Patents by Inventor Hikaru Saruta

Hikaru Saruta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas supply apparatus and film forming apparatus
    Patent number: 6224676
    Abstract: According to the present invention, a signal transmission system is arranged in a region surrounded by a gas control means and a plurality of blocks whereby a region between elements constituting a gas supply flow path can be utilized for the region of the signal transmission system thereby to make the occupying space small and miniaturize the apparatus.
    Type: Grant
    Filed: December 1, 1999
    Date of Patent: May 1, 2001
    Assignee: Hitachi, Ltd.
    Inventors: Katsunori Nakajima, Hiroyuki Shida, Eiji Setoyama, Koji Ishiguro, Hikaru Saruta