Patents by Inventor Hikaru Masuda

Hikaru Masuda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Probing apparatus
    Publication number: 20070159192
    Abstract: A probing apparatus comprising: an inspection stage for receiving a flat plate-like device under test with a plurality of electrodes and moving the device under test on the inspection stage in at least three directions, that is, an X direction and a Y direction intersecting each other within a parallel plane to the device under test, and a Z direction intersecting both the directions; a probe card having a plurality of probes and spaced apart from the inspection stage in the Z direction such that the probe tips face the inspection stage; a displacement mechanism for relatively displacing the probe card and the inspection stage for adjustment of parallelism of the device under test on the inspection stage and the probe card; a plurality of measuring instruments respectively for measuring the interval between the inspection stage and the probe card and arranged at intervals in one of the inspection stage and the probe card in the X direction and the Y direction; a control portion for controlling at least the me
    Type: Application
    Filed: January 4, 2007
    Publication date: July 12, 2007
    Inventors: Yoshiei Hasegawa, Hikaru Masuda, Katsuo Yasuda, Kenichi Washio, Masashi Hasegawa
  • Probing apparatus
    Publication number: 20070159194
    Abstract: A probing apparatus comprising: an inspection stage for receiving a flat plate-like device under test with a plurality of electrodes and moving the device under test on the inspection stage in at least three directions, that is, an X direction and a Y direction intersecting each other within a parallel plane to the device under test, and a Z direction intersecting both the directions; a probe card having a plurality of probes and spaced apart from the inspection stage in the Z direction such that the probe tips face the inspection stage; a displacement mechanism for relatively displacing the probe card and the inspection stage for adjustment of parallelism of the device under test on the inspection stage and the probe card; a plurality of measuring instruments respectively for measuring the interval between the inspection stage and the probe card and arranged at intervals in one of the inspection stage and the probe card in the X direction and the Y direction; a control portion for controlling at least the me
    Type: Application
    Filed: January 9, 2007
    Publication date: July 12, 2007
    Inventors: Yoshiei Hasegawa, Hikaru Masuda, Katsuo Yasuda, Kenichi Washio, Masashi Hasegawa