Patents by Inventor Hideyuki Chinju

Hideyuki Chinju has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method
    Patent number: 6847696
    Abstract: A measurement apparatus has a first detector for measuring an intensity such that a sheet-shaped beam of synchrotron radiation is integrated over the entire range of the beam in the thickness direction thereof; a second detector for measuring the intensity of the beam at two points where positions along the direction are different; and a calculating device for calculating the magnitude of the beam in the direction on the basis of the detections by the first and second detectors.
    Type: Grant
    Filed: October 21, 2003
    Date of Patent: January 25, 2005
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hideyuki Chinju, Yutaka Watanabe, Akira Miyake, Nobuaki Oqushi
  • Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method
    Publication number: 20040081272
    Abstract: A measurement apparatus has a first detector for measuring an intensity such that a sheet-shaped beam of synchrotron radiation is integrated over the entire range of the beam in the thickness direction thereof; a second detector for measuring the intensity of the beam at two points where positions along the direction are different; and a calculating device for calculating the magnitude of the beam in the direction on the basis of the detections by the first and second detectors.
    Type: Application
    Filed: October 21, 2003
    Publication date: April 29, 2004
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Hideyuki Chinju, Yutaka Watanabe, Akira Miyake, Nobuaki Oqushi
  • Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method
    Patent number: 6665371
    Abstract: A measurement apparatus has a first detector for measuring an intensity such that a sheet-shaped beam of synchrotron radiation is integrated over the entire range of the beam in the thickness direction thereof; a second detector for measuring the intensity of the beam at two points where positions along the direction are different; and a calculating device for calculating the magnitude of the beam in the direction on the basis of the detections by the first and second detectors.
    Type: Grant
    Filed: May 31, 2000
    Date of Patent: December 16, 2003
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hideyuki Chinju, Yutaka Watanabe, Akira Miyake, Nobuaki Ogushi
  • Method of controlling a stage and a system such as an exposing apparatus using the same
    Patent number: 5760561
    Abstract: A method of controlling a stage includes the steps of setting a plurality of drive modes according to which the stage is driven, which correspond to a plurality of positioning processes for positioning an element supported by the stage, and driving the stage according to the plurality of drive modes corresponding to the plurality of positioning processes. An exposure apparatus employing such a method includes a stage mechanism on which a substrate is placed, an exposure device for exposing the substrate to light, a memory for storing data representing a plurality of drive modes according to which the stage mechanism is driven for positioning the substrate, a driver for driving the stage mechanism in accordance with the drive modes, and a controller for selecting one of the drive modes stored in the memory in accordance with a positioning process according to which the substrate is to be positioned, and for controlling the driver in accordance with the selected drive mode.
    Type: Grant
    Filed: September 24, 1996
    Date of Patent: June 2, 1998
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hideyuki Chinju, Kunitaka Ozawa, Hirohisa Ohta