Patents by Inventor Hideo Mano

Hideo Mano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cold cathode ionization vacuum gauge and inner wall protection member
    Patent number: 9316555
    Abstract: A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.
    Type: Grant
    Filed: April 24, 2014
    Date of Patent: April 19, 2016
    Assignee: Canon Anelva Corporation
    Inventors: Itaru Enomoto, Hideo Mano
  • COLD CATHODE IONIZATION VACUUM GAUGE AND INNER WALL PROTECTION MEMBER
    Publication number: 20140368210
    Abstract: A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.
    Type: Application
    Filed: April 24, 2014
    Publication date: December 18, 2014
    Applicant: CANON ANELVA CORPORATION
    Inventors: ITARU ENOMOTO, HIDEO MANO
  • Vacuum actuator including a stator forming a part of a vacuum partition wall
    Patent number: 8912697
    Abstract: A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other.
    Type: Grant
    Filed: December 21, 2010
    Date of Patent: December 16, 2014
    Assignee: Canon Anelva Corporation
    Inventors: Kazuhito Watanabe, Yukihito Tashiro, Naoyuki Nozawa, Daisuke Kobinata, Hideo Mano
  • Cold cathode ionization vacuum gauge, vacuum processing apparatus having the same, discharge starting auxiliary electrode used for the same, and method of measuring pressure using the same
    Patent number: 8384391
    Abstract: The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation. The cold cathode ionization vacuum gauge of an embodiment of the present invention includes an anode, a cathode disposed so as to form a discharge space together with the anode, and a discharge starting auxiliary electrode disposed in the discharge space and electrically connected to the cathode. The discharge starting auxiliary electrode has an electrode part disposed in parallel with an axially longitudinal direction of the anode.
    Type: Grant
    Filed: May 12, 2011
    Date of Patent: February 26, 2013
    Assignee: Canon Anelva Corporation
    Inventors: Yohsuke Kawasaki, Hideo Mano
  • COLD CATHODE IONIZATION VACUUM GAUGE, VACUUM PROCESSING APPARATUS HAVING THE SAME, DISCHARGE STARTING AUXILIARY ELECTRODE USED FOR THE SAME, AND METHOD OF MEASURING PRESSURE USING THE SAME
    Publication number: 20110279127
    Abstract: The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation. The cold cathode ionization vacuum gauge of an embodiment of the present invention includes an anode, a cathode disposed so as to form a discharge space together with the anode, and a discharge starting auxiliary electrode disposed in the discharge space and electrically connected to the cathode. The discharge starting auxiliary electrode has an electrode part disposed in parallel with an axially longitudinal direction of the anode.
    Type: Application
    Filed: May 12, 2011
    Publication date: November 17, 2011
    Applicant: CANON ANELVA CORPORATION
    Inventors: YOHSUKE KAWASAKI, HIDEO MANO
  • VACUUM ACTUATOR AND SUBSTRATE TRANSPORT ROBOT
    Publication number: 20110156514
    Abstract: A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other.
    Type: Application
    Filed: December 21, 2010
    Publication date: June 30, 2011
    Applicant: CANON ANELVA CORPORATION
    Inventors: Kazuhito WATANABE, Yukihito TASHIRO, Naoyuki NOZAWA, Daisuke KOBINATA, Hideo MANO