Abstract: An apparatus includes a housing in which a band-shaped portion extending over a side surface and a front surface of the apparatus is formed, and a push button disposed within a range of the band-shaped portion on the side surface, the push button protruding from the band-shaped portion in a pressing direction.

Abstract: An apparatus includes: a housing having a placement portion on which a discharge target object discharged from a discharge port is placed, and a standing wall rising from an end portion of the placement portion and having the discharge port formed therein, the housing allowing an operator to access the placement portion from at least a side facing toward a direction of the standing wall; a display unit; and a coupling portion that couples the standing wall and the display unit in a state where a space is provided below the display unit, and enables the display unit to face a front direction of the housing and a side direction of the housing.

Abstract: A position detecting system has a transport device, a light source, at least one optical element, a reflective member, a drive unit, and a controller. The transport device transports and places an object on a placement table. The light source generates measurement light. The optical element projects the measurement light, as projection light, generated by the light source and receives reflected light. The reflective member is disposed on the transport device. The reflective member reflects the projection light toward the placement table, and reflects the reflected light of the projection light, which is projected toward the placement table, toward the optical element. The drive unit operates the transport device so that the reflective member scans a plurality of linear scanning ranges. The controller calculates positional relationship between the focus ring and the object placed on the placement table based on the reflected light within the plurality of linear scanning ranges.

Abstract: A position detecting system has a transport device, a light source, at least one optical element, a reflective member, a drive unit, and a controller. The transport device transports and places an object on a placement table. The light source generates measurement light. The optical element projects the measurement light, as projection light, generated by the light source and receives reflected light. The reflective member is disposed on the transport device. The reflective member reflects the projection light toward the placement table, and reflects the reflected light of the projection light, which is projected toward the placement table, toward the optical element. The drive unit operates the transport device so that the reflective member scans a plurality of linear scanning ranges. The controller calculates positional relationship between the focus ring and the object placed on the placement table based on the reflected light within the plurality of linear scanning ranges.

Abstract: There is provided a method of measuring a temperature of a gas in a line connected to a gas supply source and a decompressor, the line being divided by a first, a second and a third valve into a first line between the first valve and the second valve and a second line between the second valve and the third valve. A first pressure rise rate of a gas in the first line is measured when introducing a gas at a predetermined flow rate into the first and the second line. A second pressure rise rate of a gas in the first line is measured when introducing a gas at a predetermined flow rate only into the first line. A gas temperature in the first line is calculated based on known inner volume of the second line, the first pressure rise rate, and the second pressure rise rate.

Abstract: There is provided a plasma processing apparatus including a susceptor, having a substrate mounting portion for mounting thereon a substrate; a focus ring including an outer ring and an inner ring; a dielectric ring; a dielectric constant varying device for varying a dielectric constant of the dielectric ring; a grounding body positioned at an outside of the dielectric ring with a gap from a bottom surface of the focus ring; and a controller for controlling a top surface electric potential of the focus ring by controlling a current flowing from the susceptor to the substrate.