Patents by Inventor Hideshi Kadooka

Hideshi Kadooka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion source and method of drawing out ion beam
    Patent number: 4870284
    Abstract: An ion source including a plasma chamber for generating a plasma therein, at least three parallel electrodes for drawing out an ion beam from the plasma chamber, the first and second power sources for generating high and low drawing voltages, respectively, is disclosed in which the first power source is connected between the first pair of adjacent electrodes spaced apart from each other a relatively long distance to perform a high voltage operation, the second power source is connected between a second pair of adjacent electrodes spaced apart from each other a relatively short distance to perform a low voltage operation, and one of the high voltage operation and low voltage operation is changed over to the other with the aid of switching elements.
    Type: Grant
    Filed: November 16, 1988
    Date of Patent: September 26, 1989
    Assignee: Hitachi, Ltd.
    Inventors: Isao Hashimoto, Hideshi Kadooka