Patents by Inventor Hideoki Mitsui

Hideoki Mitsui has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photomask blank, photomask, and pattern transfer method using photomask
    Publication number: 20060057469
    Abstract: A low reflective photomask blank suitable for shortened exposure wavelengths is disclosed. A photomask blank (1) having a single-layer or multilayer light-shielding film (3) arranged on a translucent substrate (2) and mainly containing a metal is characterized by comprising an antireflective film (6), which at least contains silicon and oxygen and/or nitrogen, on the light-shielding film (3).
    Type: Application
    Filed: February 2, 2004
    Publication date: March 16, 2006
    Inventors: Mitsuhiro Kureishi, Hideoki Mitsui