Abstract: A measurement apparatus and a measurement method capable of speedily and accurately measuring an edge shape are provided. A measurement apparatus according to an aspect of the present disclosure includes an objective lens positioned so that its focal plane cuts across an edge part of a substrate, a detector including a plurality of pixels and configured to detect a reflected light from the edge part of the substrate through a confocal optical system, an optical head in which the objective lens and the detector are disposed, a moving mechanism configured to change a relative position of the optical head with respect to the substrate so that an inclination of the focal plane with respect to the substrate is changed, and a processing unit configured to measure a shape of the edge part.

Abstract: Various implementations include a ring material used for producing a ring molded article. The ring molded article has two convex portions which respectively protrude on opposite sides of the ring molded article in a direction of a center axis thereof and extend in a direction of a circumference of the ring molded article. A straight line passing through centers of gravity of first and second side regions is inclined by an angle relative to the center axis of the ring material, the first and second side regions are obtained by virtually dividing a one half section of the ring material based on a middle of a maximum height of the ring material in the direction of the center axis of the ring material, and a range of the angle is 7 degrees to 40 degrees.

Abstract: Various implementations include a ring material used for producing a ring molded article. The ring molded article has two convex portions which respectively protrude on opposite sides of the ring molded article in a direction of a center axis thereof and extend in a direction of a circumference of the ring molded article. A straight line passing through centers of gravity of first and second side regions is inclined by an angle relative to the center axis of the ring material, the first and second side regions are obtained by virtually dividing a one half section of the ring material based on a middle of a maximum height of the ring material in the direction of the center axis of the ring material, and a range of the angle is 7 degrees to 40 degrees.

Abstract: A measurement apparatus and a measurement method capable of speedily and accurately measuring an edge shape are provided. A measurement apparatus according to an aspect of the present disclosure includes an objective lens positioned so that its focal plane cuts across an edge part of a substrate, a detector including a plurality of pixels and configured to detect a reflected light from the edge part of the substrate through a confocal optical system, an optical head in which the objective lens and the detector are disposed, a moving mechanism configured to change a relative position of the optical head with respect to the substrate so that an inclination of the focal plane with respect to the substrate is changed, and a processing unit configured to measure a shape of the edge part.

Abstract: Various implementations include a method of manufacturing a ring molded article. The ring molded article has two convex portions which respectively protrude on both sides of the ring molded article in a direction of a center axis thereof and extend in a direction of a circumference of the ring molded article. The ring material is placed inside two molds on which concave portions respectively corresponding to the convex portions are formed. The ring material is supported by a region on an outer peripheral side from an outer peripheral side corner in the concave portion of one of the two molds and a region on an inner peripheral side from an inner peripheral side corner in the concave portion of another of the two molds. The ring material is then forged so as to be pressed by the two molds in a direction of a center axis of the ring material.

Abstract: A ring molded article manufacturing method capable of reliably and efficiently producing a ring molded article in which dead metal regions are reduced, and a ring material used for producing the ring molded article, are provided. The present invention relates to the method for manufacturing a ring molded article having two convex portions which respectively protrude on both sides of the ring molded article in a direction of a center axis thereof and extend in a direction of a circumference of the ring molded article.

Abstract: A method of manufacturing an annular material includes: a forging process of making a discoid forged material by forging an alloy material; and a ring rolling process of making an annular material by performing ring rolling on an annular intermediate made by forming a through-hole in the forged material. In the forging process, hot forging which achieves an absolute value ??1 of a strain in a circumferential direction of the forged material that is greater than or equal to 0.3, an absolute value ?h of a strain in a height direction of the forged material that is greater than or equal to 0.3, and a ratio ?h/??1 between the absolute values of the strains that is in a range of 0.4 to 2.5 is performed at least two or more times.

Abstract: Provided is a phase shift amount measuring apparatus and method capable of measuring a phase shift amount and a transmittance of a phase shift mask in one measurement step by using a miniaturized monitor pattern. The phase shift amount and transmittance of the monitor pattern are simultaneously measured using a shearing interferometer. The phase shift amount is obtained from a phase difference of interference light between light passing through the monitor pattern and light passing through a non-pattern area. The transmittance of the monitor pattern is obtained using an amplitude of interference light between light passing through the monitor pattern and light passing through the non-pattern area and an amplitude of interference light between light beams passing through the non-pattern area. The use of common interference images in measuring the phase shift amount and transmittance enables measurement of both the phase shift amount and the transmittance in one measurement operation.

Abstract: Provided is a phase shift amount measuring apparatus and method capable of measuring a phase shift amount and a transmittance of a phase shift mask in one measurement step by using a miniaturized monitor pattern. The phase shift amount and transmittance of the monitor pattern are simultaneously measured using a shearing interferometer. The phase shift amount is obtained from a phase difference of interference light between light passing through the monitor pattern and light passing through a non-pattern area. The transmittance of the monitor pattern is obtained using an amplitude of interference light between light passing through the monitor pattern and light passing through the non-pattern area and an amplitude of interference light between light beams passing through the non-pattern area. The use of common interference images in measuring the phase shift amount and transmittance enables measurement of both the phase shift amount and the transmittance in one measurement operation.

Abstract: A method of manufacturing a composite contact in which a flange section with a large diameter at an end of a base part with a small diameter, the composite contact having: a contact section which is made from silver alloy into an upper-surface part of the flange section; and a leg section which is made from copper alloy by forming a large-diameter part so as to form a lower-surface part of the flange section is made integrally with the base part, having the steps of: a primary-forming process forging a copper-alloy wire and a silver-alloy wire having a smaller diameter than that of the copper-alloy wire in a hole of a forming die in a state of being butted to each other so as to form a primary-formed body including a silver-alloy part and a copper-alloy part so that the wires are bonded with each other.

Abstract: A method of manufacturing an annular material includes: a forging process of making a discoid forged material by forging an alloy material; and a ring rolling process of making an annular material by performing ring rolling on an annular intermediate made by forming a through-hole in the forged material. In the forging process, hot forging which achieves an absolute value ??1 of a strain in a circumferential direction of the forged material that is greater than or equal to 0.3, an absolute value ?h of a strain in a height direction of the forged material that is greater than or equal to 0.3, and a ratio ?h/??1 between the absolute values of the strains that is in a range of 0.4 to 2.5 is performed at least two or more times.

Abstract: This ring rolling mill includes a main roll and a mandrel that are brought close to or separated from each other, and roll a peripheral portion of a ring-shaped body in a radial direction of the ring-shaped body while the ring-shaped body is rotated along its peripheral direction in a state where the peripheral portion of the ring-shaped body is pinched in the radial direction between an outer peripheral surface of the main roll, and an outer peripheral surface of the mandrel. This ring rolling mill further includes a mechanism which inclines and supports the mandrel with respect to the rotation axis of the main roll such that the gap between the outer peripheral surface of the mandrel and the outer peripheral surface of the main roll differs on one side and on the other side as seen in a direction along the rotation axis of the main roll.

Abstract: This ring rolling mill includes a main roll and a mandrel provided so as to be capable of being brought close to or separated from each other, and rolling a peripheral portion of a ring-shaped body in a radial direction of the ring-shaped body while the ring-shaped body is rotated along its peripheral direction in a state where the peripheral portion of the ring-shaped body is pinched in the radial direction between an outer peripheral surface of the main roll which is rotationally driven, and an outer peripheral surface of the mandrel which is rotatable. This ring rolling mill further includes a mandrel inclining/supporting mechanism which inclines and supports the mandrel with respect to the axis of rotation of the main roll such that the gap between the outer peripheral surface of the mandrel and the outer peripheral surface of the main roll differs on one side and on the other side as seen in a direction along the axis of rotation of the main roll.

Abstract: This ring rolling mill includes a main roll and a mandrel provided so as to be capable of being brought close to or separated from each other, and rolling a peripheral portion of a ring-shaped body in a radial direction of the ring-shaped body while the ring-shaped body is rotated along its peripheral direction in a state where the peripheral portion of the ring-shaped body is pinched in the radial direction between an outer peripheral surface of the main roll which is rotationally driven, and an outer peripheral surface of the mandrel which is rotatable. This ring rolling mill further includes a mandrel inclining/supporting mechanism which inclines and supports the mandrel with respect to the axis of rotation of the main roll such that the gap between the outer peripheral surface of the mandrel and the outer peripheral surface of the main roll differs on one side and on the other side as seen in a direction along the axis of rotation of the main roll.

Abstract: A focus control method able to further correctly control a focal point of an optical system or optical apparatus. A reference system of the system as a whole is set by using a reference pattern for focal point control. A focal point of an optical apparatus for inspecting a sample or measuring a physical quantity of the sample and the focal point of an auto-focus mechanism are matched with the reference system. Then, a displaced object of the auto-focus mechanism is set on a sample surface, a displacement amount of the sample surface from a reference point is measured, and the focal point of an object lens of the optical apparatus is controlled by using the displaced point as an operation point of the control of the auto-focus mechanism. When setting the reference system, the focus is judged by utilizing the Becke effect for the reference pattern.

Abstract: A phase shift amount measurement apparatus able to further correctly measure a phase shift amount of a phase shifter, wherein a laterally offset interference image of a phase shift mask is formed by a shearing interferometer, the interference image is captured by a two-dimensional imaging device, an output signal output from each light receiving element of the two-dimensional imaging device is supplied to a signal processing device, the phase shift amount is calculated for each light receiving element, the light receiving area of the light receiving element is very small, therefore the phase shift amount of any light receiving element outputting a peculiar phase amount due to incidence of diffraction light or multi-reflection light is excluded and the phase shift amount is determined based on the phase shift amount found from output signals of the remaining light receiving elements.

Abstract: A phase shift amount measurement apparatus able to further correctly measure a phase shift amount of a phase shifter, wherein a laterally offset interference image of a phase shift mask is formed by a shearing interferometer, the interference image is captured by a two-dimensional imaging device, an output signal output from each light receiving element of the two-dimensional imaging device is supplied to a signal processing device, the phase shift amount is calculated for each light receiving element, the light receiving area of the light receiving element is very small, therefore the phase shift amount of any light receiving element outputting a peculiar phase amount due to incidence of diffraction light or multi-reflection light is excluded and the phase shift amount is determined based on the phase shift amount found from output signals of the remaining light receiving elements.

Abstract: A focus control method able to further correctly control a focal point of an optical system or optical apparatus. A reference system of the system as a whole is set by using a reference pattern for focal point control. A focal point of an optical apparatus for inspecting a sample or measuring a physical quantity of the sample and the focal point of an auto-focus mechanism are matched with the reference system. Then, a displaced object of the auto-focus mechanism is set on a sample surface, a displacement amount of the sample surface from a reference point is measured, and the focal point of an object lens of the optical apparatus is controlled by using the displaced point as an operation point of the control of the auto-focus mechanism. When setting the reference system, the focus is judged by utilizing the Becke effect for the reference pattern.

Abstract: A method of manufacturing an anode copper ball for plating by forging in an oilless state, and to minimize flat portions existing on the surface of the ball to improve the rolling property of the ball. Manufacturing an anode copper ball for plating which forms a ball by subjecting a copper rod to cold multi-stage forging by a metal mold composed of a plurality of sets of dies and punches. The method includes a first forging step of forging the copper rod in a direction of its axis without being brought into pressure contact with an inner wall surface of the die, to thereby form a first intermediate material in which outer peripheral portions of end faces of the copper rod are pressed and formed as tapered faces. The first intermediate material is formed in the shape of a ball through the first forging step.

Abstract: Elongation in the circumferential direction of a rotary formed body is produced only within a model zone, and the approximate toric plate shape is maintained as the overall shape of the body, and the rotation axis of the body is positioned on a straight line connecting axes of rotation of a main roll and a mandrel roll. Moreover, the velocity of each nodal point and on imaginary cutting planes, that is a velocity boundary condition is expressed by a linear combination of coefficients comprising a radius of the imaginary cutting planes, and angles made by the imaginary cutting planes, with respect to three variables comprising an increasing rate of the radius of the body, an angular velocity for rotation about the rotation axis of the body, and a correction value for the traverse velocity of the rotation axis of the body.