Patents by Inventor Hidetoshi Horibe
Hidetoshi Horibe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10566227Abstract: A controlling method for a wafer transportation part and a load port part on an EFEM includes a fixing step of fixing a container on an installation stand of the load port part, a first cleaning step of connecting a bottom nozzle of the load port part to multiple bottom holes formed on a bottom surface of the container and introducing a cleaning gas into the container and discharging a gas from the container via the nozzle, a connection step of connecting the container and the transportation room, and a wafer transportation step of transporting the wafer from the container to a processing room via the opening and the transportation room and transporting the wafer from the processing room to the container via the transportation room and the opening.Type: GrantFiled: December 8, 2016Date of Patent: February 18, 2020Assignee: TDK CORPORATIONInventors: Tsutomu Okabe, Hidetoshi Horibe
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Patent number: 10340157Abstract: A mini-environment apparatus includes a wafer transportation machine transporting a wafer, a wafer transportation room having the machine and passed by the wafer transported to a processing room, a circulating passage where a gas detoured from the transportation room flows, a blowing means forming a circulating current falling in the transportation room and rising in the passage, a current member arranged in a ceiling part of the transportation room and laminarizing the current and introducing this laminarized current into the transportation room, a particle removal filter arranged in either the ceiling part of the transportation room or the passage, and a chemical filter arranged in the passage detachably and separately from the removal filter. The chemical filter is arranged at a position lower than a lowest position where the wafer may pass through in the transportation room.Type: GrantFiled: December 13, 2016Date of Patent: July 2, 2019Assignee: TDK CORPORATIONInventors: Tsutomu Okabe, Hidetoshi Horibe
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Patent number: 10304702Abstract: An EFEM includes a wafer transportation part having a wafer transportation room passed by a wafer transported to a processing room and a load port part airtightly connecting a main opening formed on a container housing the wafer to the room. The transportation part includes a downward current forming device for forming a downward current in the room and a current plate arranged in the room and partly introducing the current into the container connected to the room via the opening. The load port part includes an installation stand for installing the container, a bottom nozzle for communicating with a bottom hole formed at a position distant from the opening more than a bottom surface middle on a bottom surface of the container, and a gas discharge passage for discharging a gas in the container to an outside thereof via the nozzle.Type: GrantFiled: December 8, 2016Date of Patent: May 28, 2019Assignee: TDK CORPORATIONInventors: Tsutomu Okabe, Hidetoshi Horibe
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Publication number: 20170170044Abstract: A controlling method for a wafer transportation part and a load port part on an EFEM includes a fixing step of fixing a container on an installation stand of the load port part, a first cleaning step of connecting a bottom nozzle of the load port part to multiple bottom holes formed on a bottom surface of the container and introducing a cleaning gas into the container and discharging a gas from the container via the nozzle, a connection step of connecting the container and the transportation room, and a wafer transportation step of transporting the wafer from the container to a processing room via the opening and the transportation room and transporting the wafer from the processing room to the container via the transportation room and the opening.Type: ApplicationFiled: December 8, 2016Publication date: June 15, 2017Applicant: TDK CORPORATIONInventors: Tsutomu OKABE, Hidetoshi HORIBE
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Publication number: 20170170033Abstract: A mini-environment apparatus includes a wafer transportation machine transporting a wafer, a wafer transportation room having the machine and passed by the wafer transported to a processing room, a circulating passage where a gas detoured from the transportation room flows, a blowing means forming a circulating current falling in the transportation room and rising in the passage, a current member arranged in a ceiling part of the transportation room and laminarizing the current and introducing this laminarized current into the transportation room, a particle removal filter arranged in either the ceiling part of the transportation room or the passage, and a chemical filter arranged in the passage detachably and separately from the removal filter. The chemical filter is arranged at a position lower than a lowest position where the wafer may pass through in the transportation room.Type: ApplicationFiled: December 13, 2016Publication date: June 15, 2017Applicant: TDK CORPORATIONInventors: Tsutomu OKABE, Hidetoshi HORIBE
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Publication number: 20170170042Abstract: An EFEM includes a wafer transportation part having a wafer transportation room passed by a wafer transported to a processing room and a load port part airtightly connecting a main opening formed on a container housing the wafer to the room. The transportation part includes a downward current forming device for forming a downward current in the room and a current plate arranged in the room and partly introducing the current into the container connected to the room via the opening. The load port part includes an installation stand for installing the container, a bottom nozzle for communicating with a bottom hole formed at a position distant from the opening more than a bottom surface middle on a bottom surface of the container, and a gas discharge passage for discharging a gas in the container to an outside thereof via the nozzle.Type: ApplicationFiled: December 8, 2016Publication date: June 15, 2017Applicant: TDK CORPORATIONInventors: Tsutomu OKABE, Hidetoshi HORIBE
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Patent number: 7927058Abstract: The invention is directed to a pod clamping unit for fixing a pod to a support table in a load port, the pod including a pod body capable of storing a wafer in the interior thereof and a lid, the load port having a pod opener that opens/closes the lid. The pod clamping unit includes a clamp portion that is provided on the support table and adapted to engage with a first engagement portion provided on a lower surface of the pod body to restrict upward movement of the pod relative to the support table, a restriction pin that is movable upwardly and downwardly relative to the support table and adapted to engage with a second engagement portion provided on the lower surface of the pod body to restrict movement of the pod in a disengaging direction that causes disengagement between the first engagement portion and the clamp portion, and a vertically driving portion that moves the restriction pin up to/down from the second engagement portion.Type: GrantFiled: March 27, 2007Date of Patent: April 19, 2011Assignee: TDK CorporationInventors: Toshihiko Miyajima, Jun Emoto, Hidetoshi Horibe
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Publication number: 20070231112Abstract: The invention is directed to a pod cramping unit for fixing a pod to a support table in a load port, the pod including a pod body capable of storing a wafer in the interior thereof and having an opening through which the wafer is to be taken out of/brought into the interior and a lid attached to the pod body to close/open the opening, the load port having a pod opener that opens/closes the lid to allow to bring the wafer out of/into the interior of the pod.Type: ApplicationFiled: March 27, 2007Publication date: October 4, 2007Applicant: TDK CORPORATIONInventors: Toshihiko Miyajima, Jun Emoto, Hidetoshi Horibe
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Patent number: 6583164Abstract: The composition of the present invention comprises a quaternized nitrogen-containing imidazole-1-yl or 1,2,4-triazole-1-yl compound wherein one of the nitrogen atoms constituting the azole ring is quaternized with a group eliminating in vivo and represented by the formula: wherein R1 represents a hydrocarbon or heterocyclic group which may be substituted, R2 represents a hydrogen atom or a lower alkyl group, and n is 0 or 1, and a saccharide, said compound being capable of being converted into an anti-fungal azole compound upon elimination of said group in vivo. The composition of the present invention is stable and usable particularly as a pharmaceutical preparation for an injection composition.Type: GrantFiled: March 19, 2001Date of Patent: June 24, 2003Assignee: Takeda Chemical Industries, Ltd.Inventors: Hidetoshi Horibe, Yoko Nishida, Masao Nagao
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Patent number: 5593690Abstract: There is provided a matrix preparation produced by dispersing a pharmaceutically active ingredient into a matrix which is solid at ambient temperature and comprised of a fatty acid ester of a polyglycerol. The preparation has stable release-controlling ability, can be processed to fine granules, granules, capsules, tablets etc., and contributes to reduce the administration times of the active ingredient and side effects of the ingredient.Type: GrantFiled: February 14, 1995Date of Patent: January 14, 1997Assignee: Takeda Chemical Industries, Ltd.Inventors: Yohko Akiyama, Hidetoshi Horibe, Minoru Yoshioka
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Patent number: 5443846Abstract: Granulated preparations are provided by causing a granular, preferably spherical polyglycerol fatty acid ester having a melting poing of 40.degree.-80.degree. C. together with a powder for fluidized bed formation and heating the resulting fluidized mixture at a temperature in the vicinity of the melting point of the polyglycerol fatty acid ester. The powder may be contain as least one pharmacologically active ingredient. The polyglycerol fatty acid ester shows no crystal polymorphism and does not inactivate the pharmacologically active ingredient. Furthermore, the dissolution and release of the pharmacologically active ingredient can be controlled by varying the HLB of the polyglycerol fatty acid ester.Type: GrantFiled: March 25, 1994Date of Patent: August 22, 1995Assignee: Takeda Chemical Industries, Ltd.Inventors: Minoru Yoshioka, Hidetoshi Horibe, Toshio Kashihara
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Patent number: 5399357Abstract: There is provided a matrix preparation produced by dispersing a pharmaceutically active ingredient into a matrix which is solid at ambient temperature and comprised of a fatty acid ester of a polyglycerol. The preparation has stable release controlling ability, can be processed to fine granules, granules, capsules, tablets etc., and contributes to reduction of the administration times of the active ingredient and side effects of the ingredient.Type: GrantFiled: December 13, 1991Date of Patent: March 21, 1995Assignee: Takeda Chemical Industries, Ltd.Inventors: Yohko Akiyama, Hidetoshi Horibe, Minoru Yoshioka