Abstract: A sealing mechanism functioning as a separator between two spaces having different pressures includes: a housing; a shaft inserted into the housing; an annular sealing member sealing a gap by contacting a radial outer surface of the shaft or a radial outer surface of a rotary portion fixed to the shaft; and a lubricant groove storing a lubricant to be supplied between the annular sealing member and the radial outer surface.

Abstract: An electric motor (1) includes a wiring member (20a, 20b), an annular inner housing (10) disposed on an inner circumferential side of a stator (11), and a wiring fixing member (2) formed around the wiring member (20a, 20b). A longitudinal hole (recessed part) (10a, 10d) which opens to one end surface and extends in an axial direction is formed in an outer circumferential edge portion of the inner housing (10), and a level difference (locking part) (12) is formed on an inner circumferential surface of the longitudinal hole. When the wiring member (20a, 20b) is inserted through the longitudinal hole (10a, 10d), the wiring fixing member (2) is locked to the level difference.

Abstract: To provide a motor capable of preventing particles generated inside from being emitted to the outside, more reliably. The motor includes: a stator that is provided with a coil and a stator core; a rotor that is disposed on the inner side of the stator in a radial direction, and rotated relatively with respect to the stator; a stator housing that has a first exhaust hole through which the air is exhausted by suctioning, and to which the stator is fixed; a first sealing portion where the stator housing and the rotor housing face each other with a first gap therebetween across the entire circumference in the circumferential direction, with the first sealing portion being provided between an internal space and the outside of the stator housing; and a first squeeze portion that is at a position different from the first sealing portion, and that has a second gap connecting the internal space and the first exhaust hole.

Abstract: Provided is a motor capable of more reliably preventing dust generated therein from flowing to the outside. A motor includes a stator, a rotor, a rotor housing which rotates along with the rotor, a stator housing which fixes the stator thereto, includes spaces formed with respect to the rotor housing, and overlaps the rotor housing with first gaps interposed therebetween in the entire circumferential direction, annular members which overlap the stator housing with second gaps interposed therebetween in the entire circumferential direction inside the spaces, exhaust holes which suck and discharge air inside the spaces through the second gaps, and exhaust grooves.

Abstract: A sealing mechanism functioning as a separator between two spaces having different pressures or gases, includes: a housing; a shaft inserted into the housing; and a plurality of annular sealing members sealing a gap by contacting a part of the shaft or a radial outer surface of a rotary portion fixed to the shaft. The respective annular sealing members include materials having different material quality and are disposed at different positions in an axial direction parallel to a center axis of the shaft.

Abstract: One first drive unit that advances or recedes in the X-direction and that exerts a drive force in the X-direction to a movable table is arranged to exert a drive force to a center position in the Y-direction of one end part in the X-direction of the movable table. Two second drive units that advance or recede in the Y-direction that is perpendicular to the X-direction, and that exert the drive forces in the Y-direction to the movable table are arranged to be point-symmetric with respect to the center of the movable table as the center of symmetry. Plural plane guide bearings are arranged at positions such that the total sum of the moment forces of the respective plane guide bearings is zero on the center axis line in the X-direction of the movable table.

Abstract: Provided is a motor capable of more reliably preventing dust generated therein from flowing to the outside. A motor includes a stator, a rotor, a rotor housing which rotates along with the rotor, a stator housing which fixes the stator thereto, includes spaces formed with respect to the rotor housing, and overlaps the rotor housing with first gaps interposed therebetween in the entire circumferential direction, annular members which overlap the stator housing with second gaps interposed therebetween in the entire circumferential direction inside the spaces, exhaust holes which suck and discharge air inside the spaces through the second gaps, and exhaust grooves.

Abstract: One first drive unit that advances or recedes in the X-direction and that exerts a drive force in the X-direction to a movable table is arranged to exert a drive force to a center position in the Y-direction of one end part in the X-direction of the movable table. Two second drive units that advance or recede in the Y-direction that is perpendicular to the X-direction, and that exert the drive forces in the Y-direction to the movable table are arranged to be point-symmetric with respect to the center of the movable table as the center of symmetry. Plural plane guide bearings are arranged at positions such that the total sum of the moment forces of the respective plane guide bearings is zero on the center axis line in the X-direction of the movable table.

Abstract: A sealing mechanism functioning as a separator between two spaces having different pressures includes: a housing; a shaft inserted into the housing; an annular sealing member sealing a gap by contacting a radial outer surface of the shaft or a radial outer surface of a rotary portion fixed to the shaft; and a lubricant groove storing a lubricant to be supplied between the annular sealing member and the radial outer surface.

Abstract: A sealing mechanism functioning as a separator between two spaces having different pressures or gases, includes: a housing; a shaft inserted into the housing; and a plurality of annular sealing members sealing a gap by contacting a part of the shaft or a radial outer surface of a rotary portion fixed to the shaft. The respective annular sealing members include materials having different material quality and are disposed at different positions in an axial direction parallel to a center axis of the shaft.