Patents by Inventor Hiral Ajmera

Hiral Ajmera has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electroplating solution composition control
    Publication number: 20030150734
    Abstract: A method and apparatus for removing degraded organics from an electroplating solution by passing at least a portion of electroplating solution through a filter. The apparatus generally includes a deposition cell including a fluid inlet, a fluid reservoir, and at least one filter disposed between the reservoir and the fluid inlet. The apparatus may further include a control valve disposed between the fluid reservoir and the fluid inlet for passing at least a portion of an electroplating solution to a recovery stream including the at least one filter.
    Type: Application
    Filed: February 11, 2002
    Publication date: August 14, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Rajeev Bajaj, Ramin Emami, Girish Dixit, Hiral Ajmera, Roman Mostovoy