Patents by Inventor Hidetoshi Morokuma
Hidetoshi Morokuma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9543135Abstract: A mass spectrometer for efficiently ionizing a sample with less carry-over. The ratio of the amount of sample gas to that of a whole headspace gas is increased by decreasing the pressure inside of a sample vessel in which the sample is sealed thereby efficiently ionizing the sample.Type: GrantFiled: July 31, 2012Date of Patent: January 10, 2017Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Shun Kumano, Masuyuki Sugiyama, Yuichiro Hashimoto, Hideki Hasegawa, Masuyoshi Yamada, Kazushige Nishimura, Hidetoshi Morokuma
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Patent number: 9281169Abstract: Provided is a mass spectrometer capable of easy exchange of a measurement sample and suppressing a carryover. The mass spectrometer includes a mass spectrometry section, an ion source the internal pressure of which is reduced by a differential pumping from the mass spectrometry section and the ion source ionizes the sample gas, a sample container in which the sample gas is generated by vaporizing the measurement sample, a thin pipe that introduces the sample gas generated in the sample container into the ion source, an elastic tube of openable and closable that connects the sample container and the thin pipe, a pair of weirs that closes or opens the elastic tube so as to sandwich the elastic tube, and a cartridge that integrates the sample container, the thin pipe, and the elastic tube, and is detachable in a lump from a main body of the mass spectrometer.Type: GrantFiled: March 10, 2015Date of Patent: March 8, 2016Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hidetoshi Morokuma, Koji Ishiguro, Shun Kumano
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Patent number: 9184037Abstract: A mass spectrometer including a sample attaching member of attaching a sample, an ionizing chamber including an introductory port of the sample attaching member and an ionization source of generating a sample ion, a vacuumed chamber having a mass analyzer of analyzing the sample ion, and an opening/closing mechanism provided between the ionizing chamber and the vacuumed chamber, in which the opening/closing mechanism is controlled from a closed state to an open state after introducing the sample attaching member into the ionizing chamber to thereby enable to perform ionization with inconsiderable fragmentation at a high sensitivity with a high throughput.Type: GrantFiled: June 20, 2012Date of Patent: November 10, 2015Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Shun Kumano, Masuyuki Sugiyama, Yuichiro Hashimoto, Hideki Hasegawa, Masuyoshi Yamada, Hidetoshi Morokuma, Shuhei Hashiba
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Patent number: 9171704Abstract: A mass spectrometer of reduced size and weight is provided which is capable to conduct highly accurate mass spectroscopy. The mass spectrometer includes an ion source adapted to ionize gas flowing in from outside in order to ionize a measurement sample and a mass spectroscopy section for separating the ionized measurement sample. The ion source has its interior reduced in pressure by differential pumping from the mass spectroscopy section and ionizes the gas when the interior pressure rises as it inhales the gas, and the mass spectroscopy section separates the ionized measurement sample when its interior pressure falls after inhale of the gas. The mass spectrometer may further include a restriction device for suppressing a flow rate of the gas the ion source inhales and an open/close device for opening and closing a flow of the gas the ion source inhales.Type: GrantFiled: September 19, 2014Date of Patent: October 27, 2015Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hidetoshi Morokuma, Yuichiro Hashimoto, Masuyuki Sugiyama, Masuyoshi Yamada, Hideki Hasegawa
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Patent number: 9105453Abstract: A portable mass spectrometer that is carried to a sampling site to conduct analysis incorporates measures against erroneous operation. To prevent erroneous operation, when a measurement sample cannot be accurately analyzed because of contamination in the measurement sample, a criterion for aborting the sample measurement is provided and mass spectrometer control maintenance is performed. When urine is measured, the mass spectrometer detects the substances contained in the urine and automatically determines whether the sample is urine. The mass spectrometer then automatically selects an analysis condition specific to urine samples to make a measurement. Also with respect to sweat and saliva, the mass spectrometer similarly selects a specific analysis condition.Type: GrantFiled: April 22, 2013Date of Patent: August 11, 2015Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Tsukasa Shishika, Hidetoshi Morokuma, Masuyoshi Yamada, Hiroyuki Inoue
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Publication number: 20150187554Abstract: Provided is a mass spectrometer capable of easy exchange of a measurement sample and suppressing a carryover. The mass spectrometer includes a mass spectrometry section, an ion source the internal pressure of which is reduced by a differential pumping from the mass spectrometry section and the ion source ionizes the sample gas, a sample container in which the sample gas is generated by vaporizing the measurement sample, a thin pipe that introduces the sample gas generated in the sample container into the ion source, an elastic tube of openable and closable that connects the sample container and the thin pipe, a pair of weirs that closes or opens the elastic tube so as to sandwich the elastic tube, and a cartridge that integrates the sample container, the thin pipe, and the elastic tube, and is detachable in a lump from a main body of the mass spectrometer.Type: ApplicationFiled: March 10, 2015Publication date: July 2, 2015Inventors: Hidetoshi MOROKUMA, Koji ISHIGURO, Shun KUMANO
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Publication number: 20150108341Abstract: A portable mass spectrometer that is carried to a sampling site to conduct analysis incorporates measures against erroneous operation. To prevent erroneous operation, when a measurement sample cannot be accurately analyzed because of contamination in the measurement sample, a criterion for aborting the sample measurement is provided and mass spectrometer control maintenance is performed. When urine is measured, the mass spectrometer detects the substances contained in the urine and automatically determines whether the sample is urine. The mass spectrometer then automatically selects an analysis condition specific to urine samples to make a measurement. Also with respect to sweat and saliva, the mass spectrometer similarly selects a specific analysis condition.Type: ApplicationFiled: April 22, 2013Publication date: April 23, 2015Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Tsukasa Shishika, Hidetoshi Morokuma, Masuyoshi Yamada, Hiroyuki Inoue
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Patent number: 9006679Abstract: Provided is a mass spectrometer capable of easy exchange of a measurement sample and suppressing a carryover. The mass spectrometer includes a mass spectrometry section, an ion source the internal pressure of which is reduced by a differential pumping from the mass spectrometry section and the ion source ionizes the sample gas, a sample container in which the sample gas is generated by vaporizing the measurement sample, a thin pipe that introduces the sample gas generated in the sample container into the ion source, an elastic tube of openable and closable that connects the sample container and the thin pipe, a pair of weirs that closes or opens the elastic tube so as to sandwich the elastic tube, and a cartridge that integrates the sample container, the thin pipe, and the elastic tube, and is detachable in a lump from a main body of the mass spectrometer.Type: GrantFiled: June 4, 2013Date of Patent: April 14, 2015Assignee: Hitachi High-Technologies CorporationInventors: Hidetoshi Morokuma, Koji Ishiguro, Shun Kumano
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Publication number: 20150041641Abstract: A mass spectrometer of reduced size and weight is provided which is capable to conduct highly accurate mass spectroscopy. The mass spectrometer includes an ion source adapted to ionize gas flowing in from outside in order to ionize a measurement sample and a mass spectroscopy section for separating the ionized measurement sample. The ion source has its interior reduced in pressure by differential pumping from the mass spectroscopy section and ionizes the gas when the interior pressure rises as it inhales the gas, and the mass spectroscopy section separates the ionized measurement sample when its interior pressure falls after inhale of the gas. The mass spectrometer may further include a restriction device for suppressing a flow rate of the gas the ion source inhales and an open/close device for opening and closing a flow of the gas the ion source inhales.Type: ApplicationFiled: September 19, 2014Publication date: February 12, 2015Inventors: Hidetoshi MOROKUMA, Yuichiro HASHIMOTO, Masuyuki SUGIYAMA, Masuyoshi YAMADA, Hideki HASEGAWA
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Patent number: 8881067Abstract: To enable SEM-based management of a cross-sectional shape or manufacturing process parameters of a semiconductor device pattern to be measured, the association between the shape or parameters and SEM image characteristic quantities effective for estimating the shape or parameters is saved as learning data. The image characteristic quantities are collated with learning data to estimate the shape or to monitor the process parameters. Accuracy and reliability is achievable by calculating three kinds of reliability (reliability of the image characteristic quantities, reliability of estimation engines, and reliability of estimating results) based on the distribution of the image characteristic quantities and then judging whether additional learning is necessary, or selecting and adjusting image characteristic quantities and estimation engine based on the reliability.Type: GrantFiled: January 10, 2013Date of Patent: November 4, 2014Assignee: Hitachi High-Technologies CorporationInventors: Wataru Nagatomo, Atsushi Miyamoto, Hidetoshi Morokuma
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Patent number: 8866070Abstract: A mass spectrometer of reduced size and weight is provided which is capable to conduct highly accurate mass spectroscopy. The mass spectrometer includes an ion source adapted to ionize gas flowing in from outside in order to ionize a measurement sample and a mass spectroscopy section for separating the ionized measurement sample. The ion source has its interior reduced in pressure by differential pumping from the mass spectroscopy section and ionizes the gas when the interior pressure rises as it inhales the gas, and the mass spectroscopy section separates the ionized measurement sample when its interior pressure falls after inhale of the gas. The mass spectrometer may further include a restriction device for suppressing a flow rate of the gas the ion source inhales and an open/close device for opening and closing a flow of the gas the ion source inhales.Type: GrantFiled: November 4, 2011Date of Patent: October 21, 2014Assignee: Hitachi High-Technologies CorporationInventors: Hidetoshi Morokuma, Yuichiro Hashimoto, Masuyuki Sugiyama, Masuyoshi Yamada, Hideki Hasegawa
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Patent number: 8853630Abstract: (1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set arbitrarily, and (3) decision is made of imaging or processing at an arbitrary imaging point as to whether to be successful/unsuccessful and in case a failure is determined, a relief process can be conducted in which the imaging point or imaging sequence is changed.Type: GrantFiled: January 29, 2014Date of Patent: October 7, 2014Assignee: Hitachi High-Technologies CorporationInventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma
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Patent number: 8803084Abstract: A mass spectrometer featured in including an ion source including a first electrode, a second electrode, and a dielectric unit having a sample introducing unit and a sample discharging unit and provided between the first electrode and the second electrode, a power source of ionizing a sample by a discharge generated between the first electrode and the second electrode by applying an alternating current voltage to either one of the first electrode and the second electrode, a mass spectrometry unit of analyzing an ion discharged from the sample discharging unit, and a light irradiating unit of irradiating an area of generating the discharge with light.Type: GrantFiled: December 24, 2012Date of Patent: August 12, 2014Assignee: Hitachi High-Technologies CorporationInventors: Kazushige Nishimura, Yuichiro Hashimoto, Masuyuki Sugiyama, Masuyoshi Yamada, Hidetoshi Morokuma
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Publication number: 20140145078Abstract: (1) part or all of the number, coordinates and size/shape and imaging sequence of imaging points each for observation, the imaging position change method and imaging conditions can be calculated automatically from CAD data, (2) a combination of input information and output information for imaging recipe creation can be set arbitrarily, and (3) decision is made of imaging or processing at an arbitrary imaging point as to whether to be successful/unsuccessful and in case a failure is determined, a relief process can be conducted in which the imaging point or imaging sequence is changed.Type: ApplicationFiled: January 29, 2014Publication date: May 29, 2014Applicant: Hitachi High-Technologies CorporationInventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma
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Patent number: D708530Type: GrantFiled: December 20, 2011Date of Patent: July 8, 2014Assignee: Hitachi High-Technologies CorporationInventors: Hiroyuki Noda, Mitsuru Oonuma, Yoko Sato, Kouji Ishiguro, Hidetoshi Morokuma
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Patent number: D711011Type: GrantFiled: September 26, 2013Date of Patent: August 12, 2014Assignee: Hitachi High-Technologies CorporationInventors: Hiroyuki Noda, Hidetoshi Morokuma, Koji Ishiguro
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Patent number: RE45204Abstract: In an imaging recipe creating apparatus that uses a scanning electron microscope to create an imaging recipe for SEM observation of a semiconductor pattern, in order that the imaging recipe for measuring the wiring width and other various dimension values of the pattern from an observation image and thus evaluating the shape of the pattern is automatically generated within a minimum time by the analysis using the CAD image obtained by conversion from CAD data, an CAD image creation unit that creates the CAD image by converting the CAD data into an image format includes an image-quantizing width determining section, a brightness information providing section, and a pattern shape deformation processing section; the imaging recipe being created using the CAD image created by the CAD image creation unit.Type: GrantFiled: November 6, 2009Date of Patent: October 21, 2014Assignee: Hitachi High-Technologies CorporationInventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani
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Patent number: RE45224Abstract: In an imaging recipe creating apparatus that uses a scanning electron microscope to create an imaging recipe for SEM observation of a semiconductor pattern, in order that the imaging recipe for measuring the wiring width and other various dimension values of the pattern from an observation image and thus evaluating the shape of the pattern is automatically generated within a minimum time by the analysis using the CAD image obtained by conversion from CAD data, an CAD image creation unit that creates the CAD image by converting the CAD data into an image format includes an image-quantizing width determining section, a brightness information providing section, and a pattern shape deformation processing section; the imaging recipe being created using the CAD image created by the CAD image creation unit.Type: GrantFiled: November 18, 2009Date of Patent: October 28, 2014Assignee: Hitachi High-Technologies CorporationInventors: Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani
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Patent number: D746476Type: GrantFiled: September 5, 2013Date of Patent: December 29, 2015Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hiroyuki Noda, Hidetoshi Morokuma, Koji Ishiguro
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Patent number: D748813Type: GrantFiled: September 26, 2013Date of Patent: February 2, 2016Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Koji Ishiguro, Hidetoshi Morokuma, Yukihiro Ogawa, Tsuyoshi Somekawa