Abstract: An ice-making machine has a box-shaped lower housing with an ice storage bin, a box-shaped upper housing mounted on a rear portion of the lower housing, an ice-making mechanism within the front portion of a machine compartment in the upper housing, and a freezing unit installed behind the ice-making mechanism for supplying refrigerant to the ice-making mechanism. An open-and-close ice-access lid is pivotally mounted between the lower end of the upper housing and the the lower housing. An air intake passage introduces outside cooling air from the front face of the lower housing into the machine compartment along inner surfaces of one side wall and a rear wall of the lower housing. An air discharge passage is provided for passing the air after cooling to flow outward along inner surfaces of the rear wall and the other side wall of the lower housing to an exterior discharge from the front face of the lower housing.

Abstract: A deviation calculating unit 42 calculates a deviation between an internal temperature detected by a temperature sensor 35 and a target temperature provided from a target temperature setting unit 41 for each predetermined time period. The deviation is integrated by a deviation integrating unit 46. When the integrated value exceeds a predetermined reference value, a rotational speed of an inverter motor that drives a compressor is increased. Therefore, for example, even if an internal temperature temporarily rises because a door is opened temporarily and outside air flows into a storage compartment, because there is no sudden change in the integrated value of the temperature deviation and the rotational speed of the compressor does not react in an oversensitive manner and rapidly increase. Consequently the control is stable. Thus, an unnecessarily oversensitive response to a sudden change in an internal temperature can be prevented, enabling operation at a higher efficiency.

Abstract: A liquid refrigerant from a compressor and a condenser is alternately supplied to a cooling device for the freezing room 27F and an evaporator for refrigeration room through a three-way valve, so as to conduct the cooling of a freezing room and a refrigeration room. When the thermal load condition of a refrigerating cycle is light, the three-way valve switches to the “F side opened-state” after the compressor is stopped, and thereby conducting pressure balancing, without the liquid refrigerant flowing into the evaporator for refrigeration room. A cooling storage, wherein from one compressor a refrigerant is selectively supplied to multiple evaporators, is constituted so as to prevent one evaporator side from becoming a supercooled state, and furthermore, quickly conduct pressure balancing after stop of the compressor.

Abstract: The liquid refrigerant from the compressor 20 and the condenser 21 is alternately supplied to the cooling device for the freezing room 27F and the evaporator for the refrigeration room 27R through the three-way valve 24, so that the freezing room and the refrigeration room are alternately cooled. Here, the ratio of the refrigerant supply time to each evaporator is controlled based not on a deviation between a target temperature set for each storage room and an actual storage room temperature measured in each storage room, but on an integrated value obtained by integrating the difference of these deviations. In a cooling storage, in which from one compressor a refrigerant is selectively supplied to multiple evaporators respectively disposed in multiple storage rooms of varied thermal loads, a one-storage room cooling mode is prevented from being unnecessarily switched to a alternate cooling mode.

Abstract: Ice making water is uniformly supplied to ice making regions of an ice making section.

Abstract: An ice-making machine comprising a box-shaped lower housing provided therein with an ice storage bin, a box-shaped upper housing mounted on a rear portion of the lower housing, an ice-making mechanism assembled within the front portion of a machine compartment formed in the upper housing, and a freezing unit installed behind the ice-making mechanism for supplying refrigerant to the ice-making mechanism, wherein an open-and-close lid is mounted on an opening formed between the lower end of the front face of the upper housing and the upper end of the front face of the lower housing, and wherein an air intake passage is formed to cause outside air introduced from the front face of the lower housing to flow as cooling air into the machine compartment along inner surfaces of one side wall and the rear wall of the lower housing, and an air discharge passage is formed to cause the air after cooling to flow outward along inner surfaces of the rear wall and the other side wall of the lower housing and to discharge to

Abstract: The liquid refrigerant from the compressor 20 and the condenser 21 is alternately supplied to the cooling device for the freezing room 27F and the evaporator for the refrigeration room 27R through the three-way valve 24, so that the freezing room and the refrigeration room are alternately cooled. Here, the ratio of the refrigerant supply time to each evaporator is controlled based not on a deviation between a target temperature set for each storage room and an actual storage room temperature measured in each storage room, but on an integrated value obtained by integrating the difference of these deviations. In a cooling storage, in which from one compressor a refrigerant is selectively supplied to multiple evaporators respectively disposed in multiple storage rooms of varied thermal loads, a one-storage room cooling mode is prevented from being unnecessarily switched to a alternate cooling mode.

Abstract: PROBLEM TO BE SOLVED: To provide a cooling storage, in which a refrigerant from one compressor is selectively supplied to multiple evaporators respectively disposed in multiple storage rooms having different thermal loads, and prevent any temperature rise of a storage room of higher thermal load. SOLUTION: The liquid refrigerant from the compressor 20 and the condenser 21 is alternately supplied to the cooling device for the freezing room 27F and the evaporator for the refrigeration room 27R through the three-way valve 24, so that the freezing room and the refrigeration room are alternately cooled. Even if any one of the freezing room 13F and the refrigeration room 13R reached the lower limit set temperature on ahead, the freezing room 13F (the storage room of higher thermal load) is always cooled last and certainly cooled until it reaches the lower limit set temperature.

Abstract: A liquid refrigerant from a compressor 20 and a condenser 21 is alternately supplied to a cooling device for the freezing room 27F and an evaporator for refrigeration room 27R through a three-way valve 24, so as to conduct the cooling of a freezing room and a refrigeration room. When the thermal load condition of a refrigerating cycle 40 is light, the three-way valve 24 switches to the “F side opened-state” after the stop of the compressor 20, and thereby conducting pressure balancing, without the liquid refrigerant flowing into the evaporator for refrigeration room 27R. A cooling storage, wherein from one compressor a refrigerant is selectively supplied to multiple evaporators, is constituted so as to prevent one evaporator side from becoming a supercooled state, and furthermore, quickly conduct pressure balancing after stop of the compressor.

Abstract: Deviation calculating means 42 calculates a deviation between an internal temperature detected by a temperature sensor 35 and a target temperature provided from target temperature setting means 41 for each predetermined time period. The deviation is integrated by deviation integrating means 46. When the integrated value exceeds a predetermined reference value, a rotational speed of an inverter motor that drives a compressor is increased. Therefore, for example, even if an internal temperature temporarily rises because a door is opened temporarily and outside air flows into a storage compartment, because there is no sudden change in the integrated value of the temperature deviation and the rotational speed of the compressor does not react in an oversensitive manner and rapidly increase. Consequently the control is stable. Thus, an unnecessarily oversensitive response to a sudden change in an internal temperature can be prevented, enabling operation at a higher efficiency.

Abstract: In the case the first selection criteria is set, a plurality of detection points are selected to control the pitching and rolling of the wafer, whereas in the case the second selection criteria is set, priority is put to control the rolling on the wafer. The exposure apparatus has a selection unit to choose between these criteria, and on scanning exposure the controller adjusts the wafer position in the optical axis direction, pitching, rolling or the wafer position in the optical axis direction and rolling according to the selection criteria. Accordingly, by precisely adjusting the wafer surface position in the optical axis direction and rolling that greatly affects defocus, the critical dimension variation by a macroscopic observation, which is caused by defocus, can be prevented. Moreover, by performing an alternate scanning on the entire shot area including shot areas to be exposed on the circumferential portion, throughput can be maintained extremely high.

Abstract: An optical detection system capable of detecting even small particles or defects on a specimen such as a mask with high sensitivity and being unaffected by diffracted light from the edges of the pattern even when inspecting a thick specimen. The optical detection system includes a light emission means for illuminating a pattern surface on the specimen with light, a first light reception optical system placed on the pattern surface side of the specimen for receiving scattered light emanating from the pattern surface, a second light reception optical system placed on the glass side of the specimen in symmetry with the first light reception optical system relative to the pattern surface for receiving scattered light emanating from the pattern surface through the specimen and a corrective optical element for correcting for differences in the aberration states of the first and second light reception optical systems.

Abstract: A foreign particle inspection apparatus, for detecting a foreign particle on a reticle or the like includes an illumination system for irradiating an inspection area on a specimen with inspecting light, and plural light-receiving systems adapted to condense the scattered light from a foreign particle in the inspection area and having respective light-receiving areas on the specimen, each smaller than the inspection area. Each of the light-receiving areas of the plural light-receiving systems overlaps partially with at least one of the other light-receiving areas. The plural light-receiving systems are so arranged that any point in the inspection area is covered by the light-receiving areas of at least two of the plural light-receiving systems. A foreign particle in the inspection area is detected by a detection system, based on the lights condensed by the plural light receiving systems.

Abstract: An apparatus includes a light source for emitting a light beam, a light beam expander for expanding the light beam in a predetermined direction, and radiating the expanded light beam onto an object to be inspected, a scanning device for moving the object to be inspected relative to the light beam to be radiated onto the object to be inspected, and a photodetector for photoelectrically converting scattered light generated from a defect (including foreign matter) on the object to be inspected, and inspects the defect on the basis of a photoelectric conversion signal obtained from the photodetector. A light-shielding plate having a plurality of edges for limiting the light beam expanded by the light beam expander at the two end portions, in the expansion direction, of the light beam is arranged, and at least one of the plurality of edges is formed to be transverse to the relative scanning direction (Y direction).

Abstract: In a foreign particle inspecting method and apparatus in which a polarized beam is applied to a surface to be inspected through a light transmitting member mounted thereon, in which scattered light from a foreign particle on the surface to be inspected is received by a light receiving device through the light transmitting member, and in which the foreign particle is discriminated based on a detection signal from the light receiving device, the detection signal is corrected in conformity with the transmittance of the light transmitting member for polarized incident scanning light and the transmittance of the light transmitting member for non-polarized light scattered from the foreign particle, for various angles of incidence of the polarized light and emergence of the non-polarized light. Foreign particle data may be indicated by a mapping method.