Abstract: A composite sensor includes an external holding portion 6, an internal holding portion 4 supported within the external holding portion 6 via coupling portion 5, and a vibration-type angular velocity sensor element 1 and an acceleration sensor element 2 disposed within the internal holding portion 4, and is configured so that the internal holding portion 4 is held in such a manner so as to substantially suppress a movement of the acceleration sensor element 2 along a detection direction while to allow a movement of the vibration-type angular velocity sensor element 1 in a direction in which it receives Coriolis force at least by an angular velocity. A reduction of the composite sensor in size can be achieved by this structure.

Abstract: An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Abstract: A composite sensor includes an angular velocity sensor element, an acceleration sensor element, a signal processing IC for processing signals from the angular velocity sensor element and the acceleration sensor element, an inner package for accommodating the angular velocity sensor element, the acceleration sensor element, and the signal processing IC; a coupler connected to this inner package, and a fixing member connected to this coupler for holding the inner package via this coupler. The coupler is elastically deformable. One of the acceleration sensor element and the signal processing IC is located at the right with respect to the center of the inner package, and the other of the acceleration sensor element and the signal processing IC is located at the left with respect to the center of the inner package.

Abstract: In an angular velocity sensor device, a vibration isolation member, a sensor support plate on which a tuning fork unit functioning as a vibrating type angular velocity sensor is mounted, a collar, a circuit board on which a circuit pattern is formed for driving the tuning fork unit and processing a signal output therefrom are provided by having a plurality of pins inserted, in this order, which extend from the bottom surface of a concave-shaped case. The circuit pattern and the tuning fork unit are connected with each other via a flexible printed circuit board. These components are accommodated inside the concave-shaped case. A cover is fitted in an open top of the case so as to completely seal the case. The angular velocity sensor device with the aforementioned arrangement does not suffer variation in the operational properties due to disturbance vibration and deterioration in the vibration isolation property.