Abstract: In an insulating cover 50A according to the present invention, a dimension of each of an outer-circumferential-side cylindrical part 50c and an inner-circumferential-side cylindrical part 50b fitting in step parts 40 and 41 in an axial direction of a fastener body 25 is set large with respect to a tip covering part 50a covering a tip surface 26a of a fastening member 26. As a result, on an outer circumferential side and an inner circumferential side of the fastening member 26, a distance from a member 22 is sufficiently ensured by the cylindrical part 50b and 50c. The tip covering part 50a is thinner than the cylindrical part 50B and 50c. Therefore, when the fastener body 25 and the fastening member 26 are fastened together, the amount of deformation of the tip covering part 50a in a thickness direction can be made small.

Abstract: Provided is a coupling structure for airframe components that is capable of ensuring sufficient lightning protection capability. A conductive pattern part 40 made of a conductive material is formed around each fastener member 24 between wing surface panels 21A and 21B. The conductive pattern part 40 is formed, for example, around each of holes 21c and 21d on the plane on which the wing surface panel 21A and the wing surface panel 21B abut against each other. Then, the conductive pattern part 40 is pushed against both the wing surface panel 21A and the wing surface panel 21B by the fastening power of the fastener members 24, whereby electrical conduction between the wing surface panel 21A and the wing surface panel 21B can be achieved.

Abstract: A long-life lightning protection fastener or the like to prevent explosion for aircrafts at low cost is provided, the fastener having a light weight, ensuring sufficient lightning protection, and having extremely less failures and high reliability. A ring-shaped ring member 40A made of resin is mounted on a collar 26. This ring member 40A is interposed between a member 22 and the collar 26 and is in intimate contact with both of the member 22 and the collar 26, thereby sealing an interface with the member 22 for sealing and preventing the occurrence of an arc at an outer perimeter edge of the collar 26.

Abstract: An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe having a gas flow path to supply a medium gas and an insulating member screwed into an end portion of the gas supply pipe to be flush therewith and having a gas outlet communicated with the gas flow path.

Abstract: An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe (101) having a gas flow path (101a) to supply a medium gas (G) and an insulating member (103) screwed into an end portion of the gas supply pipe (101) to be flush therewith and having a gas outlet (102) communicated with the gas flow path (101a).

Abstract: Provided is a lightning-protection fastener that is capable of reliably preventing peeling off of an insulation layer during the operation of an aircraft and of improving the anti-lightning-strike capability and reliability. There is a lightning-protection fastener that fastens a skin of an aircraft and a structural member positioned inside the skin, in which an insulation layer is melt adhered so as to cover one end surface of a head portion and also to mechanically engage with a fastener-side engagement portion (engagement portion) formed on the end surface.

Abstract: An optical system includes a fluoride compound and has surfaces facing and exposed to plasma installed in an optical equipment which has an inner zone where the plasma exists. A 2 nm-20 nm protective film of a highly plasma-resistant material is formed on the surface of the fluoride compound that is exposed to the plasma.

Abstract: An optical system has fluoride compounds provided in an environment exposed by vacuum ultraviolet light or plasma light, which has higher photon energy than an absorption wavelength of a base stock of the optical system. 1-layer of a protective film of SiO2 or metal oxides having a film thickness of 2-20 nm is formed at least on the light irradiation side (inner side) of the optical system to prevent the stripping of the fluorine atoms from the surface of the optical system. In addition, the protective film is a 1-layer film selected from one of SiO2, MgO, TiO2, or ZrO2.

Abstract: A barrier-film forming apparatus that forms a barrier film on an inner face of a container (12) having a concave or convex portion (12a) as a processing target, including: a dielectric member (50) having a cavity sized to enclose the container (12), an external electrode (13) covering an outer circumference of the dielectric member (50), an exhaust unit installed on an end face of the external electrode (13) on a side where a mouth (11) of the container (12) is located, with an insulating member (26) interposed therebetween, and depressurizing inside of the container (12) through an exhaust pipe (14), an internal electrode (17) inserted from a side of the exhaust pipe (14) and also serving as a gas blowout unit that blows out medium gas (19) for generating a barrier film into the container (12), and an electric-field applying unit that applies an electric field for generating exhaust between the external electrode (13) and a ground electrode.

Abstract: An electrode and a vacuum processing apparatus are provided that are capable of improving the film deposition rate and the uniformity of the distribution of the deposited film. The electrode includes a plurality of electrodes (17A, 17B) extending from positions arranged at a predetermined interval along a surface of a substrate to be processed (3). Buffer chambers (25) each extend along and between two of the plurality of electrodes (17A, 17B). A plurality of first gas injection holes (27) are arranged in the direction in which the electrodes (17A, 17B) extend and which supply a reactant gas into the buffer chamber (25). A second gas injection hole (23) has a slit form extending in the direction in which the electrodes (17A, 17B) extend, and which supplies the reactant gas from the buffer chamber (25) toward the substrate to be processed (3).

Abstract: The present invention realizes an impedance control for avoiding the extinction of a plasma caused due to a sudden change in a load impedance, which may occur immediately after the plasma is generated. A film-forming apparatus of the present invention includes a power supply; a matching circuit; an electrode configured to receive electric power from the power supply through the matching circuit, and to generate a plasma inside a film forming chamber for accommodating a film forming target based on the electric power; and a control section configured to control an impedance of the matching circuit. The control section keeps the impedance of the matching circuit constant during a first period starting at a first time t1 when the power supply starts to supply the electric power to the electrode, and controls the impedance of the matching circuit based on a reflected-wave power from the electrode for a second period starting at a second time t2 when the first period ends.

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH ions, ozone, O2 ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: An optical properties restoration apparatus improves reliability and longevity of optical properties of an optical system, lying upon a vacuum boundary, by preventing, suppressing, or improving degradation of optical properties. The apparatus includes creating the near vacuum zone to excite an oxidation reaction of carbon, generating a flow of an oxygen atom-containing gas such as water gas or oxide gas in the near vacuum zone, and supplying active energy in the near vacuum zone to cause a carbon oxidation reaction between the oxygen atom-containing gas and the carbon. The near vacuum zone faces the lighting surfaces of the optical system and a lower limit value for a partial pressure of the gases containing oxygen atoms that is supplied to the near vacuum zone is set to a level over a speed of the carbon buildup that deposits on the lighting surfaces of the optical system.

Abstract: An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe (101) having a gas flow path (101a) to supply a medium gas (G) and an insulating member (103) screwed into an end portion of the gas supply pipe (101) to be flush therewith and having a gas outlet (102) communicated with the gas flow path (101a).

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH ions, ozone, O2-ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH.ions, ozone, O2.ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH? ions, ozone, O2? ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH— ions, ozone, O2— ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH? ions, ozone, O2? ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals.

Abstract: A vacuum ultraviolet lamp ionizes a chemical substance contained in exhaust gas Gs. The chemical substance ionized is trapped in an ion trapping apparatus in which a radio frequency electric field is formed. Energy is applied to an ion group in the ion trapping apparatus with a SWIFT waveform comprising a frequency component excluding a frequency corresponding to an orbital resonance frequency of ions of the chemical substance to remove an impurity. Energy is then applied to the ion group with a TICKLE waveform having a frequency component corresponding to the orbital resonance frequency of the ions of the chemical substance to fragmentate the ions of the chemical substance. A mass of the fragment is then measured with a mass spectrometer to identify the chemical substance.