermined solution discharged to the treatment object substrate held on the rotating and holding part, to destaticize the predetermined solution.
    Type: Application
    Filed: July 8, 2019
    Publication date: April 29, 2021
    Inventors: Ryouichirou NAITOU, Hidenori TOSU, Takahiro YAMAGUCHI, Seiichi KURE