Abstract: A prober for measuring the electrical characteristics of a test target object includes a tester, stage, probe card, first sensor, second sensor, and controller. The stage places a test target object thereon. The test target object has a plurality of electrical circuit devices on its surface. Each of the electrical circuit devices has a plurality of electrodes on its surface. The probe card is arranged above the stage. The probe has a plurality of probes. The probes are connected to the tester. The first sensor detects the positions of distal ends of the probes. The second sensor detects the surface position of an individual one of the electrical circuit devices. The controller brings the probes of the probe card and the electrodes of the electrical circuit devices into contact with each other.

Abstract: A prober for measuring the electrical characteristics of a test target object includes a tester, stage, probe card, first sensor, second sensor, and controller. The stage places a test target object thereon. The test target object has a plurality of electrical circuit devices on its surface. Each of the electrical circuit devices has a plurality of electrodes on its surface. The probe card is arranged above the stage. The probe has a plurality of probes. The probes are connected to the tester. The first sensor detects the positions of distal ends of the probes. The second sensor detects the surface position of an individual one of the electrical circuit devices. The controller brings the probes of the probe card and the electrodes of the electrical circuit devices into contact with each other.

Abstract: A prober for measuring the electrical characteristics of a test target object includes a tester, stage, probe card, first sensor, second sensor, and controller. The stage places a test target object thereon. The test target object has a plurality of electrical circuit devices on its surface. Each of the electrical circuit devices has a plurality of electrodes on its surface. The probe card is arranged above the stage. The probe has a plurality of probes. The probes are connected to the tester. The first sensor detects the positions of distal ends of the probes. The second sensor detects the surface position of an individual one of the electrical circuit devices. The controller brings the probes of the probe card and the electrodes of the electrical circuit devices into contact with each other.

Abstract: A prober for measuring the electrical characteristics of a test target object includes a tester, stage, probe card, first sensor, second sensor, and controller. The stage places a test target object thereon. The test target object has a plurality of electrical circuit devices on its surface. Each of the electrical circuit devices has a plurality of electrodes on its surface. The probe card is arranged above the stage. The probe has a plurality of probes. The probes are connected to the tester. The first sensor detects the positions of distal ends of the probes. The second sensor detects the surface position of an individual one of the electrical circuit devices. The controller brings the probes of the probe card and the electrodes of the electrical circuit devices into contact with each other.

Abstract: A probe device having a loader unit and two measuring units is disclosed. Each of the loader and measuring units is an independent unit supported by an independent casing. Each of the loader and measuring units has its exclusive slave CPU and integrated circuit members are under the control of this slave CPU to manage operations of members at the unit. The slave CPUs are connected to a master CPU, which controls the slave CPUs and which is also an independent unit, and they are connected to one another only through the master CPU. Program language is common to the master and slave CPUs and the units can be electrically connected to form an integral control system in which signals are exchanged among the units.