Patents by Inventor Hin Koon Woo

Hin Koon Woo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of heteroepitaxial growth of beta silicon carbide on silicon
    Patent number: 5879450
    Abstract: A method and an apparatus have been developed to deposit heteroepitaxial beta-silicon carbide films on silicon using bias-assisted hot filament chemical vapor deposition (BA-HFCVD). The apparatus includes a graphite plate as the carbon source and the silicon substrate as the silicon source. Hydrogen was the only feeding gas to the system.
    Type: Grant
    Filed: August 13, 1997
    Date of Patent: March 9, 1999
    Assignee: City University of Hong Kong
    Inventors: Shuit Tong Lee, Chun Sing Lee, Bello Igor, Yat Wah Lam, Hin Koon Woo