Abstract: A conductive film made of Al or alloy containing Al as a main component is formed on an underlying substrate. An upper conductive film is disposed on the conductive film. A first opening is formed through the upper conductive film. An insulating film is disposed on the upper conductive film. A second opening is formed through the insulating film. An inner wall of the second opening is retreated from an inner wall of the first opening. An ITO film is formed covering a partial upper surface of the insulating film and inner surfaces of the first and second openings, and contacting a partial upper surface of the upper conductive film at a region inside of the second opening. Good electrical contact between an Al or Al alloy film and an ITO film can be established and productivity can be improved.

Abstract: A conductive film made of Al or alloy containing Al as a main component is formed on an underlying substrate. An upper conductive film is disposed on the conductive film. A first opening is formed through the upper conductive film. An insulating film is disposed on the upper conductive film. A second opening is formed through the insulating film. An inner wall of the second opening is retreated from an inner wall of the first opening. An ITO film is formed covering a partial upper surface of the insulating film and inner surfaces of the first and second openings, and contacting a partial upper surface of the upper conductive film at a region inside of the second opening. Good electrical contact between an Al or Al alloy film and an ITO film can be established and productivity can be improved.

Abstract: A plurality of control and data bus lines are formed on the surface of an insulating substrate. A pixel electrode and a switching element are formed at an area corresponding to each interconnection portion between the control and data bus lines. A plurality of capacitor bus lines are formed on the surface of the interlayer insulating substrate for forming an auxiliary capacitor between the pixel electrode and capacitor bus line. The capacitor bus line has an auxiliary capacitor pattern branching from the capacitor bus line and extending along the data bus line. This auxiliary capacitor pattern is constituted of a cutting portion and a remaining main portion. A space between the cutting portion and a corresponding data bus line is broader than that between the main portion and the corresponding data bus line.