Abstract: Described herein is a technique capable of improving a film thickness uniformity on a surface of a wafer whereon a film is formed. According to one aspect of the technique of the present disclosure, there is provided a substrate processing apparatus including: a process chamber in which a substrate is processed; a process gas nozzle configured to supply a process gas into the process chamber; an inert gas nozzle configured to supply an inert gas into the process chamber while a concentration of the process gas at the center of the substrate is higher than a concentration required for processing the substrate; and an exhaust pipe configured to exhaust an inner atmosphere of the process chamber; wherein the process gas nozzle and the inert gas nozzle are disposed beside the edge of substrate with a predetermined distance therebetween corresponding to an angle of circumference of 90 to 180 degrees.

Abstract: A disclose substrate support of a plasma processing apparatus has an electrostatic chuck that holds an edge ring. The electrostatic chuck includes a first electrode and a second electrode. In an execution period of a first plasma processing on a substrate, first potentials which are ones out of potentials same as each other and potentials different from each other are set to the first and second electrodes, respectively. In an execution period of a second plasma processing on the substrate, second potentials which are others out of the potentials same as each other and the potentials different from each other are set to the first and second electrodes, respectively. The respective potentials of the first electrode and the second electrode are switched from the first potentials to the second potentials.

Abstract: A boundary line visualization system having a terminal includes an image acquisition unit configured to acquire an image including a prescribed location, a terminal state acquisition unit configured to acquire a state of the terminal including coordinates and an attitude of the terminal, a boundary line generation unit configured to generate a computer graphics (CG) image based on coordinates of a boundary line present within a certain range from the terminal on the basis of the state of the terminal acquired by the terminal state acquisition unit, and a composite image generation unit configured to generate a composite image in which the CG image of the boundary line is superimposed on the image on the basis of the coordinates indicating the boundary line and the coordinates indicating the prescribed location included in the image acquired by the image acquisition unit.

Abstract: Disclosed is a temperature-sensitive actuator which is configured in such a manner that heat from a PTC heater for the temperature-sensitive part of a thermoelement can be received appropriately and reliably in a required state. Specifically disclosed is a temperature-sensitive actuator (10) which is configured to sense the temperature although a piston (14) is operated forcibly by generating heat from a PTC heater (20) and warming the temperature-sensitive part (13) of a wax thermoelement, wherein a contact member (40) is interposed between the temperature-sensitive part of a thermoelement and the PTC heater. Consequently, variation in the amount of heat which is received at the temperature-sensitive part of a thermoelement from the PTC heater is limited, and the stabilized output (lift) of the thermoelement can be ensured.

Abstract: A boom body comprises a boom front member, a boom intermediate member and a boom rear member. An arm-connection bracket is jointed to the boom front member and a vehicle body-mounting bracket is jointed to the boom rear member, thereby forming a boom. With this structure, a cross section of the boom body is less prone to be deformed and therefore, the plate thickness can be reduced, the rigidity of the boom body can be increased without mounting a cross section restraint material and the cross section of the boom is not deformed. Therefore, it is possible to reduce the boom in weight.

Abstract: An arm body of a working machine has a hollow and triangular cross-section. A bucket-connection bracket is jointed to one longitudinal end of an arm body, and an arm cylinder bracket is jointed to another longitudinal end of the arm body, thereby forming an arm. With the triangular cross-sectional structure, the arm body is less prone to deformation under the stress of a load. The improved triangular cross-sectional structure permits the plate thickness of the arm body to be reduced, and the rigidity of the arm body to be increased without mounting a cross-section restraint material in the arm body. The cross-section of the boom will not deform even though the plate thickness is reduced. Therefore, it is possible to reduce the weight of the boom and still prevent deformation of the boom under heavy load.

Abstract: A boom body (23) comprises a boom front member (20), a boom intermediate member (22) and a boom rear member (21). An arm-connection bracket (24) is jointed to the boom front member (20) and a vehicle body-mounting bracket (25) is jointed to the boom rear member (21), thereby forming a boom. With this structure, a cross section of the boom body (23) is less prone to be deformed and therefore, the plate thickness can be reduced, the rigidity of the boom body (23) can be increased without mounting a cross section restraint material and the cross section of the boom is not deformed. Therefore, it is possible to reduce the boom in weight.

Abstract: A boom body (23) comprises a boom front member (20), a boom intermediate member (22) and a boom rear member (21). An arm-connection bracket (24) is jointed to the boom front member (20) and a vehicle body-mounting bracket (25) is jointed to the boom rear member (21), thereby forming a boom. With this structure, a cross section of the boom body (23) is less prone to be deformed and therefore, the plate thickness can be reduced, the rigidity of the boom body (23) can be increased without mounting a cross section restraint material and the cross section of the boom is not deformed. Therefore, it is possible to reduce the boom in weight.

Abstract: An arm body of a working machine has a hollow and triangular cross-section. A bucket-connection bracket is jointed to one longitudinal end of an arm body, and an arm cylinder bracket is jointed to another longitudinal end of the arm body, thereby forming an arm. With the triangular cross-sectional structure, the arm body is less prone to deformation under the stress of a load. The improved triangular cross-sectional structure permits the plate thickness of the arm body to be reduced, and the rigidity of the arm body to be increased without mounting a cross-section restraint material in the arm body. The cross-section of the boom will not deform even though the plate thickness is reduced. Therefore, it is possible to reduce the weight of the boom and still prevent deformation of the boom under heavy load.

Abstract: An arm body of a working machine has a hollow and triangular cross-section. A bucket-connection bracket is jointed to one longitudinal end of an arm body, and an arm cylinder bracket is jointed to another longitudinal end of the arm body, thereby forming an arm. With the triangular cross-sectional structure, the arm body is less prone to deformation under the stress of a load. The improved triangular cross-sectional structure permits the plate thickness of the arm body to be reduced, and the rigidity of the arm body to be increased without mounting a cross-section restraint material in the arm body. The cross-section of the boom will not deform even though the plate thickness is reduced. Therefore, it is possible to reduce the weight of the boom and still prevent deformation of the boom under heavy load.

Abstract: An object of the present invention is to provide a thermostat device which ensures a smooth slide without damaging the slide function by immersion of a cooling liquid, increase flexibility of a circulation channel design by miniaturization, and materializes a hand-operated opening and closing of a valve. In order to solve the problems, the thermostat device 1 in which a heat responding element (wax 3) to expand and shrink by sensing the heating or cooling of the circulating liquid in the circulation channel, is embedded, a sliding member (piston rod 9) is slid in accordance with volume changes caused by the expansion and shrinkage of the expansion element to open and close the valve body, is structured that a sensor case 2 which embeds the responding element is placed in the circulation channel of the circulating liquid, and the sliding member is placed outside of the circulation channel of the circulating liquid.

Abstract: The present invention is a working vehicle having high visibility and transportability and is capable of providing a large excavation force over a wide range. To this end, a working unit (30) is provided with a boom (31), which is divided into a first boom (31a) and a second boom (31b), and an arm (32), which is fixed to a front end portion of the second boom (31b). The first boom (31a) is free to be swung by a first boom hydraulic cylinder (36) and the second boom (31b) is free to be swung by a second boom hydraulic cylinder (37). One end portion of a first arm link (33a) is attached to a front end portion of the second boom (31b), and one end portion of a second arm link (33b) is attached to a rear end portion of the arm (32), with one end portion of an arm hydraulic cylinder (38) and the other end portions of the first arm link (33a) and the second arm link (33b) being connected together.

Abstract: A working tool unit of a construction machine, which excels in transportability and is capable of smoothly carrying out diversified types of work in a wide range, is disclosed. Therefore, the working tool unit according to the present invention includes: a first boom (31a) rockably mounted on a turning frame of a vehicle body; a second boom (3b) mounted to be rockable on the first boom; an arm (32) mounted to be rockable on the second boom; a working tool such as a bucket (33) mounted on said arm; a first boom cylinder (35) mounted on the turning frame (21) and the second boom to rock the second boom; a second boom cylinder (36) mounted on the second boom and the first boom to rock the second boom; and an arm cylinder (37) mounted on the second boom and the arm to rock the arm.