Abstract: The object of the present invention is to provide a sheet applicable for closing an opening of a liquid dispensing container for a liquid handling system used in chemical experiments, in which the sheet is capable of preventing natural volatilization of a liquid in the container even if the tip is frequently inserted and drawn, and also facilitating inserting and drawing of the tip. The composite sheet of the present invention comprises a sheet having elastic property and another sheet having slip property wherein the sheets are stacked. The composite sheet of the present invention can be used to close an opening of a liquid dispensing container for a liquid handling system used in chemical experiments. It can prevent volatilization of the solvent, and also facilitate inserting and drawing of the tip.

Abstract: The object of the present invention is to provide a sheet applicable for closing an opening of a liquid dispensing container for a liquid handling system used in chemical experiments, in which the sheet is capable of preventing natural volatilization of a liquid in the container even if the tip is frequently inserted and drawn, and also facilitating inserting and drawing of the tip. The composite. sheet of the present invention comprises a sheet having elastic property and another sheet having slip property wherein the sheets are stacked. The composite sheet of the present invention can be used to close an opening of a liquid dispensing container for a liquid handling system used in chemical experiments. It can prevent volatilization of the solvent, and also facilitate inserting and drawing of the tip.

Abstract: A substrate processing apparatus comprises a substrate transfer chamber; a substrate processing chamber disposed on a first side wall of the substrate transfer chamber; an intermediate substrate holding chamber disposed on a second side wall of the substrate transfer chamber; a first substrate holder disposed within the intermediate substrate holding chamber; a second substrate holder disposed within the substrate processing chamber; a first substrate transfer robot, disposed within the substrate transfer chamber, for transferring the substrate between the substrate processing chamber and the intermediate substrate holding chamber; a first gate valve disposed between the substrate processing chamber and the substrate transfer chamber; a second gate valve disposed between the substrate transfer chamber and the intermediate substrate holding chamber; an atmospheric pressure section located opposite to the substrate transfer chamber with respect to the intermediate substrate holding chamber; a third valve dispos

Abstract: A substrate processing apparatus comprises a substrate transfer chamber; a substrate processing chamber disposed on a first side wall of the substrate transfer chamber; an intermediate substrate holding chamber disposed on a second side wall of the substrate transfer chamber; a first substrate holder disposed within the intermediate substrate holding chamber; a second substrate holder disposed within the substrate processing chamber; a first substrate transfer robot, disposed within the substrate transfer chamber, for transferring the substrate between the substrate processing chamber and the intermediate substrate holding chamber; a first gate valve disposed between the substrate processing chamber and the substrate transfer chamber; a second gate valve disposed between the substrate transfer chamber and the intermediate substrate holding chamber; an atmospheric pressure section located opposite to the substrate transfer chamber with respect to the intermediate substrate holding chamber; a third valve dispos

Abstract: A substrate processing apparatus comprises a substrate transfer chamber; a plurality of substrate processing chambers disposed on a first side wall of the substrate transfer chamber and stacked in the vertical direction; a plurality of first gate valves, each being disposed between each of the substrate processing chambers and the substrate transfer chamber; a substrate accommodating chamber disposed on a second side wall of the substrate transfer chamber; a substrate transfer device, disposed within the substrate transfer chamber, for transferring the substrate under reduced pressure between the substrate processing chambers and the substrate accommodating chamber; an elevator disposed outside the substrate transfer chamber and comprising a stationary portion and an elevating portion which is vertically movable with respect to the stationary portion; a rigid connecting member capable of moving through a through-hole formed in a predetermined face of the substrate transfer chamber, the rigid connecting member