Abstract: A sample is analyzed by irradiating it with a charged-particle beam and detecting characteristic X-rays. The surface of the sample is magnified and displayed on a CRT, and analytical areas, analytical positions and a travel path for the charged-particle beam are designated on the image displayed by the CRT. The travel path of the charged-particle beam is designated by an operator via an input unit while the operator observes the image on the CRT. It is also possible to compute and designate the travel path by an arithmetic unit based on positional coordinate data indicative of the analytical areas, analytical positions and non-irradiated areas without requiring an operation by the operator.

Abstract: A method and apparatus for background correction of the measured data in analysis of a specimen surface by scanning the surface with an electron beam, wherein a signal occurring from an element to be analyzed contained in the specimen is detected to obtain a two-dimensional distribution data of the level of the signal in a predetermined area of the specimen surface; a specimen current induced in the specimen by the scanning is detected to obtain a two-dimensional distribution data of the specimen current in the predetermined specimen surface area; a relation between the background intensity and specimen current of the specimen is calculated from the background intensity and specimen current measured on at least two points in the specimen surface area; a two-dimensional distribution data of the background intensity is calculated from the two-dimensional distribution data of the specimen current by using the calculated relation; and the calculated two-dimensional distribution data of the background intensity is