Abstract: A mask member for a deposition mask is provided. The deposition mask has a resin film in which a pattern of opening portions is formed. The mask member includes a resin film and a reflective film. The reflective film is on a surface of the resin film. The reflective film is adapted to reflect light having wavelengths of laser light.

Abstract: A deposition mask includes a resin film defining a plurality of opening portions. Each opening portions extends through the resin film. The resin film includes a first surface and a second surface opposite to the first surface. The second surface is a surface faced to a vapor deposition source during vapor deposition. The resin film defines dents comprising laser marks on the first surface. A mask member for a deposition mask is also provided.

Abstract: A deposition mask includes a resin film defining a plurality of opening portions. Each opening portions extends through the resin film. The resin film includes a first surface and a second surface opposite to the first surface. The second surface is a surface faced to a vapor deposition source during vapor deposition. The resin film defines dents comprising laser marks on the first surface. A mask member for a deposition mask is also provided.

Abstract: A deposition mask in which a resin film can be completely removed in opening portions, a method of manufacturing the deposition mask, and a mask member for the deposition mask are provided. A light irradiation source for laser light is disposed on one side of a resin film (11) and emits the laser light for forming a pattern of opening portions. A reflective film (30) is provided on another side of the resin film (11) and reflects light having a wavelength of the laser light emitted from the light irradiation source for the laser light. The laser light reflected by the reflective film (30) is used to form the patterns of the opening portion (11a) in the resin film (11).

Abstract: A method for manufacturing a vapor deposition mask including a resin layer, and a magnetic metal layer formed on the resin layer, the method including the steps of: providing a substrate; forming a resin layer by applying a solution including a resin material or a precursor solution of a resin material on a surface of the substrate, and then performing a heat treatment thereon; forming a magnetic metal layer on the resin layer, mask portion including a solid portion where a metal film is present and a hollow portion where the metal film is absent; forming a plurality of openings in a region of the resin layer that is located in the hollow portion of the mask portion; and removing the resin layer from the substrate after forming a plurality of openings in a region of the resin layer.

Abstract: A method for producing a resin film by using a resin material and accurately forming a fine pattern as a vapor deposition mask or an optical element, a method for producing an organic EL display device, a base film for forming a fine pattern and a resin film with a supporting member are provided. A liquid resin material is applied onto a supporting member to form a resin coating film (S1), and a temperature of the resin coating film is increased to a temperature at which the resin material cures, to form a baked resin film (S2). Thereafter, a base film formed by the baked resin film attached to the supporting member is processed by irradiating with lasers, to form a resin film (1b) having a desired fine pattern and the supporting member (S3). Thereafter, the baked resin film on which the fine pattern is formed is peeled from the supporting member, and the resin film having the fine pattern is obtained (S5).

Abstract: A cleaning device is provided with a three-dimensional circulation route for circulating workpiece holding tools that hold a workpiece, and this three-dimensional circulation route is formed by an endless conveyor chain bendable in various directions being disposed within a rectangular parallelepiped space following along the upper and lower sides thereof. The conveyor chain circulates from an upper side horizontal transport path portion via a falling side transport path portion, a lower side horizontal transport path portion, and a rising side transport path portion, and the workpiece held in the workpiece holding tools is treated by ultrasonic cleaning, shower cleaning, steam cleaning, drying and the like. Thus, it is possible to suitably dispose a workpiece transport route in a limited rectangular parallelepiped space, and carry out cleaning operations for the workpiece efficiently.

Abstract: A rotating drum of a rotating drum-type workpiece cleaning device is provided with feed fins that extend helically along the inner circumferential surface of the drum body. The feed fins are, for example, fins in which metal sheets have been folded. On both sides of the feed fins, the angle of the internal corner between the feed fin and the inner circumferential surface of the drum body is an obtuse angle, for example, about 120 degrees. It is possible to prevent or limit the trapping of conveyed workpiece in the internal corner and trapping between adjacent fin sections.

Abstract: A deposition mask in which a resin film can be completely removed in opening portions, a method of manufacturing the deposition mask, and a mask member for the deposition mask are provided. A light irradiation source for laser light is disposed on one side of a resin film (11) and emits the laser light for forming a pattern of opening portions. A reflective film (30) is provided on another side of the resin film (11) and reflects light having a wavelength of the laser light emitted from the light irradiation source for the laser light. The laser light reflected by the reflective film (30) is used to form the patterns of the opening portion (11a) in the resin film (11).

Abstract: A method for producing a resin film by using a resin material and accurately forming a fine pattern as a vapor deposition mask or an optical element, a method for producing an organic EL display device, a base film for forming a fine pattern and a resin film with a supporting member are provided. A liquid resin material is applied onto a supporting member to form a resin coating film (S1), and a temperature of the resin coating film is increased to a temperature at which the resin material cures, to form a baked resin film (S2). Thereafter, a base film formed by the baked resin film attached to the supporting member is processed by irradiating with lasers, to form a resin film (1b) having a desired fine pattern and the supporting member (S3). Thereafter, the baked resin film on which the fine pattern is formed is peeled from the supporting member, and the resin film having the fine pattern is obtained (S5).

Abstract: A method for manufacturing a vapor deposition mask including a resin layer, and a magnetic metal layer formed on the resin layer, the method including the steps of: providing a substrate; forming a resin layer by applying a solution including a resin material or a precursor solution of a resin material on a surface of the substrate, and then performing a heat treatment thereon; forming a magnetic metal layer on the resin layer, mask portion including a solid portion where a metal film is present and a hollow portion where the metal film is absent; forming a plurality of openings in a region of the resin layer that is located in the hollow portion of the mask portion; and removing the resin layer from the substrate after forming a plurality of openings in a region of the resin layer.

Abstract: A rotating drum of a rotating drum-type workpiece cleaning device is provided with feed fins that extend helically along the inner circumferential surface of the drum body. The feed fins are, for example, fins in which metal sheets have been folded. On both sides of the feed fins, the angle of the internal corner between the feed fin and the inner circumferential surface of the drum body is an obtuse angle, for example, about 120 degrees. It is possible to prevent or limit the trapping of conveyed workpiece in the internal corner and trapping between adjacent fin sections.

Abstract: A cleaning device is provided with a three-dimensional circulation route for circulating workpiece holding tools that hold a workpiece, and this three-dimensional circulation route is formed by an endless conveyor chain bendable in various directions being disposed within a rectangular parallelepiped space following along the upper and lower sides thereof. The conveyor chain circulates from an upper side horizontal transport path portion via a falling side transport path portion, a lower side horizontal transport path portion, and a rising side transport path portion, and the workpiece held in the workpiece holding tools is treated by ultrasonic cleaning, shower cleaning, steam cleaning, drying and the like. Thus, it is possible to suitably dispose a workpiece transport route in a limited rectangular parallelepiped space, and carry out cleaning operations for the workpiece efficiently.

Abstract: In a rotating drum (4) of a rotating drum type workpiece washing apparatus (1), a first cylindrical body section (21), in which a liquid impassable part (21a) that follows the circumferential orientation and does not allow a washing solution to pass and a liquid passing part (21b) that allows the washing solution to pass are formed, is provided. With the rotation of a rotating drum (4), workpiece (w) is transported in the direction of the line of the central axis along the inner circumferential surface part on the lower side inside the rotating drum by spiral workpiece transport fins (8) formed along the inner circumferential surface inside the rotating drum. During transport with the rotation of the rotating drum (4), the washing configuration for the workpiece is switched from immersion washing to flowing water washing and shower washing in that order.

Abstract: [Object]To provide a substrate processing method capable of forming a concavo-convex structure on a substrate surface while reducing the number of processes. [Solving Means] In a substrate processing method according to the present invention, particles are dispersed on a surface of a substrate, and a concavo-convex structure is formed on the surface of the substrate by etching the surface of the substrate with the particles as a mask and the mask is simultaneously removed by the etching. According to this method, a process of removing the mask from the substrate surface after the concavo-convex structure is formed becomes unnecessary. Accordingly, since the number of processes necessary to form the concavo-convex structure on the substrate surface is largely reduced, it becomes possible to greatly improve productivity.

Abstract: A printing apparatus free from contamination of dust into a coated layer is provided. A printing apparatus of this application includes a first ejecting head and a printing head. The first ejecting head is located on a leading side in a moving direction D of the printing head. Since electric charge is removed from an object to be printed and dust is removed therefrom, by blowing an electric charge-removing gas through the first ejecting head before an ink lands on the object to be printed, dust does not contaminate a coated layer. In addition, since a suction hole is arranged between an ejecting hole and a nozzle zone, a stream of the electric charge-removing gas is not formed in the nozzle zone, and thus a meniscus of nozzles is not disturbed.

Abstract: A transparent electroconductive film having a small resistance value and a high transmittance and causing no damage upon an underlying organic EL film is formed. First and second targets are spaced and arranged in parallel, and a shielding plate is provided between the space and a transporting path for an object to be film-formed. Sputtered particles are allowed to reach the object through a release hole formed at the shielding plate. The sputtering particles obliquely irradiated are shielded by the shielding plate so that the transparent electroconductive film having a low resistivity and high transmittance can be formed.

Abstract: To the surface of a base material, there is applied, a dispersion containing fine particles of at least one metal selected from the group consisting of indium, tin, antimony, aluminum and zinc, fine particles of at least one alloy consisting of at least two metals specified above or a mixture of these fine particles, the coated layer is then fired in a vacuum atmosphere, an inert gas atmosphere, a reducing atmosphere; and subsequently the layer is fired in an oxidizing atmosphere. After this firing step in an oxidizing atmosphere, the coated layer may further be fired in a reducing atmosphere. The inert gas atmosphere is one comprising at least one inert gas selected from the group consisting of rare gases, carbon dioxide and nitrogen and the reducing atmosphere is one comprising at least one reducing gas selected from the group consisting of hydrogen, carbon monoxide and lower alcohols. A transparent electrode is composed of a transparent conductive film prepared according to the foregoing method.

Abstract: A concentrated constant type isolator includes an upper member, a lower member, a resin case, a center electrode assembly, a permanent magnet, a resistor element, matching capacitor elements, and a resin member. By setting the electrostatic capacitance value of the matching capacitor element on the input terminal side and that on the output terminal side to appropriate values, the reflection loss characteristic of the concentrated constant type isolator is set such that the center frequency in a pass band is located between the frequency at which the input-side reflection loss becomes a maximum value and the frequency at which the output-side reflection loss becomes a maximum value, and such that the frequency at which insertion loss becomes the minimum value is close to the center frequency, whereby the standard of the insertion loss is satisfied.

Abstract: A radio communication apparatus has a switch for indicating occurrence of emergency, a speaker, a speaker driver for emitting an alarm sound by driving said speaker in response to the operation of the switch, and a transmitter for transmitting a predetermined alarm signal by radio. When an emergency condition occurs to an owner of the radio communication apparatus, the radio communication apparatus emits an alarm sound from the speaker and emits an alarm signal by radio in response to a switching operation. Therefore, a person a short-distance away will be informed of an emergency by sound, and a person a long-distance away will be received by using a radio.