Patents by Inventor Hideuki Ijiri

Hideuki Ijiri has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FABRICATION METHOD AND FABRICATION APPARATUS OF GROUP III NITRIDE CRYSTAL SUBSTANCE
    Publication number: 20110065265
    Abstract: A fabrication method of a group III nitride crystal substance includes the steps of cleaning the interior of a reaction chamber by introducing HCl gas into the reaction chamber, and vapor deposition of a group III nitride crystal substance in the cleaned reaction chamber. A fabrication apparatus of a group III nitride crystal substance includes a configuration to introduce HCl gas into the reaction chamber, and a configuration to grow a group III nitride crystal substance by HVPE. Thus, a fabrication method of a group III nitride crystal substance including the method of effectively cleaning deposits adhering inside the reaction chamber during crystal growth, and a fabrication apparatus employed in the fabrication method are provided.
    Type: Application
    Filed: November 18, 2010
    Publication date: March 17, 2011
    Applicant: Sumitomo Electric Industries, Ltd.
    Inventors: Hitoshi KASAI, Takuji Okahisa, Shunsuke Fujita, Naoki Matsumoto, Hideuki Ijiri, Fumitaka Sato, Kensaku Motoki, Seiji Nakahata, Koji Uematsu, Ryu Hirota